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Publications

  1. 2024

  2. Published

    Polymer-Free Batch Production and Application of Metal Foil-Based Thin-Film Strain Gauges

    Ottermann, R., Müller, E., Keßler, M., Dencker, F., Klaas, D. & Wurz, M. C., 20 Oct 2024, 2024 IEEE Sensors, SENSORS 2024 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., (Proceedings of IEEE Sensors).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  3. Published

    Waveguides Written by Femtosecond Laser in CVD Diamonds

    Perevoznik, D., Locmelis, J., Zuber, D., Glukhovskoy, A., Afentaki, A., Hinkelmann, M., Dencker, F., Wurz, M. & Morgner, U., 18 Oct 2024, In: EPJ Web of Conferences. 307, 2 p., 02034.

    Research output: Contribution to journalConference articleResearchpeer review

  4. Published

    Miniaturized Rubidium Source for Generating Vapor Phase Atoms for Magneto Optical Traps

    Koch, J., Diekmann, L. F., Kassner, A., Dencker, F. & Wurz, M. C., 15 Jul 2024, 2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024. Institute of Electrical and Electronics Engineers Inc., (International Vacuum Nanoelectronics Conference).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  5. E-pub ahead of print

    Design and Manufacture of Face Grinding Wheels with Micro-Structured Channels

    Steinhoff, L., Tubbe, E., Dencker, F., Denmark, T., Kausch, L. & Wurz, M. C., 11 Jun 2024, (E-pub ahead of print) 24th International Conference & Exhibition.

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  6. Published

    Modification of glass by a laser for the use in micro-electric systems and quantum devices

    Keinert, L., Koch, J. (Contributor), Künzler, C. (Contributor), Dehning, K. J. (Contributor), Kassner, A. (Contributor), Dencker, F. (Contributor), Zimmermann, S. (Contributor) & Wurz, M. (Contributor), 11 Mar 2024, Book of abstracts for the EQTC 2023. Schnitger, A., Husemann, R. & Liebisch, T. (eds.). Hannover, p. 91

    Research output: Chapter in book/report/conference proceedingConference abstractResearch

  7. Published

    Femtosecond Laser Written Waveguides in CVD Diamonds

    Perevoznik, D., Locmelis, J., Zuber, D., Glukhovskoy, A., Afentaki, A., Hinkelmann, M., Dencker, F., Wurz, M. & Morgner, U., 2024.

    Research output: Contribution to conferencePaperResearchpeer review

  8. Published

    Glass-Extraction Electrode for Field Emission Applications

    Buchta, A. M., Kassner, A., Dencker, F. & Wurz, M. C., 2024, 2024 37th International Vacuum Nanoelectronics Conference (IVNC). (International Vacuum Nanoelectronics Conference proceedings).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  9. Published

    Manufacturing and Characterization of Planar Transformers as Molded Interconnect Device Technology Component for an Industrial Production

    Bierwirth, T. N., Bengsch, S., Werner, M., Wachs, R., Henne, C., Bur, S., Dencker, F. & Wurz, M. C., 2024, Proceedings - IEEE 74th Electronic Components and Technology Conference, ECTC 2024. Institute of Electrical and Electronics Engineers Inc., p. 2172-2177 6 p. (Proceedings - Electronic Components and Technology Conference).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  10. Published

    Silicon-based membrane pressure sensor for inline monitoring of pressure and hermeticity of small-volume bonded packages

    Koch, J., Brinkmann, L. M., Kassner, A., Dencker, F. & Wurz, M. C., 2024, 2024 IEEE 74th Electronic Components and Technology Conference : (ECTC). Institute of Electrical and Electronics Engineers Inc., p. 193-200 8 p. (Proceedings - Electronic Components and Technology Conference).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  11. 2023

  12. Published

    Manufacturing of a Reluctance Actuator for Use as a Hearing Implant in the Middle Ear

    Müller, E., Adamscheck, M., Fischer, E. C., Glukhovskoy, A., Prediger, M. S., Dencker, F. & Wurz, M., 23 Nov 2023, MikroSystemTechnik Kongress 2023.

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  13. Published

    Fabrication Method and Characterization of Molded Interconnect Device Micro Transformer in Planar Form by Embedding Sintered Ferrite Cores

    Bierwirth, T. N., Fischer, E. C., Prediger, M. S., Le, T. M., Dencker, F. & Wurz, M. C., Oct 2023, MikroSystemTechnik Kongress 2023: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings. VDE Verlag GmbH, p. 599-604 6 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearch

  14. Published
  15. Published

    Direct Sensor Integration on the Raceway of Roller Bearings

    Pape, F., Konopka, D., Coors, T., Poll, G., Steppeler, T., Ottermann, R., Dencker, F. & Wurz, M., Sept 2023, 9 p.

