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Prof. Dr.  Marc Christopher Wurz

https://orcid.org/0000-0002-2066-8142
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Publications

  1. 2021

  2. Published

    Simulationsgestützte Auslegung und Fertigung von piezoelektrischen Kraftsensor-Arrays zur Untersuchung des Ultraschall-Drahtbondprozesses

    Arndt, M., Wurz, M. C., Dencker, F., Long, Y. & Twiefel, J., 2021, MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, p. 742-745 4 p. (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  3. 2020

  4. Published

    VERFAHREN UND VORRICHTUNG ZUM BESTIMMEN EINER KONZENTRATION

    WURZ, Marc, C. (Inventor), Glukhovskoy, A. (Inventor), Schnebeck, T. (Inventor) & MAIER, Hans, J. (Inventor), 9 Dec 2020, IPC No. G01N 21/ 31 A I, Patent No. EP3746773, Priority date 30 Jan 2019, Priority No. WO2019EP52291

    Research output: Patent

  5. Published

    Verfahren zur Herstellung eines Formkörpers und Bauteil mit elektrischer Funktionalität

    Maier, H. J. (Inventor), Wurz, M. C. (Inventor) & Bengsch, S. (Inventor), 26 Nov 2020, IPC No. H05K 3/ 00 A I, Patent No. DE102019113973, Priority date 24 May 2019, Priority No. DE201910113973

    Research output: Patent

  6. Published

    Transfer Printing of Conductive Thin-Films on PDMS with Soluble Substrates for Flexible Biosensors

    Hadeler, S., Bengsch, S., Prediger, M. & Wurz, M., 14 Nov 2020, In: Engineering Proceedings. 2, 1, p. 8181

    Research output: Contribution to journal › Conference article › Research › peer review

  7. Published

    Development, characterisation and high-temperature suitability of thin-film strain gauges directly deposited with a new sputter coating system

    Klaas, D., Ottermann, R., Dencker, F. & Wurz, M. C., 10 Jun 2020, In: Sensors (Switzerland). 20, 11, p. 1-15 15 p., 3294.

    Research output: Contribution to journal › Article › Research › peer review

  8. Published

    Magnetkopf, Verfahren zur Speicherung von Information sowie Erzeugnis

    Rechel, M. (Inventor), Taptimthong, P. (Inventor) & Wurz, M. C. (Inventor), 16 Jan 2020, IPC No. G11B 5/ 235 A I, Patent No. DE102018116896, Priority date 12 Jul 2018, Priority No. DE201810116896

    Research output: Patent

  9. Published

    Einrichtung mit einem elektrischen Bauteil sowie Verfahren zu deren Herstellung

    Maier, H. J. (Inventor), Wurz, M. C. (Inventor), Bengsch, S. (Inventor), Giese, U. (Inventor) & Omelan, M. (Inventor), 9 Jan 2020, IPC No. B60C 23/ 04 A I, Patent No. DE102018116182, Priority date 4 Jul 2018, Priority No. DE201810116182

    Research output: Patent

  10. Published

    Direct Deposition of Thin-Film Strain Gauges with a New Coating System for Elevated Temperatures

    Ottermann, R., Klaas, D., Dencker, F., Wurz, M. C., Hoheisel, D., Rottengatter, P. & Kruspe, T., 2020, IEEE Sensors, SENSORS 2020: Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 9278661

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  11. Published

    Flexibel und druckempfindlich: Sensoren für die Insertionsüberwachung in der Cochlea

    Prediger, M. & Wurz, M. C., 2020, Hannover

    Research output: Other contribution › Other publication › Research › peer review

  12. Published

    Giant Magneto-Resistive Effect based Sensor on Laser Direct Structured MID Substrates

    Fischer, E. C., Bengsch, S., De Wall, S. & Wurz, M. C., 2020, Proceedings: IEEE 70th Electronic Components and Technology Conference, ECTC 2020. Institute of Electrical and Electronics Engineers Inc., p. 439-444 6 p. 9159426. (Proceedings - Electronic Components and Technology Conference; vol. 2020-June).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  13. Published

