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Publications

  1. 2017

  2. Published

    Reaktives Ionentiefenätzen von Schattenmasken für die Sensordirektabscheidung mit einer neuartigen Beschichtungsanlage

    Klaas, D., Pehrs, F. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017: Proceedings. Berlin: VDE Verlag GmbH, p. 680-683 4 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearch

  3. Published

    Silicon field emitter arrays produced via wafer dicing

    Kusch, A., Wurz, M., Bunert, E. & Zimmermann, S., 2017, 2017 30th International Vacuum Nanoelectronics Conference (IVNC). Langer, C. & Lawrowski, R. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 132-133 2 p. 8051577. (International Vacuum Nanoelectronics Conference).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  4. Published

    Technical inheritance: Information basis for the identification and development of product generations

    Mozgova, I., Barton, S., Demminger, C., Miebach, T., Taptimthong, P., Lachmayer, R., Nyhuis, P., Reimche, W. & Wurz, M. C., 2017, In: Proceedings of the International Conference on Engineering Design, ICED. 6, DS87-6, p. 91-100 10 p.

    Research output: Contribution to journalConference articleResearchpeer review

  5. 2016

  6. Published

    Comparison of ALD and IBS Al2O3 films for high power lasers

    Liu, H., Jensen, L., Becker, J., Wurz, M. C., Ma, P. & Ristau, D., 6 Dec 2016, 48th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials 2016. SPIE, 1001421. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10014).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  7. Published

    Longitudinal conductivity of LaF3/SrF2 multilayer heterostructures

    Vergentev, T., Banshchikov, A., Filimonov, A., Koroleva, E., Sokolov, N. & Wurz, M. C., 25 Nov 2016, In: Science and Technology of Advanced Materials. 17, 1, p. 799-806 8 p.

    Research output: Contribution to journalArticleResearchpeer review

  8. Published

    Packaging for systems in harsh environments

    Wurz, M. C. & Bengsch, S., 25 Nov 2016, Semiconductor Devices in Harsh Conditions. p. 135-147 13 p.

    Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearchpeer review

  9. Published

    Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers

    Klaas, D., Rein, M., Wurz, M. & Rissing, L., 1 Oct 2016, In: Procedia Technology. 26, p. 27-34

    Research output: Contribution to journalConference articleResearch

  10. Published

    Flexible Magnetic Reading/Writing System: Heat-assisted Magnetic Recording

    Taptimthong, P., Düsing, J. F., Rissing, L. & Wurz, M. C., 1 Oct 2016, In: Procedia Technology. 26, p. 72-78

    Research output: Contribution to journalConference articleResearch

  11. Published

    Stress Reduction in Sputtered Thin NiFe 81/19 Layers for Magnetic Field Sensors

    Jogschies, L., Rittinger, J., Klaas, D. & Wurz, M., 1 Oct 2016, In: Procedia Technology. 26, p. 162-168

    Research output: Contribution to journalConference articleResearch

  12. Published

    Intracochlear Stimulation of the Basilar Membrane

    van Drunen, W. J., Hofmann, V., Twiefel, J., Glukhovskoy, A., Beringer, S., Wurz, M. C., Rau, T. S., Wallaschek, J., Rissing, L., Lenarz, T. & Majdani, O., 28 Sept 2016, In: Biomedizinische Technik. 61, s1, p. 179-199 21 p.

    Research output: Contribution to journalArticleResearchpeer review

  13. Published

    Direct hot embossing of microelements by means of photostructurable polyimide

    Akin, M., Rezem, M., Rahlves, M., Cromwell, K., Roth, B., Reithmeier, E., Wurz, M. C., Rissing, L. & Maier, H. J., 23 Aug 2016, In: Journal of Micro/ Nanolithography, MEMS, and MOEMS. 15, 3, 034506.

    Research output: Contribution to journalArticleResearchpeer review

  14. Published

    Effect of Substrate Temperature on Magnetic Properties of Electroplated 82Ni-15Fe-3W Alloy Films

    Mundotiya, B. M., Rissing, L. & Wurz, M. C., Aug 2016, In: IEEE Transactions on Magnetics. 52, 8, 7448397.

