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Prof. Dr.  Marc Christopher Wurz

https://orcid.org/0000-0002-2066-8142
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Publications

  1. 2016

  2. Published

    Packaging for systems in harsh environments

    Wurz, M. C. & Bengsch, S., 25 Nov 2016, Semiconductor Devices in Harsh Conditions. p. 135-147 13 p.

    Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research › peer review

  3. Published

    Comparison of ALD and IBS Al2O3 films for high power lasers

    Liu, H., Jensen, L., Becker, J., Wurz, M. C., Ma, P. & Ristau, D., 6 Dec 2016, 48th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials 2016. SPIE, 1001421. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10014).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  4. 2017

  5. Published

    Anodische auflösung von aluminium als downsizing technik für mikro-induktivitäten

    Beringer, S., Dinulovic, D., Bengsch, S., Haug, M. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 624-627 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  6. Published

    Atom-Chip based BEC sources for compact and transportable experiments

    Wurz, M. C., Heine, H., Matthias, J., Grove, N., Sahelgozin, M., Kassner, A., Rechel, M., Abend, S., Seidel, S. T., Herr, W., Wurz, M. C., Müller, J., Ertmer, W. & Rasel, E. M., 2017.

    Research output: Contribution to conference › Poster › Research

  7. Published

    Comparative study of microfabricated inductors / transformers for high frequency power applications

    Dinulovic, D., Shousha, M., Haug, M., Beringer, S., Wurz, M. & Rissing, L., 2017, 2017 IEEE International Magnetics Conference, INTERMAG 2017. Institute of Electrical and Electronics Engineers Inc., 8007782

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  8. Published

    Dicing by "Crack-and-Fracture": Novel separation method for MEMS substrates

    Stompe, M. & Wurz, M. C., 2017, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. p. 101-102 2 p. (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  9. Published

    Electrical feed through for tool integrated high temperature applications

    Dencker, F., Kolodziejczyk, F. & Wurz, M. C., 2017, International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017. p. 50-56 7 p. (International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  10. Published

    Elektromechanischer Mikro-Biegeaktor als optischer Shutte

    Wurz, M. C., Pyatishev, E., Glukhovskoy, A., Fischer, E. C., Kleimanov, R., Odintsov, A. & Pyatishev, E., 2017, Proceedings of the MikroSystemTechnik Kongress 2017.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research

  11. Published

    Elektromechanischer Mikro-Biegeaktor als optischer Shutter

    Pyatishev, E., Wurz, M., Enns, Y., Glukhovskoy, A., Fischer, E., Odintsov, A. & Kleimanov, R., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 519-522 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  12. Published

    Flexibles magnetisches Lese-/Schreibsystem: Einfluss von Wärme auf das Datenbit

    Taptimthong, P. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 586-589 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  13. Published

    Hot stamping process reliability – Innovative sensor technology for inline quality assurance

    Wurz, M. C., Behrens, B., Hübner, S., Moritz, J., Pfeffer, C., Wölki, K., Dencker, F., Wolter, B., Niemeyer, H. & Müller, T., 2017, Conference Strategies in Car Body Engineering.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research

  14. Published

    LED packaging with optimized heat dissipation for a micro LED array

    Kusch, A., Wurz, M., Held, M. P., Wolf, A. & Lachmayer, R., 2017, International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017. Otto, T. (ed.). p. 399-402 4 p. (International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  15. Published

    Mikroaktorik für ein Taktiles Display

    Fischer, E., Glukhovskoy, A., Schmelt, A., Twiefel, J. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 515-518 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  16. Published

    Mikrofluidische Galvanik zur Herstellung magnetoresistiver Schichten

    Rechel, M., Taptimthong, P., Arndt, M. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 313-316 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  17. Published

    Modeling and Characterization of a Bimodal Tactile Display

    Wurz, M. C., Fischer, E. C., Twiefel, J., Hofmann, V. & Schmelt, A. S., 2017.

    Research output: Contribution to conference › Paper › Research

  18. Published

    Press hardening tool integrated thin film temperature sensor

    Dencker, F., Schlenkrich, A. & Wurz, M. C., 2017, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. p. 349-350 2 p. (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  19. Published

    Pulsed electron source for atmospheric pressure chemical ionization in ion mobility spectrometry

    Bunert, E., Heptner, A., Kirk, A. T., Käbein, O., Zimmermann, S., Kusch, A. & Wurz, M. C., 2017, 2017 30th International Vacuum Nanoelectronics Conference (IVNC). Langer, C. & Lawrowski, R. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 102-103 2 p. 8051563. (International Vacuum Nanoelectronics Conference).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  20. Published

    Reaktives Ionentiefenätzen von Schattenmasken für die Sensordirektabscheidung mit einer neuartigen Beschichtungsanlage

    Klaas, D., Pehrs, F. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017: Proceedings. Berlin: VDE Verlag GmbH, p. 680-683 4 p.

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research

  21. Published

    Silicon field emitter arrays produced via wafer dicing

    Kusch, A., Wurz, M., Bunert, E. & Zimmermann, S., 2017, 2017 30th International Vacuum Nanoelectronics Conference (IVNC). Langer, C. & Lawrowski, R. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 132-133 2 p. 8051577. (International Vacuum Nanoelectronics Conference).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  22. Published

    Technical inheritance: Information basis for the identification and development of product generations

    Mozgova, I., Barton, S., Demminger, C., Miebach, T., Taptimthong, P., Lachmayer, R., Nyhuis, P., Reimche, W. & Wurz, M. C., 2017, In: Proceedings of the International Conference on Engineering Design, ICED. 6, DS87-6, p. 91-100 10 p.

    Research output: Contribution to journal › Conference article › Research › peer review

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