    Mikrotechnologische Fertigung von integrierten optischen Gittern für den Einsatz in Atominterferometern

    de Wall, S., Kassner, A., Dencker, F., Künzler, C., Heine, H., Herr, W., Christ, M., Krutzik, M., Rasel, E. M. & Wurz, M. C., 2020, GMM-Fb. 97: Mikro-Nano-Integration. Berlin: VDE Verlag GmbH, p. 56-59 4 p. (GMM-Fachberichte).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  14. Published

    Novel Piezoelectric Force Sensor Array for Investigation of Ultrasonic Wire Bonding

    Arndt, M., Long, Y., Dencker, F., Reimann, J., Twiefel, J. & Wurz, M. C., 2020, Proceedings: IEEE 70th Electronic Components and Technology Conference, ECTC 2020. Institute of Electrical and Electronics Engineers Inc., p. 276-283 8 p. 9159495. (Proceedings - Electronic Components and Technology Conference; vol. 2020-June).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  15. Published

    Optical Platform for Highly Precise Optical Components

    Bengsch, S., Fischer, E., De Wall, S., Schelm, T., Arndt, M. & Wurz, M. C., 2020, Proceedings: IEEE 70th Electronic Components and Technology Conference, ECTC 2020. Institute of Electrical and Electronics Engineers Inc., p. 2191-2196 6 p. 9159477. (Proceedings - Electronic Components and Technology Conference; vol. 2020-June).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  16. Published

    Passive and Active Thermal Management of Bonded Bare-Dice Laser Diodes on Polymer Foil Substrates

    Bengsch, S. & Wurz, M. C., 2020, 2020 IEEE Photonics Conference, IPC 2020. Institute of Electrical and Electronics Engineers Inc., 9252383

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  17. Published

    Selbstschärfende Mikroschleifwerkzeuge

    Asadi, E., Hockauf, R. & Wurz, M. C., 2020, Jahrbuch Schleifen, Honen, Läppen und Polieren. Essen

    Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research › peer review

  18. Published

    Thin Film Transferring via PVA Substrate and Contacting of Sensor inside Elastomer Matrix

    Bengsch, S., Giese, U., Fischer, E. & Wurz, M. C., 2020, IEEE Sensors, SENSORS 2020: Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 9278876. (Proceedings of IEEE Sensors; vol. 2020-October).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  19. 2019

  20. Published

    Integrated atomic quantum technologies in demanding environments: development and qualification of miniaturized optical setups and integration technologies for UHV and space operation

    Christ, M., Kassner, A., Smol, R., Bawamia, A., Heine, H., Herr, W., Peters, A., Wurz, M. C., Rasel, E. M., Wicht, A. & Krutzik, M., 1 Dec 2019, In: CEAS Space Journal. 11, 4, p. 561-566 6 p.

    Research output: Contribution to journal › Article › Research › peer review

  21. Published

    Novel Eddy-Current Sensor for Industrial Deep-Drawing Applications

    Arndt, M., Dencker, F. & Wurz, M. C., Oct 2019, 2019 IEEE Sensors, SENSORS 2019: Proceedings. Institute of Electrical and Electronics Engineers Inc., 4 p. 8956948. (Proceedings of IEEE Sensors; vol. 2019-October).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  22. E-pub ahead of print

    „Hai-Tech“ spanend fertigen: Mikroschleifen – funktionalisierte Oberflächen – selbstschärfende Werkzeuge

    Wurz, M. C., Denkena, B., Asadi, E. & Hockauf, R., 23 Jul 2019, (E-pub ahead of print) In: WB Werkstatt und Betrieb. 2019, 6, p. 48-51

    Research output: Contribution to journal › Article › Research

  23. Published

    Integrated Atomic Quantum Technologies in Demanding Environments:: Development and Qualification of Miniaturized Optical Setups and Integration Technologies for UHV and Space Operation

    Christ, M., Kassner, A., Smol, R., Bawamia, A. I., Peters, A., Wurz, M. C., Rasel, E. M., Wicht, A. & Krutzik, M., 12 Jul 2019, International Conference on Space Optics, ICSO 2018: Proceedings. Sodnik, Z., Karafolas, N. & Cugny, B. (eds.). SPIE, 8 p. 1118088. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11180).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  24. Published

    Substrate modification influence on properties of nanocomposite based on TiO2 and gold nanoparticles

    Mishin, M. V., Vorobyev, A. A., Kondrateva, A. S., Koroleva, E. Y., Karaseov, P. A., Bespalova, P. G., Shakhmin, A. L., Glukhovskoy, A., Wurz, M. C. & Filimonov, A. V., Jun 2019, In: Journal of Physics: Conference Series. 1236, 1, 012025.