    Research output: Contribution to journalArticleResearchpeer review

  15. Published

    Magnetic microstructure analysis of sputter deposited permalloy thin films on a spin-on polyimide substrate

    Rittinger, J., Taptimthong, P., Jogschies, L., Wurz, M. C. & Rissing, L., Jul 2016, In: Microsystem Technologies. 22, 7, p. 1627-1632 6 p.

    Research output: Contribution to journalArticleResearchpeer review

  16. Published

    Manufacturing of micro end mills by batch processing of silicon carbide

    Denkena, B., Wurz, M., Grove, T., Bouabid, A. & Asadi, E., 1 Jun 2016, Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016. Bointon, P., Leach, R. & Southon, N. (eds.). (Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  17. Published

    Normal force actuator for a tactile display using a micromechanically built spring element made of Polyimide

    Wurz, M., Rechel, M., Twiefel, J. & Hofmann, V., 1 Jun 2016, ACTUATOR 2016. 4 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearch

  18. Published

    An application report: Protective thin film layers for high temperature sensor technology

    Dencker, F., Wurz, M., Dubrovskiy, S. & Koroleva, E., 5 Apr 2016, Proceedings of the 2016 IEEE North West Russia Section Young Researchers in Electrical and Electronic Engineering Conference, EIConRusNW 2016. Shaposhnikov, S. (ed.). Institute of Electrical and Electronics Engineers Inc., p. 32-36 5 p. 7448110

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  19. Published

    Transmission laser bonding of low melting eutectic alloys

    Hoff, C., Cromwell, K., Hermsdorf, J., Akin, M., Wurz, M. C., Kaierle, S., Maier, H. J. & Overmeyer, L., 24 Mar 2016, High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications V. Kaierle, S. & Dorsch, F. (eds.). SPIE, 97410K. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9741).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  20. Published

    Concept development and evaluation of a hermetically sealed ceramic package

    Kusch, A., Rissing, L. & Wurz, M. C., 2016, p. 413-416. 4 p.

    Research output: Contribution to conferencePaperResearchpeer review

  21. Published

    Development and optimization of thin-film technology based micro-inductors and transformers

    Beringer, S., Dinulovic, D., Haug, M., Rissing, L. & Wurz, M., 2016, 2nd Joint ISTDM/ICSI 2019 Conference. Eriksson, M. A. & Lagally, M. G. (eds.). Curran Associates Inc., p. 51-58 8 p. (ECS Transactions; vol. 75, no. 2).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  22. Published

    Effect of annealing temperature on the coercivity and the electrical resistivity of the electroplated ni-fe-w alloy film

    Mundotiya, B. M., Rissing, L. & Wurz, M. C., 2016, Magnetic Materials Processes and Devices 14. The Electrochemical Society, p. 59-65 7 p. (ECS Transactions; vol. 75, no. 2).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  23. Published

    Electroplating through fluidic channels as production technology for 3d interconnect devices and sensing structures

    Rechel, M., Bengsch, S. & Wurz, M. C., 2016, Processing Materials of 3D Interconnects, Damascene and Electronics Packaging 8. 7 ed. Electrochemical Society, Inc., Vol. 75. p. 25-32 8 p. (PROCESSING MATERIALS OF 3D INTERCONNECTS, DAMASCENE AND ELECTRONICS PACKAGING 8).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  24. Published

    Investigation for thinning-by-dicing of sintered and unsintered ceramics

    Stompe, M., Asadi, E., Rissing, L. & Wurz, M., 2016.

    Research output: Contribution to conferencePaperResearchpeer review

  25. Published

    P8.1 - Characterization of a Read/Write Head

    Taptimthong, P., Rissing, L. & Wurz, M. C., 2016, p. 769-775.

    Research output: Contribution to conferencePaperResearch

  26. Published

    Präzisionsbearbeitung endkonturnaher Keramik im ungesinterten Zustand

    Wurz, M., Rissing, L. & Stompe, M., 2016, 67. Ausgabe Jahrbuch Schleifen, Honen, Lippe und Polieren.

    Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearch

  27. Published

    Structuring methods of plastic substrates for electroplating applications

    Bengsch, S., Rechel, M., Asadi, E. & Wurz, M. C., 2016, Magnetic Materials Processes and Devices 14. Bonhote, C., Zangari, G., Kitamoto, Y., Osaka, T. & Gatzen, H. H. (eds.). 2 ed. Electrochemical Society, Inc., Vol. 75. p. 67-73 7 p. (MAGNETIC MATERIALS PROCESSES AND DEVICES 14).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  28. Published

    Thin-film based microtransformer suitable for high switching frequency power applications

    Dinulovic, D., Shousha, M., Haug, M., Beringer, S. & Wurz, M. C., 2016, p. 107-112. 6 p.

    Research output: Contribution to conferencePaperResearchpeer review

  29. Published

    UltraMag: Integration ultradünner Magnetfeldsensoren in intelligenten Automatisierungskomponenten

    Remus, H., Rissing, L., Janke, R., Wurz, M. C., Suphan, K., Apel, S., Malsch, B., Kruppe, R., Gebhardt, M. & Wehner, M., 2016, 1. Auflage ed. Stuttgart.

    Research output: Book/ReportMonographResearchpeer review

  30. Published
  31. 2015

  32. Published

    Improved Microtransformer Design Utilizing Fe-Co Magnetic Core

    Dinulovic, D., Gerfer, A., Haug, M., Kaiser, M., Wurz, M. C. & Rissing, L., 29 Dec 2015, In: Physics Procedia. 75, p. 1252-1258 7 p.

    Research output: Contribution to journalConference articleResearchpeer review

  33. Published

    Recent developments of magnetoresistive sensors for industrial applications

    Jogschies, L., Klaas, D., Kruppe, R., Rittinger, J., Taptimthong, P., Wienecke, A., Rissing, L. & Wurz, M. C., 12 Nov 2015, In: Sensors (Switzerland). 15, 11, p. 28665-28689 25 p.

    Research output: Contribution to journalArticleResearchpeer review

  34. Published

    Beschichtungseinrichtung zum zumindest teilweisen Beschichten einer Oberfläche

    Wurz, M. (Inventor), Rissing, L. (Inventor), Bach, F. W. (Inventor) & Becker, J. (Inventor), 1 Oct 2015, IPC No. C23C 16/ 04 A I, Patent No. DE102014004323, Priority date 25 Mar 2014, Priority No. DE20141004323

    Research output: Patent

  35. Published

    Elektrisch betriebener Raucherartikel, Plattform dafür und Verfahren zu dessen Herstellung

    Rissing, L. (Inventor), Wurz, M. C. (Inventor), Rissing, L. (Inventor) & Wurz, M. C. (Inventor), 27 Aug 2015, IPC No. A24F 40/ 70 A N, Patent No. DE102014102442, Priority date 25 Feb 2014, Priority No. DE201410102442

    Research output: Patent

  36. Published

    Impact of different polyimide-based substrates on the soft magnetic properties of NiFe thin films

    Rittinger, J., Taptimthong, P., Jogschies, L., Wurz, M. C. & Rissing, L., 21 May 2015, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems. SPIE, 95171R. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9517).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  37. Published

    A Comparative Study of Saturation Induction with Current Density of Electrodeposited Fe-Ni-W Alloys

    Mundotiya, B. M., Wurz, M. C. & Rissing, L., 30 Apr 2015, Polymer electrolyte fuel cells 14. The Electrochemical Society, p. 75-83 (ECS Transactions; vol. 64, no. 31).

