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Equipment
Automated and high throughput electron beam lithography system
Wurz, M. C. (Head)
Institute of MicrotechnologyFacility/Equipment: Major Research Instrumentation
Prof. Dr. Marc Christopher Wurz
- Institute of Micro Production Technology - Professor, Executive Director
- PhoenixD: Photonics, Optics, and Engineering – Innovation Across Disciplines (Cluster of Excellence 2122) - Member
- CRC 1368: Oxygen-free Production - Management
- Laboratory of Nano and Quantum Engineering (LNQE) - Executive Board, Member