Publications
2023
- Published
Miniaturized quantum systems for inertial measurement units
Kassner, A., Diekmann, L., Künzler, C., Petring, J., Droese, N., Dencker, F., Heine, H., Abend, S., Gersemann, M., Rasel, E. M., Herr, W., Schubert, C. & Wurz, M. C., 2023, 2023 DGON Inertial Sensors and Systems (ISS). Hecker, P. (ed.). (International Symposium on Inertial Sensors and Systems).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Oxygen-free resistance heating with nitrogen and silane as an energy-efficient heating process for hot stamping
Behrens, B., Hübner, S., Holländer, U., Langohr, A., Albracht, L. F. J., Faramand, E., Wehmeyer, J., Yarcu, S., Raumel, S. & Wurz, M., 2023, In: IOP Conference Series: Materials Science and Engineering. 1284, 012007.Research output: Contribution to journal › Conference article › Research › peer review
- E-pub ahead of print
Performance Comparison of MR Sensors on Silicon and Bare PEEK (Polyether Ether Ketone) Wafers
de Wall, S., Bierwirth, T. N., Wurz, M. & Bengsch, S., 2023, (E-pub ahead of print).Research output: Contribution to conference › Poster › Research
- Published
Physical Sensors: Magnetic Sensors
Prediger, M. S. & Wurz, M., 2023, Encyclopedia of Sensors and Biosensors. Elsevier Inc., Vol. 1. p. 97-110 14 p.Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research
- Published
Sensor Inserts on Spherical Surfaces for Temperature Measurement in Wear Contacts
Raumel, S. & Wurz, M. C., 2023, 2023 IEEE SENSORS. p. 1-4 (Proceedings of IEEE Sensors).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Setup of an ultra-high vacuum bonder for the encapsulation of quantum systems
Droese, N., Petring, J., Hadeler, S., Kassner, A., Dencker, F. & Wurz, M. C., 2023, MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings. VDE Verlag GmbH, p. 763-766 4 p.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Simulation-based Design of a Magnetostrictive Middle Ear Actuator
Adamscheck, M., Fischer, E., Müller, E., Glukhovskoy, A., Prediger, M. S., Dencker, F. & Wurz, M. C., 2023, MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings. VDE Verlag GmbH, p. 503-508 6 p.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Simulation, Manufacturing and Evaluation of a Transformer Eddy-Current Sensor for Deep-Drawing Processes
Kamrani, S., Ottermann, R., Dencker, F. & Wurz, M., 2023, SMSI 2023. p. 284 -285Research output: Chapter in book/report/conference proceeding › Other contribution in a book, report, anthology or conference proceeding › Research
2022
- Published
Development and investigation of tin coatings for increased bone cement detachment at implant interfaces
Prediger, M. S., Müller, E., Reulbach, M., Wurz, M. & Jakubowitz, E., 8 Dec 2022.Research output: Contribution to conference › Poster › Research
- Published
Young’s Modulus and Residual Stresses of Oxide-Free Wire Arc Sprayed Copper Coatings
Rodriguez Diaz, M., Raumel, S., Wurz, M. C., Szafarska, M., Gustus, R., Möhwald, K. & Maier, H. J., 6 Oct 2022, In: COATINGS. 12, 10, 1482.Research output: Contribution to journal › Article › Research › peer review
- Published
Degeneration Effects of Thin-Film Sensors after Critical Load Conditions of Machine Components
Ottermann, R., Steppeler, T., Dencker, F. & Wurz, M. C., 27 Sept 2022, In: Machines. 10, 10, 15 p., 870.Research output: Contribution to journal › Article › Research › peer review
- Published
Fabrication of a Low Profile Planar Transformer Using Molded Interconnect Device Technology
Bierwirth, T. N., Dencker, F., Fischer, E. C. & Wurz, M. C., Sept 2022, 2022 IEEE 9th Electronics System-Integration Technology Conference, ESTC 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 129-133 5 p. (2022 IEEE 9th Electronics System-Integration Technology Conference, ESTC 2022 - Proceedings).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
- Published
Impact of surface texture on ultrasonic wire bonding process
Long, Y., Arndt, M., Dencker, F., Wurz, M., Twiefel, J. & Wallaschek, J., Sept 2022, In: Journal of Materials Research and Technology. 20, p. 1828-1838 11 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Nonevaporable getter-MEMS for generating UHV conditions in small volumina
