Details
| Original language | English |
|---|---|
| Title of host publication | DVS-Berichte |
| Place of Publication | Düsseldorf |
| Volume | 380 |
| Publication status | Published - 2022 |
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Yttria coatings as wear protection layer in the semiconductor industry. / Nicolaus, Martin; Dukat, Mareike (Contributor); Möhwald, Kai (Contributor) et al.
DVS-Berichte. Vol. 380 Düsseldorf, 2022.
DVS-Berichte. Vol. 380 Düsseldorf, 2022.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
Nicolaus, M, Dukat, M, Möhwald, K, Maier, HJ & Walther, R 2022, Yttria coatings as wear protection layer in the semiconductor industry. in DVS-Berichte. vol. 380, Düsseldorf. https://doi.org/10.31399/asm.cp.itsc2022p0939
Nicolaus, M., Dukat, M., Möhwald, K., Maier, H. J., & Walther, R. (2022). Yttria coatings as wear protection layer in the semiconductor industry. In DVS-Berichte (Vol. 380). https://doi.org/10.31399/asm.cp.itsc2022p0939
Nicolaus M, Dukat M, Möhwald K, Maier HJ, Walther R. Yttria coatings as wear protection layer in the semiconductor industry. In DVS-Berichte. Vol. 380. Düsseldorf. 2022 doi: 10.31399/asm.cp.itsc2022p0939
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title = "Yttria coatings as wear protection layer in the semiconductor industry",
author = "Martin Nicolaus and Mareike Dukat and Kai M{\"o}hwald and Maier, {Hans J{\"u}rgen} and Ralf Walther",
year = "2022",
doi = "10.31399/asm.cp.itsc2022p0939",
language = "English",
volume = "380",
booktitle = "DVS-Berichte",
}
Download
TY - GEN
T1 - Yttria coatings as wear protection layer in the semiconductor industry
AU - Nicolaus, Martin
AU - Maier, Hans Jürgen
AU - Walther, Ralf
A2 - Dukat, Mareike
A2 - Möhwald, Kai
PY - 2022
Y1 - 2022
U2 - 10.31399/asm.cp.itsc2022p0939
DO - 10.31399/asm.cp.itsc2022p0939
M3 - Conference contribution
VL - 380
BT - DVS-Berichte
CY - Düsseldorf
ER -