Publications
- 2023
- Published
Manufacturing of a Reluctance Actuator for Use as a Hearing Implant in the Middle Ear
Müller, E., Adamscheck, M., Fischer, E. C., Glukhovskoy, A., Prediger, M. S., Dencker, F. & Wurz, M., 23 Nov 2023, MikroSystemTechnik Kongress 2023.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Simulation-based Design of a Magnetostrictive Middle Ear Actuator
Adamscheck, M., Fischer, E., Müller, E., Glukhovskoy, A., Prediger, M. S., Dencker, F. & Wurz, M. C., 2023, MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings. VDE Verlag GmbH, p. 503-508 6 p.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- 2022
- Published
Tiefziehen mit integrierter induktiver Flanscheinzugssensorik in Dünnschichttechnik: Schlussbericht vom 28.02.2022 zu IGF-Vorhaben Nr. 20468 N : Berichtszeitraum: 01.03.2019 bis 31.08.2021
Fünfkirchler, T., Pfeffer, C., Micke-Camuz, M., Arndt, M., Glukhovskoy, A., Künzler, C., Ottermann, R., Behrens, B., Maier, H. J. & Salomon, R., 2022, Düsseldorf. (Forschung für die Praxis / Forschungsvereinigung Stahlanwendung e.V; vol. 1217)Research output: Book/Report › Other report › Research
- 2021
- Published
Microfabrication of Alkali Vapor MEMS Cells for chip-scale atomic clock
Kazakin, A., Kleimanov, R., Komarevtsev, I., Kondrateva, A., Enns, Y., Shashkin, A. & Glukhovskoy, A., 14 Dec 2021, In: Journal of Physics: Conference Series. 2103, 1, 012188.Research output: Contribution to journal › Conference article › Research › peer review
- Published
Towards a Highly Sensitive Piezoelectric Nano-Mass Detection: A Model-Based Concept Study
Twiefel, J., Glukhovskoy, A., de Wall, S., Wurz, M. C., Sehlmeyer, M., Hitzemann, M. & Zimmermann, S., 4 Apr 2021, In: Sensors. 21, 7, 15 p., 2533.Research output: Contribution to journal › Article › Research › peer review
- Published
Development of a Polyimid Membrane for Electromagnetic Middle-Ear Actuators
Glukhovskoy, A., Müller, E., Prediger, M. S., Maier, H. & Wurz, M. C., 2021, MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, p. 186-189 4 p. (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Proof of Concept: Glass-Membrane Based Differential Pressure Sensor
Glukhovskoy, A., Prediger, M. S., Schäfer, J., Ambrosio, A., Ambrosius, N., Vogt, A., Santos, R., Ostholt, R. & Wurz, M., 2021, 2021 IEEE 71st Electronic Components and Technology Conference (ECTC). p. 1563-1570 8 p. (Proceedings - Electronic Components and Technology Conference; vol. 2021-June).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- 2020
- Published
VERFAHREN UND VORRICHTUNG ZUM BESTIMMEN EINER KONZENTRATION
WURZ, Marc, C. (Inventor), Glukhovskoy, A. (Inventor), Schnebeck, T. (Inventor) & MAIER, Hans, J. (Inventor), 9 Dec 2020, IPC No. G01N 21/ 31 A I, Patent No. EP3746773, Priority date 30 Jan 2019, Priority No. WO2019EP52291Research output: Patent
- 2019
- Published
Substrate modification influence on properties of nanocomposite based on TiO2 and gold nanoparticles
Mishin, M. V., Vorobyev, A. A., Kondrateva, A. S., Koroleva, E. Y., Karaseov, P. A., Bespalova, P. G., Shakhmin, A. L., Glukhovskoy, A., Wurz, M. C. & Filimonov, A. V., Jun 2019, In: Journal of Physics: Conference Series. 1236, 1, 012025.Research output: Contribution to journal › Conference article › Research › peer review
- Published
The concept of a large working stroke reluctance zipper actuator
Glukhovskoy, A. & Wurz, M. C., 2019, MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, p. 506-509 4 p.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- 2018
- Published
The mechanism of charge carrier generation at the TiO2—n-Si heterojunction activated by gold nanoparticles
Mishin, M. V., Vorobyev, A. A., Kondrateva, A. S., Koroleva, E. Y., Karaseov, P. A., Bespalova, P. G., Shakhmin, A. L., Glukhovskoy, A. V., Wurz, M. C. & Filimonov, A. V., 11 Jun 2018, In: Semiconductor Science and Technology. 33, 7, 075014.Research output: Contribution to journal › Article › Research › peer review
- Published
A laser-based, in-line chlorine dioxide concentration sensor
Wurz, M. C., Fischer, E. C., Holz, S., Glukhovskoy, A. & Schnebeck, T., 2018.Research output: Contribution to conference › Paper › Research
- 2017
- Published
Bistable arch-like beams with modulated profile as perspective supporting structures of a microelectromenchanical actuator
Enns, Y. B., Pyatishev, E. N. & Glukhovskoy, A., 23 Nov 2017, In: Journal of Physics: Conference Series. 917, 8, 082013.Research output: Contribution to journal › Conference article › Research › peer review
- Published
Feasibility of Round Window Stimulation by a Novel Electromagnetic Microactuator
Van Drunen, W. J., Mueller, M., Glukhovskoy, A., Salcher, R., Wurz, M. C., Lenarz, T. & Maier, H., 29 Oct 2017, In: BioMed Research International. 2017, 6369247.Research output: Contribution to journal › Article › Research › peer review
- Published
Investigation of intracochlear dual actuator stimulation in a scaled test rig
Van Drunen, W. J., Lachheb, S. K., Glukhovskoy, A., Twiefel, J., Wurz, M. C., Lenarz, T., Rau, T. S. & Majdani, O., Sept 2017, In: Current Directions in Biomedical Engineering. 3, 2, p. 119-122 4 p.Research output: Contribution to journal › Article › Research › peer review
- Published
A micromechanical gyroscope with bistable suspension of microdrive
Pyatishev, E., Enns, Y., Komarevtsev, I., Wurz, M. C. & Glukhovskoy, A., 28 Jul 2017, 2017 24th Saint Petersburg International Conference on Integrated Navigation Systems, ICINS 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 7995646Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Elektromechanischer Mikro-Biegeaktor als optischer Shutte
Wurz, M. C., Pyatishev, E., Glukhovskoy, A., Fischer, E. C., Kleimanov, R., Odintsov, A. & Pyatishev, E., 2017, Proceedings of the MikroSystemTechnik Kongress 2017.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
- Published
Elektromechanischer Mikro-Biegeaktor als optischer Shutter
Pyatishev, E., Wurz, M., Enns, Y., Glukhovskoy, A., Fischer, E., Odintsov, A. & Kleimanov, R., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 519-522 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Mikroaktorik für ein Taktiles Display
Fischer, E., Glukhovskoy, A., Schmelt, A., Twiefel, J. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, p. 515-518 4 p. (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- 2016
- Published
Intracochlear Stimulation of the Basilar Membrane
van Drunen, W. J., Hofmann, V., Twiefel, J., Glukhovskoy, A., Beringer, S., Wurz, M. C., Rau, T. S., Wallaschek, J., Rissing, L., Lenarz, T. & Majdani, O., 28 Sept 2016, In: Biomedizinische Technik. 61, s1, p. 179-199 21 p.Research output: Contribution to journal › Article › Research › peer review