    Research output: Contribution to journal › Conference article › Research › peer review

  25. Published

    Structuring of laser activated polymers for sensor applications

    Bengsch, S., Aue, M., Cromwell, K. & Wurz, M. C., May 2019, IEEE 69th Electronic Components and Technology Conference (ECTC): Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 1883-1888 6 p. 8811368. (Proceedings - Electronic Components and Technology Conference; vol. 2019-May).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  26. Published

    Herstellung induktiver elektrischer Bauelemente

    Wurz, M. C. (Inventor), Maier, H. J. (Inventor) & Beringer, S. (Inventor), 25 Apr 2019, IPC No. H01F27/32 A I, H01F5/00, Patent No. DE102017124675A1, 23 Oct 2017, Priority date 23 Oct 2017, Priority No. DE102017124675A

    Research output: Patent

  27. Published

    AMR-based mechanical pressure sensors: a proof of concept

    Prediger, M. S., Rechel, M. & Wurz, M. C., Mar 2019.

    Research output: Contribution to conference › Paper › Research

  28. Published

    AMR Sensoren auf flexiblem substrat zur Messung von Verformungen eines hartmagnetischen Partikel-Elastomerverbunds

    Prediger, M. S., Wittek, C. G. R., Owiss, G. & Wurz, M. C., 2019, MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. 1. ed. VDE Verlag GmbH, p. 111-114 4 p.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  29. Published

    Atomchips mit integrierten optischen Gittern zur Erzeugung von Bose-Einstein-Kondensaten

    Kassner, A., Dencker, F., Künzler, C., Heine, H., Herr, W., Christ, M., Krutzik, M., Rasel, E. M. & Wurz, M., 2019, MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, p. 541-544 4 p.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  30. Published

    Atom chip technology for use under UHV conditions

    Kassner, A., Rechel, M., Heine, H., Herr, W., Christ, M., Krutzik, M., Rasel, E. M. & Wurz, M. C., 2019, Smart Systems Integration 2019: International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2019. Otto, T. (ed.). VDE Verlag GmbH, p. 69-75 7 p.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  31. Published

    Elektrische Kontaktierung bauteilinhärenter Dehnungsmesssensorik mithilfe des Transient Liquid Phase (TLP) Bonding

    Ottermann, R., Knöpke, R. & Wurz, M. C., 2019, MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, p. 263-266 4 p.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  32. Published

    Fertigung und Charakterisierung von in Leiterplatten integrierten Mikrotransformatoren

    Fischer, E., Cromwell, K. & Wurz, M., 2019, MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, p. 569-572 4 p.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  33. Published

    MEMS basierte magnetische passive Mikrobauteile für Hochfrequenz-Leistungsanwendungen

    Dinulovic, D., Shousha, M., El Shafey, K., Haug, M. & Wurz, M., 2019, MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, p. 32-35 4 p.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  34. Published

    Microfabricated Magnetics on Silicon for Point of Load High-Frequency DC-DC Converter Applications

    Dinulovic, D., Shousha, M., Haug, M., Gerfer, A., Beringer, S., Wurz, M. C., Thone, J. & Wens, M., 2019, In: IEEE Transactions on Industry Applications. 55, 5, p. 5068-5077 10 p., 8732443.

    Research output: Contribution to journal › Article › Research › peer review

  35. Published

    Simulationsgestützte Auslegung und Fertigung von werkzeugintegrierten induktiven Sensoren

    Arndt, M., Dencker, F. & Wurz, M. C., 2019, MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, p. 673-676 4 p.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  36. Published

    The concept of a large working stroke reluctance zipper actuator

    Glukhovskoy, A. & Wurz, M. C., 2019, MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, p. 506-509 4 p.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  37. Published

    Vibro-tactile displays for stimulating surface impressions

    Schmelt, A. S., Fischer, E. C., Hofmann, V., Twiefel, J. & Wurz, M. C., 2019, Proceedings of the 23rd International Congress on Acoustics: Integrating 4th EAA Euroregio 2019. Ochmann, M., Vorländer, M. & Fels, J. (eds.). International Commission for Acoustics (ICA), p. 1000-1007 8 p. (Proceedings of the International Congress on Acoustics; vol. 2019-September).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  38. 2018

