Details
| Translated title of the contribution | Use of shadow masks for direct-structuring of individually adaptable sensor systems onto technical surfaces |
|---|---|
| Original language | German |
| Title of host publication | MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings |
| Publisher | VDE Verlag GmbH |
| Pages | 338-341 |
| Number of pages | 4 |
| ISBN (electronic) | 9783800741007 |
| Publication status | Published - 2015 |
| Event | MikroSystemTechnik Kongress 2015: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2015: MEMS, Microelectronics, Systems - Karlsruhe, Germany Duration: 26 Oct 2015 → 28 Oct 2015 |
Publication series
| Name | MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings |
|---|
Abstract
At the Institute for Micro Production Technology (IMPT), Leibniz Universität Hannover, a technology for depositing and structuring of sensors directly onto the surface of components is under development. The research takes place within the Collaborative Research Center 653 of the German Research Foundation. This article describes challenges for the manufacturing of laser structured shadow masks and challenges for structuring thin layers using the manufactured shadow masks. In the following, those challenges will be evaluated and technical solutions will be presented. The focus is set on the reduction of geometry deviations of lasered shadow masks by improving the laser process and the reduction of the gap between the shadow mask and the substrate. At the end, an optimized concept for fixing shadow masks will be presented and evaluated. Ideas for future work and future improvements will be mentioned as well.
ASJC Scopus subject areas
- Engineering(all)
- Electrical and Electronic Engineering
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Materials Science(all)
- Surfaces, Coatings and Films
- Physics and Astronomy(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
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MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 338-341 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Verwendung von Schattenmasken zur Direktstrukturierung individuell adaptierbarer Sensorik auf technischen Oberflächen
AU - Klaas, Daniel
AU - Rittinger, Johannes
AU - Taptimthong, Piriya
AU - Düsing, Jan Friedrich
AU - Wurz, Marc Christopher
AU - Rissing, Lutz
N1 - Funding Information: Die vorgestellten Forschungst?tigkeiten wurden durch die Deutsche Forschungsgemeinschaft im Rahmen des Sonderforschungsbereiches 653?Gentelligente Bauteile im Lebenszyklus?innerhalb des Teilprojektes S1 ?Modulare, mehrfunktionale Mikrosensorik?finanziert. Publisher Copyright: © VDE VERLAG GMBH ∙ Berlin ∙ Offenbach Copyright: Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2015
Y1 - 2015
N2 - At the Institute for Micro Production Technology (IMPT), Leibniz Universität Hannover, a technology for depositing and structuring of sensors directly onto the surface of components is under development. The research takes place within the Collaborative Research Center 653 of the German Research Foundation. This article describes challenges for the manufacturing of laser structured shadow masks and challenges for structuring thin layers using the manufactured shadow masks. In the following, those challenges will be evaluated and technical solutions will be presented. The focus is set on the reduction of geometry deviations of lasered shadow masks by improving the laser process and the reduction of the gap between the shadow mask and the substrate. At the end, an optimized concept for fixing shadow masks will be presented and evaluated. Ideas for future work and future improvements will be mentioned as well.
AB - At the Institute for Micro Production Technology (IMPT), Leibniz Universität Hannover, a technology for depositing and structuring of sensors directly onto the surface of components is under development. The research takes place within the Collaborative Research Center 653 of the German Research Foundation. This article describes challenges for the manufacturing of laser structured shadow masks and challenges for structuring thin layers using the manufactured shadow masks. In the following, those challenges will be evaluated and technical solutions will be presented. The focus is set on the reduction of geometry deviations of lasered shadow masks by improving the laser process and the reduction of the gap between the shadow mask and the substrate. At the end, an optimized concept for fixing shadow masks will be presented and evaluated. Ideas for future work and future improvements will be mentioned as well.
UR - http://www.scopus.com/inward/record.url?scp=85096943984&partnerID=8YFLogxK
M3 - Aufsatz in Konferenzband
AN - SCOPUS:85096943984
T3 - MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings
SP - 338
EP - 341
BT - MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings
PB - VDE Verlag GmbH
T2 - MikroSystemTechnik Kongress 2015: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2015: MEMS, Microelectronics, Systems
Y2 - 26 October 2015 through 28 October 2015
ER -