    Research output: Chapter in book/report/conference proceedingConference contributionResearch

  38. Published

    Custom Lithium Niobate Transducer Arrays for Detecting Material Distribution of Hybrid Workpieces

    Saalbach, K., Wurz, M. C., Twiefel, J., Rissing, L. & Wallaschek, J., 21 Mar 2015, In: Energy Harvesting and Systems - Materials, Mechanisms, Circuits and Storage (Print). 2, 3-4, p. 137-142

    Research output: Contribution to journalArticleResearchpeer review

  39. Published

    Elektronisches Bauteil

    Rissing, L. (Inventor), Wurz, M. C. (Inventor) & Kaiser, M. (Inventor), 19 Feb 2015, IPC No. H05K 3/ 40 A I, Patent No. DE102013013464, Priority date 14 Aug 2013, Priority No. DE20131013464

    Research output: Patent

  40. Published

    Hybrid Packaging of Circuits and Devices Onto Flexible Screen Printed Electrical Interconnects

    Wurz, M., Akin, M., Rissing, L., Corea, J., Scott, S. & Arias, A. C., Feb 2015.

    Research output: Contribution to conferencePaperResearch

  41. Published

    Design und Herstellung eines akustischen Wandlers mit einer Polymermembran

    Kaiser, M., Rechel, M., Goldmann, J., Rissing, L. & Wurz, M. C., 2015, MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 606-609 4 p. (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  42. Published

    Entwurf und Fertigung eines elektromagnetischen Normalkraftaktors in hybrider Bauform für taktile Displays

    Rechel, M., Rissing, L., Hofmann, V., Tarnowsky, A., Wolter, F., Wallaschek, J. & Wurz, M. C., 2015, MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 761-764 4 p. (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  43. Published

    Fertigung eines Gitterelektroden-Arrays zur selektiven hyperthermischen Manipulation von Biofilmen

    Kaiser, M., Rechel, M., Stiesch-Scholz, M., Rissing, L. & Wurz, M. C., 2015, MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 824-827 4 p. (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  44. Published

    Flexibles magnetisches Lese-/Schreibsystem: Design eines Schreibkopfes

    Taptimthong, P., Rittinger, J., Wurz, M. C. & Rissing, L., 2015, MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 684-687 4 p. (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  45. Published

    Hybrider Fertigungsprozess zur Integration von Drucksensoren auf die Oberfläche von Tellerfedern

    Rittinger, J., Klaas, D., Wurz, M. C. & Rissing, L., 2015, MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 563-566 4 p. (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  46. Published

    Neuartige Herangehensweise für eine Batchproduktion keramischer Mikrofräswerkzeuge

    Asadi, E., Bouabid, A., Wurz, M., Grove, T., Denkena, B. & Rissing, L., 2015, Diamond Business. Vol. 3. p. 12-16

    Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearch

  47. Published

    Smart System Integration: Moulding of Magnetic Field Sensors into AlSi9Cu3(Fe)-Alloys

    Wurz, M., Klaas, D., Wienecke, A., Rissing, L., Freytag, P. & Maier, H., 2015.

    Research output: Contribution to conferencePaperResearch

  48. Published
  49. Published
  50. Published

    Verwendung von Schattenmasken zur Direktstrukturierung individuell adaptierbarer Sensorik auf technischen Oberflächen

    Klaas, D., Rittinger, J., Taptimthong, P., Düsing, J. F., Wurz, M. C. & Rissing, L., 2015, MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 338-341 4 p. (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  51. 2014

  52. Published

    Flexible Magnetic Writing / Reading System: Polyimide Film as Flexible Substrate

    Taptimthong, P., Rittinger, J., Wurz, M. C. & Rissing, L., 1 Oct 2014, In: Procedia Technology. 15, p. 230-237 8 p.

    Research output: Contribution to journalArticleResearchpeer review

  53. Published

    Thin-film microtransformer for high frequency power applications

    Dinulovic, D., Gerfer, A., Opitz, O., Kaiser, M., Wurz, M. C. & Rissing, L., 3 Jul 2014, JEMS 2013 – Joint European Magnetic Symposia. Niarchos, D., Hadjipanayis, G. & Kalogirou, O. (eds.). EDP Sciences, (EPJ Web of Conferences; vol. 75).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  54. Published

    Microtransformer with closed Fe-Co magnetic core for high frequency power applications

    Dinulovic, D., Kaiser, M., Gerfer, A., Opitz, O., Wurz, M. C. & Rissing, L., 7 May 2014, In: Journal of Applied Physics. 115, 17, 17A317.

