Publications
- 2017
- Published
Chip bonding of low-melting eutectic alloys by transmitted laser radiation
Hoff, C., Venkatesh, A., Schneider, F., Hermsdorf, J., Bengsch, S., Wurz, M. C., Kaierle, S. & Overmeyer, L., 12 Apr 2017, In: Advanced Optical Technologies. 6, 3-4, p. 311-317 7 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding process
Long, Y., Dencker, F., Schneider, F., Emde, B., Li, C., Hermsdorf, J., Wurz, M. C. & Twiefel, J., 21 Feb 2017, Proceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016. Institute of Electrical and Electronics Engineers Inc., p. 405-410 6 p. 7861512Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
New coating system for direct-deposition of sensors on components of arbitrary size: A novel approach allowing for thinner sensors with higher measuring accuracy
Klaas, D., Becker, J., Wurz, M. C., Schlosser, J. & Kunze, M., 5 Jan 2017, IEEE Sensors, SENSORS 2016: Proceedings. Institute of Electrical and Electronics Engineers Inc., 7808440. (Proceedings of IEEE Sensors).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Anodische auflösung von aluminium als downsizing technik für mikro-induktivitäten
Beringer, S., Dinulovic, D., Bengsch, S., Haug, M. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 624-627 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Atom-Chip based BEC sources for compact and transportable experiments
Wurz, M. C., Heine, H., Matthias, J., Grove, N., Sahelgozin, M., Kassner, A., Rechel, M., Abend, S., Seidel, S. T., Herr, W., Wurz, M. C., Müller, J., Ertmer, W. & Rasel, E. M., 2017.Research output: Contribution to conference › Poster › Research
- Published
Comparative study of microfabricated inductors / transformers for high frequency power applications
Dinulovic, D., Shousha, M., Haug, M., Beringer, S., Wurz, M. & Rissing, L., 2017, 2017 IEEE International Magnetics Conference, INTERMAG 2017. Institute of Electrical and Electronics Engineers Inc., 8007782Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Dicing by "Crack-and-Fracture": Novel separation method for MEMS substrates
Stompe, M. & Wurz, M. C., 2017, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. p. 101-102 2 p. (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Electrical feed through for tool integrated high temperature applications
Dencker, F., Kolodziejczyk, F. & Wurz, M. C., 2017, International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017. p. 50-56 7 p. (International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Elektromechanischer Mikro-Biegeaktor als optischer Shutte
Wurz, M. C., Pyatishev, E., Glukhovskoy, A., Fischer, E. C., Kleimanov, R., Odintsov, A. & Pyatishev, E., 2017, Proceedings of the MikroSystemTechnik Kongress 2017.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
- Published
Elektromechanischer Mikro-Biegeaktor als optischer Shutter
Pyatishev, E., Wurz, M., Enns, Y., Glukhovskoy, A., Fischer, E., Odintsov, A. & Kleimanov, R., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 519-522 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Flexibles magnetisches Lese-/Schreibsystem: Einfluss von Wärme auf das Datenbit
Taptimthong, P. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 586-589 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Hot stamping process reliability – Innovative sensor technology for inline quality assurance
Wurz, M. C., Behrens, B., Hübner, S., Moritz, J., Pfeffer, C., Wölki, K., Dencker, F., Wolter, B., Niemeyer, H. & Müller, T., 2017, Conference Strategies in Car Body Engineering.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
- Published
LED packaging with optimized heat dissipation for a micro LED array
Kusch, A., Wurz, M., Held, M. P., Wolf, A. & Lachmayer, R., 2017, International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017. Otto, T. (ed.). p. 399-402 4 p. (International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Mikroaktorik für ein Taktiles Display
Fischer, E., Glukhovskoy, A., Schmelt, A., Twiefel, J. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 515-518 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Mikrofluidische Galvanik zur Herstellung magnetoresistiver Schichten
Rechel, M., Taptimthong, P., Arndt, M. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 313-316 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Modeling and Characterization of a Bimodal Tactile Display
Wurz, M. C., Fischer, E. C., Twiefel, J., Hofmann, V. & Schmelt, A. S., 2017.Research output: Contribution to conference › Paper › Research
- Published
Press hardening tool integrated thin film temperature sensor
Dencker, F., Schlenkrich, A. & Wurz, M. C., 2017, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. p. 349-350 2 p. (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Pulsed electron source for atmospheric pressure chemical ionization in ion mobility spectrometry
Bunert, E., Heptner, A., Kirk, A. T., Käbein, O., Zimmermann, S., Kusch, A. & Wurz, M. C., 2017, 2017 30th International Vacuum Nanoelectronics Conference (IVNC). Langer, C. & Lawrowski, R. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 102-103 2 p. 8051563. (International Vacuum Nanoelectronics Conference).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Reaktives Ionentiefenätzen von Schattenmasken für die Sensordirektabscheidung mit einer neuartigen Beschichtungsanlage
Klaas, D., Pehrs, F. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017: Proceedings. Berlin: VDE Verlag GmbH, p. 680-683 4 p.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
- Published
Silicon field emitter arrays produced via wafer dicing
Kusch, A., Wurz, M., Bunert, E. & Zimmermann, S., 2017, 2017 30th International Vacuum Nanoelectronics Conference (IVNC). Langer, C. & Lawrowski, R. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 132-133 2 p. 8051577. (International Vacuum Nanoelectronics Conference).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review