  39. Published

    Elektrische Schaltungsstruktur und Verfahren zu deren Herstellung

    Maier, H. J. (Inventor), Wurz, M. (Inventor) & Beringer, S. (Inventor), 25 Oct 2018, IPC No. H05K 3/ 40 A I, Patent No. DE102017108437, Priority date 20 Apr 2017, Priority No. DE201710108437

    Research output: Patent

  40. Published

    Verfahren und Anlage zur Herstellung eines elektrischen Bauteils sowie Computerprogramm

    Klaas, D. (Inventor), Wurz, M. C. (Inventor) & Maier, H. J. (Inventor), 11 Oct 2018, IPC No. C23C 16/ 04 A I, Patent No. DE102017113212, Priority date 15 Jun 2017, Priority No. DE201710113212

    Research output: Patent

  41. Published

    Revealing of ultrasonic wire bonding mechanisms via metal-glass bonding

    Long, Y., Dencker, F., Isaak, A., Li, C., Schneider, F., Hermsdorf, J., Wurz, M., Twiefel, J. & Wallaschek, J., Oct 2018, In: Materials Science and Engineering B: Solid-State Materials for Advanced Technology. 236-237, p. 189-196 8 p.

    Research output: Contribution to journal › Article › Research › peer review

  42. Published

    Design and characterization of the lateral actuator of a bimodal tactile display with two excitation directions

    Schmelt, A. S., Hofmann, V., Fischer, E. C., Wurz, M. C. & Twiefel, J., Sept 2018, In: Displays. 54, p. 34-46 13 p.

    Research output: Contribution to journal › Article › Research › peer review

  43. Published

    Concept for Using MID Technology for Advanced Packaging

    Wurz, M. C., Roesener, B., Bengsch, S. & Beringer, S., 7 Aug 2018, Proceedings: IEEE 68th Electronic Components and Technology Conference, ECTC 2018. Institute of Electrical and Electronics Engineers Inc., p. 932-939 8 p. 8429656. (Proceedings - Electronic Components and Technology Conference; vol. 2018-May).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  44. Published

    Structuring methods of polymers for low cost sensor manufacturing

    Bengsch, S., Wurz, M. C., Aue, M. & De Wall, S., 7 Aug 2018, Proceedings: IEEE 68th Electronic Components and Technology Conference, ECTC 2018. Institute of Electrical and Electronics Engineers Inc., p. 1396-1401 6 p. 8429726. (Proceedings - Electronic Components and Technology Conference; vol. 2018-May).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  45. Published

    Self-cleaning mechanisms in ultrasonic bonding of Al wire

    Long, Y., Dencker, F., Isaak, A., Hermsdorf, J., Wurz, M. & Twiefel, J., Aug 2018, In: Journal of Materials Processing Technology. 258, p. 58-66 9 p.

    Research output: Contribution to journal › Article › Research › peer review

  46. Published

    Verfahren zur Anbringung einer elektrischen Mikrostruktur sowie Elastomerstruktur, Faserverbundbauteil und Reifen

    Maier, H. J. (Inventor), Wurz, M. (Inventor) & Bengsch, S. (Inventor), 14 Jun 2018, IPC No. H05K 3/ 20 A I, Patent No. DE102016123795, Priority date 8 Dec 2016, Priority No. DE201610123795

    Research output: Patent

  47. Published

    The mechanism of charge carrier generation at the TiO2—n-Si heterojunction activated by gold nanoparticles

    Mishin, M. V., Vorobyev, A. A., Kondrateva, A. S., Koroleva, E. Y., Karaseov, P. A., Bespalova, P. G., Shakhmin, A. L., Glukhovskoy, A. V., Wurz, M. C. & Filimonov, A. V., 11 Jun 2018, In: Semiconductor Science and Technology. 33, 7, 075014.