    Research output: Contribution to journalArticleResearchpeer review

  55. Published

    VERFAHREN ZUM HERSTELLEN EINES HERMETISCH ABGESCHLOSSENEN GEHÄUSES

    Wurz, Marc, C. (Inventor), Rissing, L. (Inventor), Zimmermann, S. (Inventor) & Cochems, P. (Inventor), 13 Feb 2014, IPC No. H01L 23/ 10 A I, Patent No. WO2014023320, Priority date 10 Aug 2012, Priority No. WO2012EP03424

    Research output: Patent

  56. Published

    Integrierte Sensorik für Hochtemperaturumgebungen

    Wurz, M. C., Wienecke, A. & Rissing, L., 2014, GMM, VDI/VDE-IT (eds) Tagungsband: MikroSystemTechnikKongress 2013, Von Bauelementen zu Systemen. p. 555-558

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  57. Published

    Magnetic MEMS

    Wurz, M., Rissing, L., Belski, A., Griesbach, T., Kaiser, M. & Wienecke, A., 2014, St. Petersburg State Polytechnical University Journal 5. 205 ed. p. 21-35

    Research output: Chapter in book/report/conference proceedingConference contributionResearch

  58. Published

    Research activities in the field of electromagnetic energy harvesting micro systems

    Wurz, M. C., 2014, Magnetic Materials, Processes, and Devices 13. 31 ed. Electrochemical Society, Inc., p. 21-31 11 p. (ECS Transactions; vol. 64, no. 31).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  59. 2013

  60. Published

    Highly-integrated energy harvesting device for rotational applications utilizing quasi-static piezoelectric and electromagnetic generators

    Wurz, M. C., Kleyman, G. & Twiefel, J., 10 Apr 2013, Active and Passive Smart Structures and Integrated Systems 2013. 86881L. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8688).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  61. Published

    Development, micro fabrication, and test of flexible magnetic write head for gentelligent applications

    Belski, A., Wurz, M. C., Rittinger, J. & Rissing, L., 26 Feb 2013, In: Microelectronic Engineering. 110, p. 315-319 5 p.

    Research output: Contribution to journalArticleResearchpeer review

  62. Published

    High permeability flexible bulk material for magnetic micro head applications

    Belski, A., Taptimthong, P., Wurz, M. C. & Rissing, L., 14 Jan 2013, JEMS 2012 – Joint European Magnetic Symposia . Tiberto, P., Affronte, M., Casoli, F., de Julián Fernández, C., Gubbiotti, G., Marquina, C., Pratt, F., Solzi, M., Tacchi, S. & Vavassori, P. (eds.). EDP Sciences, (EPJ Web of Conferences; vol. 40).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  63. Published

    Development, fabrication, and test of a modular eddy current micro sensor on a flexible polymer foil

    Griesbach, T., Wurz, M. C. & Rissing, L., Jan 2013, In: Production Engineering. 7, 1, p. 3-8 6 p.

    Research output: Contribution to journalArticleResearchpeer review

  64. Published

    Electroplating of Cu/Sn layers for hermetic encapsulation for vacuum applications

    Rissing, L., Wurz, M. C., Cvetkovic, S. & Bach, F., 2013, Magnetic Materials, Processes, and Devices 12. 10 ed. Electrochemical Society, Inc., p. 207-216 10 p. (ECS Transactions; vol. 50, no. 10).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  65. Published

    Embossing of soft-magnetic structures and influence on magnetic properties

    Kaiser, M., Wurz, M. C., Cvetkovi, S. & Rissing, L., 2013, Magnetic Materials, Processes, and Devices 12. 10 ed. Electrochemical Society, Inc., p. 189-197 9 p. (ECS Transactions; vol. 50, no. 10).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  66. Published

    Investigation of the crystallization of NiFe81/19 depending on the annealing temperature

    Wurz, M. C., Shaganov, A., Rissing, L., Filimonov, A. & Vakhrushev, S., 2013, Magnetic Materials, Processes, and Devices 12. 10 ed. Electrochemical Society, Inc., p. 147-156 10 p. (ECS Transactions; vol. 50, no. 10).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  67. Published

    MEMS Fabricated Microtransformer with Closed Fe-Co Magnetic Core for High Frequency Power Applications

    Wurz, M., Dinulovic, D., Kaiser, M., Gerfer, A., Opitz, O. & Rissing, L., 2013, p. 352.