Diekmann, L. F., Kassner, A., Dencker, F. & Wurz, M. C., Sept 2022, In: Journal of Vacuum Science and Technology B. 40, 5, 054202.Research output: Contribution to journal › Article › Research › peer review
- Published
Nanoindentation in alumina coated Al: Molecular dynamics simulations and experiments
Luu, H. T., Raumel, S., Dencker, F., Wurz, M. & Merkert, N., 15 May 2022, In: Surface and Coatings Technology. 437, 128342.Research output: Contribution to journal › Article › Research › peer review
- Published
Characterization of Microtransformers with Magnetic Ni-Fe-W alloy Cores Plated at Two Different Substrate Temperatures
Mundotiya, B. M., Dinulovic, D., Rissing, L. & Wurz, M. C., 1 May 2022, In: Sensors and Actuators A: Physical. 338, 113454.Research output: Contribution to journal › Article › Research › peer review
- Published
Residual Stresses from Incremental Hole Drilling Using Directly Deposited Thin Film Strain Gauges
Heikebrügge, S., Ottermann, R., Breidenstein, B., Wurz, M. C. & Dencker, F., Apr 2022, In: Experimental mechanics. 62, 4, p. 701-713 13 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Effect of PEG functionalization on the saturation magnetization of magnetic nanoporous core-shell nanoparticles
Herrmann, T., Schierz, A. K., Prediger, M., Reifenrath, J., Meißner, J., Wurz, M. C. & Behrens, P., 21 Mar 2022, In: International Journal on Magnetic Particle Imaging. 8, 1, 4 p., 2203009.Research output: Contribution to journal › Article › Research › peer review
- Published
Approaches for a Solely Electroless Metallization of Through-Glass Vias
Zawacka, A. M., Prediger, M. S., Kassner, A., Dencker, F. E. & Wurz, M., 2022, 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC). p. 889-897 9 p. (Proceedings - Electronic Components and Technology Conference; vol. 2022-May).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
In Situ Resistance Trimming of Directly Deposited Thin-Film Strain Gauges
Ottermann, R., Zhang, S., Denkena, B., Klemme, H., Kowalke, D., Korbacher, M., Dencker, F. & Wurz, M. C., 2022, 2022 IEEE Sensors, SENSORS 2022 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., (Proceedings of IEEE Sensors; vol. 2022-October).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Production and characterisation of batch manufactured flexible micro-grinding tools for finishing metallic surfaces
Steinhoff, L., Dencker, F. & Wurz, M. C., 2022, European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. Leach, R. K., Akrofi-Ayesu, A., Nisbet, C. & Phillips, D. (eds.). p. 77-80 4 p. (European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
2021
- Published
Werkzeugmaschinen werden intelligent
Klaproth, M. S., Denkena, B., Bergmann, B., Ottermann, R., Dencker, F. & Wurz, M., 27 Oct 2021, Werkzeugmaschinen.Research output: Contribution to specialist publication › Contribution in non-scientific journal › Transfer
- Published
Experimental Investigation of the Rapid Fabrication of Micronand Submicron Structures on Polymers Utilizing Ultrasonic Assisted Embossing
Zhu, Y., Bengsch, S., Zheng, L., Long, Y., Roth, B. W., Wurz, M. C., Twiefel, J. & Wallaschek, J., 1 Aug 2021, In: Polymers. 13, 15, 2417.Research output: Contribution to journal › Article › Research › peer review
- Published
Towards a Highly Sensitive Piezoelectric Nano-Mass Detection: A Model-Based Concept Study
Twiefel, J., Glukhovskoy, A., de Wall, S., Wurz, M. C., Sehlmeyer, M., Hitzemann, M. & Zimmermann, S., 4 Apr 2021, In: Sensors. 21, 7, 15 p., 2533.Research output: Contribution to journal › Article › Research › peer review
- Published
Einfluss von Silan-dotierten Umgebungsatmosphären auf tribologischen Eigenschaften von Titan
Raumel, S., Barienti, K., Dencker, F., Nuernberger, F. & Wurz, M., 22 Mar 2021, In: Tribologie und Schmierungstechnik. 68, 1, p. 5-13 9 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Verfahren zur Herstellung von Diamantspitzen
Dencker, F. (Inventor), Wurz, M. C. (Inventor) & Maier, H. J. (Inventor), 4 Mar 2021, IPC No. G01Q 70/ 16 A I, Patent No. DE102019213043, Priority date 29 Aug 2019, Priority No. DE201910213043Research output: Patent
- Published
Einfluss von Silan-dotierten Umgebungsatmosphären auf tribologischen Eigenschaften von Titan
Raumel, S., Barienti, K., Dencker, F., Nürnberger, F. & Wurz, M. C., Mar 2021, In: Tribologie und Schmierungstechnik. 68, 1, p. 5-13 9 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Sensorbauteil, Halbzeug, Verfahren zur Anbringung und zur Herstellung eines Sensorbauteils