    Research output: Contribution to journal › Article › Research › peer review

  48. Published

    Flexible mono- and multilayer micro grinding tools for ultra-high precision processing and micro machining

    Asadi, E., Hockauf, R., Denkena, B., Grove, T. & Wurz, M., 5 Jun 2018, European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. Riemer, O., Savio, E., Billington, D., Leach, R. K. & Phillips, D. (eds.). p. 151-152 2 p. (European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  49. Published

    Verfahren zum Verbinden eines Halbleiterbauelements mit einem Gegenstück sowie Anordnung mit einem Halbleiterbauelement

    Wurz, M. C. (Inventor), Overmeyer, L. (Inventor), von Witzendorff, P. (Inventor), Hermsdorf, J. (Inventor) & Bengsch, S. (Inventor), 30 May 2018, IPC No. H01L 23/ 48 A I, Patent No. DE102016123180, Priority date 30 Nov 2016, Priority No. DE201610123180

    Research output: Patent

  50. Published

    Magnetic Properties of Thermal Sprayed Tungsten Carbide–Cobalt Coatings

    Angrisani, G. L., Taptimthong, P., Thürer, S. E., Klose, C., Maier, H. J., Wurz, M. C. & Möhwald, K., 11 May 2018, In: Advanced engineering materials. 20, 9, 1800102.

    Research output: Contribution to journal › Article › Research › peer review

  51. Published

    Manufacturing and characterization of asymmetric evanescent field polished couplers for grating assisted mode selective fiber coupling

    Schlangen, S., Bremer, K., Zheng, Y., Isaak, A., Wurz, M., Böhm, S., Wellmann, F., Steinke, M., Pelegrina Bonilla, G., Neumann, J., Kracht, D., Roth, B. & Overmeyer, L., 9 May 2018, Micro-Structured and Specialty Optical Fibres V. SPIE, 1068116. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10681).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  52. Published

    Fabrication and characterization of high-speed PZT sensors for the investigation of ultrasonic wire bonding process

    Isaak, A., Long, Y., Asadi, E., Wurz, M., Twiefel, J. & Wallaschek, J., 1 Jan 2018, Proceedings of the 18 international conference of the european society for precision engineering and nanotechnology. Riemer, O., Savio, E., Billington, D., Leach, R. K. & Phillips, D. (eds.). p. 163-164 2 p.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  53. Published

    A laser-based, in-line chlorine dioxide concentration sensor

    Wurz, M. C., Fischer, E. C., Holz, S., Glukhovskoy, A. & Schnebeck, T., 2018.

    Research output: Contribution to conference › Paper › Research

  54. Published

    Grinding of riblets with "beaver tooth" multi-layer tools

    Hockauf, R., Asadi, E., Denkena, B., Grove, T. & Wurz, M., 2018, In: Procedia CIRP. 71, p. 155-159 5 p.

    Research output: Contribution to journal › Conference article › Research › peer review

  55. Published

    Mode-selective polished fiber couplers based on fiber gratings

    Schlangen, S., Bremer, K., Isaak, A., Wurz, M. C., Bonilla, G. P., Neumann, J., Roth, B. W. & Overmeyer, L., 2018, Optical Fiber Communication Conference, OFC 2018. OSA - The Optical Society, (Optics InfoBase Conference Papers; vol. Part F84-OFC 2018).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  56. Published

    Next Generation Atom Chip Development

    Wurz, M. C., Papakonstantinou, A., Heine, H., Kassner, A., Rechel, M., Herr, W., Ertmer, W., Rasel, E. M. & Le Gonidec, M., 2018.

    Research output: Contribution to conference › Paper › Research

  57. Published

    Solid state joint actuator for a vibro tactile line display

    Schmelt, A., Fischer, E. C., Wurz, M. & Twiefel, J., 2018, ACTUATOR 2018: 16th International Conference and Exhibition on New Actuators and Drive Systems, Conference Proceedings. VDE Verlag GmbH, p. 284-287 4 p. (ACTUATOR 2018 - 16th International Conference and Exhibition on New Actuators and Drive Systems, Conference Proceedings).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  58. 2017

  59. Published

    Analysis of the Wire/Substrate Interface during Ultrasonic Bonding Process

    Long, Y., Dencker, F., Isaak, A., Li, C., Wurz, M., Twiefel, J., Wallaschek, J., Schneider, F. & Hermsdorf, J., 28 Dec 2017, 2017 IEEE CPMT Symposium Japan (ICSJ). Institute of Electrical and Electronics Engineers Inc., p. 203-206 4 p.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  60. Published

    Fabrication and characterization of a Ni-Fe-W core microtransformer for high-Frequency power applications

    Mundotiya, B. M., Dinulovic, D., Rissing, L. & Wurz, M. C., 1 Nov 2017, In: Sensors and Actuators, A: Physical. 267, p. 42-47 6 p.

