Visualization of oxide removal during ultrasonic wire bonding process

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  • Laser Zentrum Hannover e.V. (LZH)
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Details

Original languageEnglish
Title of host publication2017 IEEE 19th Electronics Packaging Technology Conference, EPTC 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-4
Number of pages4
ISBN (electronic)9781538630426
Publication statusPublished - 2 Jul 2017
Event2017 19th IEEE Electronics Packaging Technology Conference, EPTC 2017 - Singapore, Singapore
Duration: 6 Dec 20179 Dec 2017

Abstract

As a predominant interconnection technique, ultrasonic wire bonding has been applied in microelectronic packaging industry for decades. However, the bonding mechanisms are still unclear, especially for the oxide removal process. In this work, the whole oxide removal process was visualized by the real-time observations of artificial coated layers. An oxide layer was deposited on either the wire or the glass substrate and a high-speed observation system was focused on the wire/glass interface so that the changes of oxide layer at the interface can be observed. For the coated wire, cracks can be clearly observed after the normal force loading and concentrated at the peripheral contact region. The discretized oxides were then detached from the pure metal surface and rolled into small particles. The oxide particles were transported by the material flow and stress gradient induced compelling. The continuous plastic deformation induced material flow played an important role on the removal of substrate oxides.

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Cite this

Visualization of oxide removal during ultrasonic wire bonding process. / Long, Yangyang; Dencker, Folke; Isaak, Andreas et al.
2017 IEEE 19th Electronics Packaging Technology Conference, EPTC 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1-4.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Long, Y, Dencker, F, Isaak, A, Schneider, F, Hermsdorf, J, Wurz, M & Twiefel, J 2017, Visualization of oxide removal during ultrasonic wire bonding process. in 2017 IEEE 19th Electronics Packaging Technology Conference, EPTC 2017. Institute of Electrical and Electronics Engineers Inc., pp. 1-4, 2017 19th IEEE Electronics Packaging Technology Conference, EPTC 2017, Singapore, Singapore, 6 Dec 2017. https://doi.org/10.1109/EPTC.2017.8277489
Long, Y., Dencker, F., Isaak, A., Schneider, F., Hermsdorf, J., Wurz, M., & Twiefel, J. (2017). Visualization of oxide removal during ultrasonic wire bonding process. In 2017 IEEE 19th Electronics Packaging Technology Conference, EPTC 2017 (pp. 1-4). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EPTC.2017.8277489
Long Y, Dencker F, Isaak A, Schneider F, Hermsdorf J, Wurz M et al. Visualization of oxide removal during ultrasonic wire bonding process. In 2017 IEEE 19th Electronics Packaging Technology Conference, EPTC 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1-4 doi: 10.1109/EPTC.2017.8277489
Long, Yangyang ; Dencker, Folke ; Isaak, Andreas et al. / Visualization of oxide removal during ultrasonic wire bonding process. 2017 IEEE 19th Electronics Packaging Technology Conference, EPTC 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1-4
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title = "Visualization of oxide removal during ultrasonic wire bonding process",
abstract = "As a predominant interconnection technique, ultrasonic wire bonding has been applied in microelectronic packaging industry for decades. However, the bonding mechanisms are still unclear, especially for the oxide removal process. In this work, the whole oxide removal process was visualized by the real-time observations of artificial coated layers. An oxide layer was deposited on either the wire or the glass substrate and a high-speed observation system was focused on the wire/glass interface so that the changes of oxide layer at the interface can be observed. For the coated wire, cracks can be clearly observed after the normal force loading and concentrated at the peripheral contact region. The discretized oxides were then detached from the pure metal surface and rolled into small particles. The oxide particles were transported by the material flow and stress gradient induced compelling. The continuous plastic deformation induced material flow played an important role on the removal of substrate oxides.",
author = "Yangyang Long and Folke Dencker and Andreas Isaak and Friedrich Schneider and J{\"o}rg Hermsdorf and Marc Wurz and Jens Twiefel",
note = "Funding Information: We gratefully acknowledge the financial support from DFG (Deutsche Forschungsgemeinschaft) programm (TW75 /8-1|WA564/40-1|WU558/11-1) and the provision of the bonding head HBK05 by Hesse Mechatronics GmbH. Publisher Copyright: {\textcopyright} 2017 IEEE. Copyright: Copyright 2018 Elsevier B.V., All rights reserved.; 2017 19th IEEE Electronics Packaging Technology Conference, EPTC 2017 ; Conference date: 06-12-2017 Through 09-12-2017",
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AU - Dencker, Folke

AU - Isaak, Andreas

AU - Schneider, Friedrich

AU - Hermsdorf, Jörg

AU - Wurz, Marc

AU - Twiefel, Jens

N1 - Funding Information: We gratefully acknowledge the financial support from DFG (Deutsche Forschungsgemeinschaft) programm (TW75 /8-1|WA564/40-1|WU558/11-1) and the provision of the bonding head HBK05 by Hesse Mechatronics GmbH. Publisher Copyright: © 2017 IEEE. Copyright: Copyright 2018 Elsevier B.V., All rights reserved.

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