    Research output: Book/ReportConference proceedingResearch

  16. Published

    Characterization of the tribologically relevant cover layers formed on copper in oxygen and oxygen-free conditions

    Raumel, S., Barienti, K., Luu, H. T., Merkert, N., Dencker, F., Nürnberger, F., Maier, H. J. & Wurz, M. C., Aug 2023, In: Friction. 11, 8, p. 1505–1521 17 p.

    Research output: Contribution to journalArticleResearchpeer review

  17. Published

    Novel Glass-Silicon Emitter Chip for Field Emission Applications

    Buchta, A. M., Kassner, A., Voß, J., Leopold, T., Petring, J., Diekmann, L., Dencker, F. & Wurz, M. C., 27 Jul 2023, 2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC). p. 207-209 3 p. ( International Vacuum Nanoelectronics Conference).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  18. Published

    Soliton compression and supercontinuum spectra in nonlinear diamond photonics

    Melchert, O., Kinnewig, S., Dencker, F., Perevoznik, D., Willms, S., Babushkin, I., Wurz, M., Kues, M., Beuchler, S., Wick, T., Morgner, U. & Demircan, A., Jun 2023, In: Diamond and Related Materials. 136, 109939.

    Research output: Contribution to journalArticleResearchpeer review

  19. Published

    Influence of Microscale Tin Particles on Mechanical Properties of Silver Sintering Joints with Reduced Processing Parameters

    Hadeler, S., Long, Y., Ottermann, R., Dencker, F., Twiefel, J. & Wurz, M. C., May 2023, 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC): Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 676-681 6 p. (Proceedings - Electronic Components Conference).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  20. Published

    Application of batch manufactured flexible micro-grinding tools on copper and oxidized copper surfaces

    Steinhoff, L., Dencker, F. & Wurz, M. C., 27 Mar 2023, In: Tribologie und Schmierungstechnik. 70, 1, p. 5-10 6 p.

    Research output: Contribution to journalArticleResearchpeer review

  21. Published

    Detection of joining mechanisms at different locations of the wire/substrate interface during ultrasonic wire bonding via a PZT-based sensor array

    Long, Y., Arndt, M., Sun, C., Dencker, F., Wurz, M. & Twiefel, J., Mar 2023, In: Journal of Materials Processing Technology. 312, 117826.

    Research output: Contribution to journalArticleResearchpeer review

  22. Published

    Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process

    Wittek, C. R., Steinhoff, L., Raumel, S., Reißfelder, M., Dencker, F. & Wurz, M. C., 28 Feb 2023, In: Micromachines. 14, 3, 580.

    Research output: Contribution to journalArticleResearchpeer review

  23. Published

    Monitoring of the Flange Draw-In During Deep Drawing Processes Using a Thin-Film Inductive Sensor

    Fünfkirchler, T., Arndt, M., Hübner, S., Dencker, F., Wurz, M. C. & Behrens, B. A., 2 Feb 2023, Lecture Notes in Production Engineering. Springer Nature, p. 111-121 11 p. (Lecture Notes in Production Engineering; vol. Part F1163).

    Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearchpeer review

  24. Published

    Advancements in monitoring of tribological stress in bearings using thin-film strain gauges

    Konopka, D., Steppeler, T., Ottermann, R., Pape, F., Dencker, F., Poll, G. & Wurz, M., 2023, p. 1623-1634.

    Research output: Contribution to conferencePaperResearchpeer review

  25. Published

    Force sensing linear rolling guides based on modified metal strain gauges

    Denkena, B., Klemme, H., Kowalke, D., Korbacher, M., Ottermann, R., Dencker, F. & Wurz, M., 2023, European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 23rd International Conference and Exhibition, EUSPEN 2023. Riemer, O., Nisbet, C. & Phillips, D. (eds.). p. 207-210 4 p. (European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 23rd International Conference and Exhibition, EUSPEN 2023).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  26. Published

    Influence of oxide layers on the mechanical properties of copper

    Raumel, S., Wolf, A., Dencker, F. & Wurz, M., 2023, Tagungsband, 5. Symposium Materialtechnik : Fortschrittbericht der Materialforschung und Werkstofftechnik . p. 149-159 (Fortschrittsberichte der Materialforschung und Werkstofftechnik; vol. 12).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  27. Published

    Manufacturing and Characterization of Piezoelectric Force Sensor Arrays for Investigation of Ultrasonic Wire Bonding

    Arndt, M., Long, Y., Hu, C., Dencker, F., Twiefel, J. & Wurz, M. C., 2023, MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings. VDE Verlag GmbH, p. 462-465 4 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  28. Published

    Microtechnological Production of Integrated Optical Gratings Using Laser Beam Lithography for Atomic Interferometers

    de Wall, S., Kassner, A., Dencker, F. & Wurz, M., 2023, Tagungsband MikroSystemTechnik Kongress 2023. 3 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearch

