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Publications

  1. 2023

  2. Published

    Force sensing linear rolling guides based on modified metal strain gauges

    Denkena, B., Klemme, H., Kowalke, D., Korbacher, M., Ottermann, R., Dencker, F. & Wurz, M., 2023, European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 23rd International Conference and Exhibition, EUSPEN 2023. Riemer, O., Nisbet, C. & Phillips, D. (eds.). p. 207-210 4 p. (European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 23rd International Conference and Exhibition, EUSPEN 2023).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  3. Published

    Influence of oxide layers on the mechanical properties of copper

    Raumel, S., Wolf, A., Dencker, F. & Wurz, M., 2023, Tagungsband, 5. Symposium Materialtechnik : Fortschrittbericht der Materialforschung und Werkstofftechnik . p. 149-159 (Fortschrittsberichte der Materialforschung und Werkstofftechnik; vol. 12).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  4. Published

    Integration of film-based sensor technology in additively manufactured components

    Basten, R. G., Bengsch, S. & Wurz, M. C., 2023, MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings. VDE Verlag GmbH, p. 154-161 8 p. (MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  5. Published

    Manufacture and application of a sensor inlet for high-temperature measurements in the frictional zone of an extrusion die

    Raumel, S., Moradi, A. & Wurz, M. C., 2023, MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings. VDE Verlag GmbH, p. 672-675 4 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  6. Published

    Manufacturing and Characterization of Piezoelectric Force Sensor Arrays for Investigation of Ultrasonic Wire Bonding

    Arndt, M., Long, Y., Hu, C., Dencker, F., Twiefel, J. & Wurz, M. C., 2023, MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings. VDE Verlag GmbH, p. 462-465 4 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  7. Published

    Measurement of the Ultrasound Induced Temperature Change in an Ultrasonic Assisted Silver Sintering Process

    Hadeler, S., Long, Y., Twiefel, J. & Wurz, M. C., 2023, IEEE Sensors 2023 Conference Proceedings. (Proceedings of IEEE Sensors).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  8. Published

    Microtechnological Production of Integrated Optical Gratings Using Laser Beam Lithography for Atomic Interferometers

    de Wall, S., Kassner, A., Dencker, F. & Wurz, M., 2023, Tagungsband MikroSystemTechnik Kongress 2023. 3 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearch

  9. Published

    Miniaturized quantum systems for inertial measurement units

    Kassner, A., Diekmann, L., Künzler, C., Petring, J., Droese, N., Dencker, F., Heine, H., Abend, S., Gersemann, M., Rasel, E. M., Herr, W., Schubert, C. & Wurz, M. C., 2023, 2023 DGON Inertial Sensors and Systems (ISS). Hecker, P. (ed.). (International Symposium on Inertial Sensors and Systems).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  10. Published

    Oxygen-free resistance heating with nitrogen and silane as an energy-efficient heating process for hot stamping

    Behrens, B., Hübner, S., Holländer, U., Langohr, A., Albracht, L. F. J., Faramand, E., Wehmeyer, J., Yarcu, S., Raumel, S. & Wurz, M., 2023, In: IOP Conference Series: Materials Science and Engineering. 1284, 012007.

    Research output: Contribution to journalConference articleResearchpeer review

  11. E-pub ahead of print

    Performance Comparison of MR Sensors on Silicon and Bare PEEK (Polyether Ether Ketone) Wafers

    de Wall, S., Bierwirth, T. N., Wurz, M. & Bengsch, S., 2023, (E-pub ahead of print).

    Research output: Contribution to conferencePosterResearch

  12. Published

    Physical Sensors: Magnetic Sensors

    Prediger, M. S. & Wurz, M., 2023, Encyclopedia of Sensors and Biosensors. Elsevier Inc., Vol. 1. p. 97-110 14 p.

    Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearch

  13. Published

    Sensor Inserts on Spherical Surfaces for Temperature Measurement in Wear Contacts

    Raumel, S. & Wurz, M. C., 2023, 2023 IEEE SENSORS. p. 1-4 (Proceedings of IEEE Sensors).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  14. Published

    Setup of an ultra-high vacuum bonder for the encapsulation of quantum systems

    Droese, N., Petring, J., Hadeler, S., Kassner, A., Dencker, F. & Wurz, M. C., 2023, MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings. VDE Verlag GmbH, p. 763-766 4 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  15. Published

    Simulation-based Design of a Magnetostrictive Middle Ear Actuator

    Adamscheck, M., Fischer, E., Müller, E., Glukhovskoy, A., Prediger, M. S., Dencker, F. & Wurz, M. C., 2023, MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings. VDE Verlag GmbH, p. 503-508 6 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  16. Published

    Simulation, Manufacturing and Evaluation of a Transformer Eddy-Current Sensor for Deep-Drawing Processes

    Kamrani, S., Ottermann, R., Dencker, F. & Wurz, M., 2023, SMSI 2023. p. 284 -285

    Research output: Chapter in book/report/conference proceedingOther contribution in a book, report, anthology or conference proceedingResearch

  17. Published

    Monitoring of the Flange Draw-In During Deep Drawing Processes Using a Thin-Film Inductive Sensor

    Fünfkirchler, T., Arndt, M., Hübner, S., Dencker, F., Wurz, M. C. & Behrens, B. A., 2 Feb 2023, Lecture Notes in Production Engineering. Springer Nature, p. 111-121 11 p. (Lecture Notes in Production Engineering; vol. Part F1163).

    Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearchpeer review

  18. Published

    Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process

    Wittek, C. R., Steinhoff, L., Raumel, S., Reißfelder, M., Dencker, F. & Wurz, M. C., 28 Feb 2023, In: Micromachines. 14, 3, 580.

    Research output: Contribution to journalArticleResearchpeer review

  19. Published

    Detection of joining mechanisms at different locations of the wire/substrate interface during ultrasonic wire bonding via a PZT-based sensor array

    Long, Y., Arndt, M., Sun, C., Dencker, F., Wurz, M. & Twiefel, J., Mar 2023, In: Journal of Materials Processing Technology. 312, 117826.

    Research output: Contribution to journalArticleResearchpeer review

  20. Published

    Application of batch manufactured flexible micro-grinding tools on copper and oxidized copper surfaces

    Steinhoff, L., Dencker, F. & Wurz, M. C., 27 Mar 2023, In: Tribologie und Schmierungstechnik. 70, 1, p. 5-10 6 p.

    Research output: Contribution to journalArticleResearchpeer review

  21. Published

    Influence of Microscale Tin Particles on Mechanical Properties of Silver Sintering Joints with Reduced Processing Parameters

    Hadeler, S., Long, Y., Ottermann, R., Dencker, F., Twiefel, J. & Wurz, M. C., May 2023, 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC): Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 676-681 6 p. (Proceedings - Electronic Components Conference).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review