Dencker, F. (Inventor), Wurz, M. C. (Inventor), Maier, H. J. (Inventor), Ottermann, R. (Inventor), Kassner, A. (Inventor) & Klaas, D. (Inventor), 25 Feb 2021, IPC No. G01N 27/ 04 A I, Patent No. DE102019122623, Priority date 22 Aug 2019, Priority No. DE201910122623Research output: Patent
- Published
Anisotropic Magneto-Resistive Sensor Effect based Sensor using Daisy Chain on Polyether Ether Ketone Substrate
De Wall, S., Bengsch, S., Fischer, E., Dencker, F. & Wurz, M. C., 2021, 2021 IEEE Sensors. Institute of Electrical and Electronics Engineers Inc., (Proceedings of IEEE Sensors; vol. 2021-October).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Combination of Additive and Thin-Film Technological Manufacturing for the Realization of a Pressure Sensor for Biomedical Applications
Prediger, M. S., Müller, E., Bengsch, S. & Wurz, M. C., 2021, MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, p. 578-581 4 p. (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Development of a Polyimid Membrane for Electromagnetic Middle-Ear Actuators
Glukhovskoy, A., Müller, E., Prediger, M. S., Maier, H. & Wurz, M. C., 2021, MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, p. 186-189 4 p. (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Directly Deposited Thin-Film Strain Gauges on Curved Metallic Surfaces
Ottermann, R., Klaas, D., Dencker, F., Hoheisel, D., Jung, S., Wienke, A., Dusing, J. F., Koch, J. & Wurz, M. C., 2021, 2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., (Proceedings of IEEE Sensors; vol. 2021-October).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Direktabgeschiedene Dünnfilm-Dehnungsmessstreifen für erhöhte Temperaturen
Ottermann, R., Klaas, D., Dencker, F. E., Hoheisel, D., Rottengatter, P., Kruspe, T., Jung, S. & Wurz, M., 2021, MikroSystemTechnik Kongress 2021: Proceedings. Berlin: VDE Verlag GmbH, p. 315-316 2 p.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Direktabgeschiedene Dünnfilmsensorik mithilfe einer neuartigen Beschichtungsanlage
Ottermann, R., Klaas, D., Dencker, F. E. & Wurz, M., 2021, 27. NDVaK-Kolloquium. DresdenResearch output: Chapter in book/report/conference proceeding › Conference contribution › Research
- Published
Fabrication of a Low Profile Planar Transformer Using a Dual PCB Approach
Fischer, E. C., Bierwirth, T. N., Dencker, F. & Wurz, M. C., 2021, MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, p. 483-486 4 p. (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
- Published
Film transfer from thin films to metal surfaces using sol-gels, self-assembling monolayers and water glass
Basten, R. G., Zawacka, A. M., Bengsch, S., Prediger, M. S. & Wurz, M. C., 2021, MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, p. 27-30 4 p.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Investigation of tribologically relevant surface layers formed on non-ferrous metals in oxygen-free conditions
Raumel, S., Dencker, F. & Wurz, M., 2021.Research output: Contribution to conference › Abstract › Research
- Published
Investigations on Silver Sintering using an Ultrasonic Transient Liquid Phase Sintering Process
Hadeler, S., Seefisch, H., Ottermann, R., Long, Y., Dencker, F., Wurz, M. C. & Twiefel, J., 2021, 2021 IEEE 23rd Electronics Packaging Technology Conference (EPTC). Institute of Electrical and Electronics Engineers Inc., p. 288-291 4 p.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Mikrotechnologische Fertigung von integrierten optischen Gittern mittels Lift-Off-Prozess für den Einsatz in Atominterferometern
de Wall, S., Kassner, A., Dencker, F., Künzler, C., Diekmann, L. & Würz, M. C., 2021, MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, p. 466-468 3 p. (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Proof of Concept: Glass-Membrane Based Differential Pressure Sensor
Glukhovskoy, A., Prediger, M. S., Schäfer, J., Ambrosio, A., Ambrosius, N., Vogt, A., Santos, R., Ostholt, R. & Wurz, M., 2021, 2021 IEEE 71st Electronic Components and Technology Conference (ECTC). p. 1563-1570 8 p. (Proceedings - Electronic Components and Technology Conference; vol. 2021-June).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review