  29. Published

    Miniaturized quantum systems for inertial measurement units

    Kassner, A., Diekmann, L., Künzler, C., Petring, J., Droese, N., Dencker, F., Heine, H., Abend, S., Gersemann, M., Rasel, E. M., Herr, W., Schubert, C. & Wurz, M. C., 2023, 2023 DGON Inertial Sensors and Systems (ISS). Hecker, P. (ed.). (International Symposium on Inertial Sensors and Systems).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  30. Published

    Setup of an ultra-high vacuum bonder for the encapsulation of quantum systems

    Droese, N., Petring, J., Hadeler, S., Kassner, A., Dencker, F. & Wurz, M. C., 2023, MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings. VDE Verlag GmbH, p. 763-766 4 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  31. Published

    Simulation-based Design of a Magnetostrictive Middle Ear Actuator

    Adamscheck, M., Fischer, E., Müller, E., Glukhovskoy, A., Prediger, M. S., Dencker, F. & Wurz, M. C., 2023, MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings. VDE Verlag GmbH, p. 503-508 6 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  32. Published

    Simulation, Manufacturing and Evaluation of a Transformer Eddy-Current Sensor for Deep-Drawing Processes

    Kamrani, S., Ottermann, R., Dencker, F. & Wurz, M., 2023, SMSI 2023. p. 284 -285

    Research output: Chapter in book/report/conference proceedingOther contribution in a book, report, anthology or conference proceedingResearch

  33. 2022

  34. Published

    Degeneration Effects of Thin-Film Sensors after Critical Load Conditions of Machine Components

    Ottermann, R., Steppeler, T., Dencker, F. & Wurz, M. C., 27 Sept 2022, In: Machines. 10, 10, 15 p., 870.

    Research output: Contribution to journalArticleResearchpeer review

  35. Published

    Fabrication of a Low Profile Planar Transformer Using Molded Interconnect Device Technology

    Bierwirth, T. N., Dencker, F., Fischer, E. C. & Wurz, M. C., Sept 2022, 2022 IEEE 9th Electronics System-Integration Technology Conference, ESTC 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 129-133 5 p. (2022 IEEE 9th Electronics System-Integration Technology Conference, ESTC 2022 - Proceedings).

    Research output: Chapter in book/report/conference proceedingConference contributionResearch

  36. Published

    Impact of surface texture on ultrasonic wire bonding process

    Long, Y., Arndt, M., Dencker, F., Wurz, M., Twiefel, J. & Wallaschek, J., Sept 2022, In: Journal of Materials Research and Technology. 20, p. 1828-1838 11 p.

    Research output: Contribution to journalArticleResearchpeer review

  37. Published

    Nonevaporable getter-MEMS for generating UHV conditions in small volumina

    Diekmann, L. F., Kassner, A., Dencker, F. & Wurz, M. C., Sept 2022, In: Journal of Vacuum Science and Technology B. 40, 5, 054202.

    Research output: Contribution to journalArticleResearchpeer review

  38. Published

    High temperature nanoindentation of iron: Experimental and computational study

    Khvan, T., Noels, L., Terentyev, D., Dencker, F., Stauffer, D., Hangen, U. D., Van Renterghem, W., Cheng, C. & Zinovev, A., 15 Aug 2022, In: Journal of nuclear materials. 567, 153815.

    Research output: Contribution to journalArticleResearchpeer review

  39. Published

    Nanoindentation in alumina coated Al: Molecular dynamics simulations and experiments

    Luu, H. T., Raumel, S., Dencker, F., Wurz, M. & Merkert, N., 15 May 2022, In: Surface and Coatings Technology. 437, 128342.

    Research output: Contribution to journalArticleResearchpeer review

  40. Published

    Residual Stresses from Incremental Hole Drilling Using Directly Deposited Thin Film Strain Gauges

    Heikebrügge, S., Ottermann, R., Breidenstein, B., Wurz, M. C. & Dencker, F., Apr 2022, In: Experimental mechanics. 62, 4, p. 701-713 13 p.

    Research output: Contribution to journalArticleResearchpeer review

  41. Published

    Approaches for a Solely Electroless Metallization of Through-Glass Vias

    Zawacka, A. M., Prediger, M. S., Kassner, A., Dencker, F. E. & Wurz, M., 2022, 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC). p. 889-897 9 p. (Proceedings - Electronic Components and Technology Conference; vol. 2022-May).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  42. Published

    In Situ Resistance Trimming of Directly Deposited Thin-Film Strain Gauges

    Ottermann, R., Zhang, S., Denkena, B., Klemme, H., Kowalke, D., Korbacher, M., Dencker, F. & Wurz, M. C., 2022, 2022 IEEE Sensors, SENSORS 2022 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., (Proceedings of IEEE Sensors; vol. 2022-October).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  43. Published

    Production and characterisation of batch manufactured flexible micro-grinding tools for finishing metallic surfaces

    Steinhoff, L., Dencker, F. & Wurz, M. C., 2022, European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. Leach, R. K., Akrofi-Ayesu, A., Nisbet, C. & Phillips, D. (eds.). p. 77-80 4 p. (European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

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