    Research output: Contribution to journal › Article › Research › peer review

  61. Published

    Comparative Study of Microfabricated Inductors/Transformers for High-Frequency Power Applications

    Dinulovic, D., Shousha, M., Haug, M., Beringer, S. & Wurz, M. C., Nov 2017, In: IEEE transactions on magnetics. 53, 11, 8000366.

    Research output: Contribution to journal › Article › Research › peer review

  62. Published

    Feasibility of Round Window Stimulation by a Novel Electromagnetic Microactuator

    Van Drunen, W. J., Mueller, M., Glukhovskoy, A., Salcher, R., Wurz, M. C., Lenarz, T. & Maier, H., 29 Oct 2017, In: BioMed Research International. 2017, 6369247.

    Research output: Contribution to journal › Article › Research › peer review

  63. Published

    Nanosecond miniature transmitters for pulsed optical radars

    Filimonov, A. V., Zemlyakov, V. E., Egorkin, V. I., Maslevtsov, A. V., Wurz, M. C. & Vainshtein, S. N., 13 Sept 2017, Internet of Things, Smart Spaces, and Next Generation Networks and Systems - 17th International Conference, NEW2AN 2017, 10th Conference, ruSMART 2017, 3rd Workshop NsCC 2017, Proceedings. Springer Verlag, p. 490-497 8 p. (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); vol. 10531 LNCS).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  64. Published

    Investigation of intracochlear dual actuator stimulation in a scaled test rig

    Van Drunen, W. J., Lachheb, S. K., Glukhovskoy, A., Twiefel, J., Wurz, M. C., Lenarz, T., Rau, T. S. & Majdani, O., Sept 2017, In: Current Directions in Biomedical Engineering. 3, 2, p. 119-122 4 p.

    Research output: Contribution to journal › Article › Research › peer review

  65. Published

    A micromechanical gyroscope with bistable suspension of microdrive

    Pyatishev, E., Enns, Y., Komarevtsev, I., Wurz, M. C. & Glukhovskoy, A., 28 Jul 2017, 2017 24th Saint Petersburg International Conference on Integrated Navigation Systems, ICINS 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 7995646

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  66. Published

    Visualization of oxide removal during ultrasonic wire bonding process

    Long, Y., Dencker, F., Isaak, A., Schneider, F., Hermsdorf, J., Wurz, M. & Twiefel, J., 2 Jul 2017, 2017 IEEE 19th Electronics Packaging Technology Conference, EPTC 2017. Institute of Electrical and Electronics Engineers Inc., p. 1-4 4 p.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  67. Published

    Sensors, data storage and communication technologies: Optoelectronic integration of radiofrequency communication systems in metalcomponents

    Breidenstein, B., Mörke, T., Hockauf, R., Ostermann, J., Spitschan, B., Schmidt, C., Barton, S., Mroz, G., Reimche, W., Maier, H. J., Behrens, B. A., Bonhage, M., Malik, I. Y., Demminger, C., Klose, C., Taptimthong, P., Wurz, M. C., Jogschies, L., Klaas, D., Düsing, J. F., Koch, J., Suttmann, O., Overmeyer, L., Dao, Q. H., von der Ahe, C., von Witzendorff, P., Geck, B. & Hachicha, B., 23 Jun 2017, Cyber-Physical and Gentelligent Systems in Manufacturing and Life Cycle: Genetics and Intelligence - Keys to Industry 4.0. 1 ed. Elsevier Inc., p. 7-278 272 p.

    Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research › peer review

  68. Published

    Mass production for micro end mills

    Denkena, B., Wurz, M., Grove, T., Bouabid, A. & Asadi, E., 30 May 2017, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. Phillips, D. & Billington, D. (eds.). p. 245-246 2 p. (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  69. Published

    Chip bonding of low-melting eutectic alloys by transmitted laser radiation

    Hoff, C., Venkatesh, A., Schneider, F., Hermsdorf, J., Bengsch, S., Wurz, M. C., Kaierle, S. & Overmeyer, L., 12 Apr 2017, In: Advanced Optical Technologies. 6, 3-4, p. 311-317 7 p.