    Research output: Contribution to conferencePaperResearch

  68. Published

    Rotational broadband energy-harvesting-unit based on a combination of piezo – and magnetoelectrics

    Kleyman, G., Twiefel, J. & Wurz, M. C., 2013, Hannover

    Research output: Other contributionOther publicationResearchpeer review

  69. 2012

  70. Published

    MAGNETFELD-MESSANORDNUNG

    Wurz, Marc, C. (Inventor), Chen, J. (Inventor) & Rissing, L. (Inventor), 7 Sept 2012, IPC No. G01R 33/ 00 A I, Patent No. WO2012116933, Priority date 28 Feb 2011, Priority No. DE20111012659

    Research output: Patent

  71. Published

    Designs and characterizations of soft magnetic flux guides in a 3-D magnetic field sensor

    Chen, J., Wurz, M. C., Belski, A. & Rissing, L., Apr 2012, In: IEEE transactions on magnetics. 48, 4, p. 1481-1484 4 p., 6172423.

    Research output: Contribution to journalArticleResearchpeer review

  72. Published

    Design, fabrication, and testing of a modular magnetic field microsensor on a flexible polymer foil

    Griesbach, T., Wurz, M. C. & Rissing, L., 2012, In: IEEE transactions on magnetics. 48, 11, p. 3843-3846 4 p., 6332572.

    Research output: Contribution to journalArticleResearchpeer review

  73. Published

    Surface preparation for sensing the Kerr-effect on NiFe81/19 layers

    Belski, A., Wurz, M. C., Cvetkovic, S. & Rissing, L., 2012, Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012. Spaan, H., Burke, T. & Shore, P. (eds.). p. 279-282 4 p. (Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012; vol. 2).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  74. 2011

  75. Published

    Component-integrated sensors and communication for gentelligent devices

    Overmeyer, L., Rissing, L., Wurz, M. C., Dumke, M., Franke, S., Griesbach, T. & Belski, A., 29 Dec 2011, IEEE International Conference on Industrial Engineering and Engineering Management, IEEM2011. p. 499-503 5 p. 6117967. (IEEE International Conference on Industrial Engineering and Engineering Management).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  76. Published

    Process principle for the production of sintered dynamic component-inherent data storage

    Belski, A., Gastan, E., Vahed, N., Klose, C., Rodman, M., Lange, F., Wurz, M. C., Bormann, D., Rissing, L., Behrens, B. A. & Bach, F. W., 5 Dec 2011, In: Production Engineering. 5, 3, p. 233-240 8 p.

    Research output: Contribution to journalArticleResearchpeer review

  77. Published

    Einsatz von kupfer und kupferlegierungen in der mikrosystemtechnik

    Wurz, M. C. & Rissing, L., Nov 2011, In: Metall. 65, 11, p. 504-506 3 p.

    Research output: Contribution to journalArticleResearchpeer review

  78. Published

    Modular eddy current micro sensor

    Griesbach, T., Wurz, M. C. & Rissing, L., Oct 2011, In: IEEE transactions on magnetics. 47, 10, p. 3760-3763 4 p., 6027638.

    Research output: Contribution to journalArticleResearchpeer review

  79. Published

    Considerations on ultra-thin substrate-less micro and nano systems

    Gatzen, H. H., Griesbach, T., Wurz, M. C. & Rissing, L., 2011, Nano and Micro Materials, Devices and Systems; Microsystems Integration. American Society of Mechanical Engineers(ASME), p. 447-454 8 p. (ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011; vol. 11).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  80. Published

    Design and fabrication of a modular eddy current micro sensor

    Griesbach, T., Wurz, M. C. & Rissing, L., 2011, In: Progress in Electromagnetics Research Symposium. p. 752-755 4 p.

    Research output: Contribution to journalConference articleResearchpeer review

  81. Published

    Redesign and fabrication of a magnetic head for gentelligent™ products

    Belski, A., Wurz, M. C. & Rissing, L., 2011, Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011. Shore, P., Spaan, H., Van Brussel, H. & Burke, T. (eds.). p. 168-171 4 p. (Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011; vol. 2).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  82. 2010

  83. Published

    Applying SU-8™ to the fabrication of micro electro discharge machining electrodes

    Traisigkhachol, O., Schmid, H., Wurz, M. & Gatzen, H. H., Aug 2010, In: Microsystem technologies. 16, 8-9, p. 1445-1450 6 p.

    Research output: Contribution to journalArticleResearchpeer review

  84. Published

    Using magneto-optical measurements for the evaluation of a hybrid magnetic shape memory (MSM)-based microactuator

    Spasova, B., Wurz, M. C., Ruffert, C., Norpoth, J., Jooss, C. & Gatzen, H. H., Jun 2010, In: IEEE transactions on magnetics. 46, 6, p. 2256-2259 4 p., 5467400.

    Research output: Contribution to journalArticleResearchpeer review

  85. Published

    Assembly and embedding of nanoparticles in a Ni-matrix

    Wurz, M. C., Wagner, P., Rissing, L. & Caro, J., 2010, Magnetic Materials Processes and Devices 11. 34 ed. Electrochemical Society, Inc., p. 33-42 10 p. (ECS Transactions; vol. 33, no. 34).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  86. Published

    Fertigung eines magneto-optischen Schreib-/Lesekopfes

    Wurz, M. C., 2010, Garbsen.

    Research output: ThesisDoctoral thesis

  87. Published

    Process development of an electroplated permalloy layer on magnetic magnesium for gentelligent™ products

    Belski, A., Wurz, M. C. & Rissing, L., 2010, Magnetic Materials Processes and Devices 11. 34 ed. Electrochemical Society, Inc., p. 93-104 12 p. (ECS Transactions; vol. 33, no. 34).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  88. 2009

  89. Published

    Investigations on embedding nanoparticles by electroplating

    Wurz, M., Oekermann, T., Wagner, P., Ruffert, C., Caro, J. & Gatzen, H. H., 2009, ECS Transactions - Magnetic Materials, Processes and Devices 10 - 214th ECS Meeting. 45 ed. p. 207-216 10 p. (ECS Transactions; vol. 16, no. 45).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  90. 2008

  91. Published

    Application of MSM bulk material in a hybrid microactuator

    Spasova, B., Ruffert, C., Wurz, M. C. & Gatzen, H. H., Oct 2008, In: Physica Status Solidi (A) Applications and Materials Science. 205, 10, p. 2307-2312 6 p.

    Research output: Contribution to journalArticleResearchpeer review

  92. Published

    Manufacturing technology for the fabrication a discrete actuator using a magnetic shape memory alloy

    Spasova, B., Wurz, M. C. & Gatzen, H. H., May 2008, In: European Physical Journal: Special Topics. 158, 1, p. 243-247 5 p.

    Research output: Contribution to journalArticleResearchpeer review

  93. 2006

  94. Published

    Fabrication of a Micro Coil for Magnetooptical Data Storage

    Wurz, M. C., Ruffert, C. & Gatzen, H. H., Oct 2006, In: IEEE transactions on magnetics. 42, 10, p. 2468-2470 3 p.

    Research output: Contribution to journalArticleResearchpeer review

  95. Published

    Fabrication of a micro coil for magneto-optical data storage

    Wurz, M. C., Ruffert, C., Gatzen, H. H. & Knappmann, S., 2006, INTERMAG 2006 - IEEE International Magnetics Conference. IEEE Computer Society, p. 567 1 p. 4262000

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  96. Published

    Investigations on the permeability of electroplated and sputtered permalloy

    Wurz, M. C., Dinulovic, D. & Gatzen, H. H., 2006, Magnetic Materials, Processes, and Devices VIII - Proceedings of the International Symposium. p. 525-535 11 p. (Proceedings - Electrochemical Society; vol. PV 2004-23).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

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