    Research output: Contribution to journal › Article › Research › peer review

  70. Published

    Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding process

    Long, Y., Dencker, F., Schneider, F., Emde, B., Li, C., Hermsdorf, J., Wurz, M. C. & Twiefel, J., 21 Feb 2017, Proceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016. Institute of Electrical and Electronics Engineers Inc., p. 405-410 6 p. 7861512

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  71. Published

    New coating system for direct-deposition of sensors on components of arbitrary size: A novel approach allowing for thinner sensors with higher measuring accuracy

    Klaas, D., Becker, J., Wurz, M. C., Schlosser, J. & Kunze, M., 5 Jan 2017, IEEE Sensors, SENSORS 2016: Proceedings. Institute of Electrical and Electronics Engineers Inc., 7808440. (Proceedings of IEEE Sensors).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  72. Published

    Anodische auflösung von aluminium als downsizing technik für mikro-induktivitäten

    Beringer, S., Dinulovic, D., Bengsch, S., Haug, M. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 624-627 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  73. Published

    Atom-Chip based BEC sources for compact and transportable experiments

    Wurz, M. C., Heine, H., Matthias, J., Grove, N., Sahelgozin, M., Kassner, A., Rechel, M., Abend, S., Seidel, S. T., Herr, W., Wurz, M. C., Müller, J., Ertmer, W. & Rasel, E. M., 2017.

    Research output: Contribution to conference › Poster › Research

  74. Published

    Comparative study of microfabricated inductors / transformers for high frequency power applications

    Dinulovic, D., Shousha, M., Haug, M., Beringer, S., Wurz, M. & Rissing, L., 2017, 2017 IEEE International Magnetics Conference, INTERMAG 2017. Institute of Electrical and Electronics Engineers Inc., 8007782

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  75. Published

    Dicing by "Crack-and-Fracture": Novel separation method for MEMS substrates

    Stompe, M. & Wurz, M. C., 2017, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. p. 101-102 2 p. (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  76. Published

    Electrical feed through for tool integrated high temperature applications

    Dencker, F., Kolodziejczyk, F. & Wurz, M. C., 2017, International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017. p. 50-56 7 p. (International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  77. Published

    Elektromechanischer Mikro-Biegeaktor als optischer Shutte

    Wurz, M. C., Pyatishev, E., Glukhovskoy, A., Fischer, E. C., Kleimanov, R., Odintsov, A. & Pyatishev, E., 2017, Proceedings of the MikroSystemTechnik Kongress 2017.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research

  78. Published

    Elektromechanischer Mikro-Biegeaktor als optischer Shutter

    Pyatishev, E., Wurz, M., Enns, Y., Glukhovskoy, A., Fischer, E., Odintsov, A. & Kleimanov, R., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 519-522 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  79. Published

    Flexibles magnetisches Lese-/Schreibsystem: Einfluss von Wärme auf das Datenbit

    Taptimthong, P. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 586-589 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  80. Published

    Hot stamping process reliability – Innovative sensor technology for inline quality assurance

    Wurz, M. C., Behrens, B., Hübner, S., Moritz, J., Pfeffer, C., Wölki, K., Dencker, F., Wolter, B., Niemeyer, H. & Müller, T., 2017, Conference Strategies in Car Body Engineering.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research

  81. Published

    LED packaging with optimized heat dissipation for a micro LED array

    Kusch, A., Wurz, M., Held, M. P., Wolf, A. & Lachmayer, R., 2017, International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017. Otto, T. (ed.). p. 399-402 4 p. (International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  82. Published

    Mikroaktorik für ein Taktiles Display

    Fischer, E., Glukhovskoy, A., Schmelt, A., Twiefel, J. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 515-518 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  83. Published

    Mikrofluidische Galvanik zur Herstellung magnetoresistiver Schichten

    Rechel, M., Taptimthong, P., Arndt, M. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 313-316 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  84. Published

    Modeling and Characterization of a Bimodal Tactile Display

    Wurz, M. C., Fischer, E. C., Twiefel, J., Hofmann, V. & Schmelt, A. S., 2017.

    Research output: Contribution to conference › Paper › Research

  85. Published

    Press hardening tool integrated thin film temperature sensor

    Dencker, F., Schlenkrich, A. & Wurz, M. C., 2017, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. p. 349-350 2 p. (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

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