Details
Original language | English |
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Title of host publication | Vertical-Cavity Surface-Emitting Lasers XXVI |
Editors | Chun Lei, Kent D. Choquette, Luke A. Graham |
Publisher | SPIE |
ISBN (electronic) | 9781510649118 |
Publication status | Published - 2022 |
Event | Vertical-Cavity Surface-Emitting Lasers XXVI 2022 - Virtual, Online Duration: 20 Feb 2022 → 24 Feb 2022 |
Publication series
Name | Proceedings of SPIE - The International Society for Optical Engineering |
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Volume | 12020 |
ISSN (Print) | 0277-786X |
ISSN (electronic) | 1996-756X |
Abstract
We report on a novel sensor concept based on a coupled resonator configuration and the employment of vertical-cavity surface-emitting laser (VCSEL) sources. The back reflection of a sample surface next to the emission window of the laser source affects the internal resonator conditions of the VCSEL resulting in a change of the emitted wavelength and operating current, respectively, if the operating voltage is kept constant. The behavior of the VCSEL in this scenario was investigated for both the near and the far field which offers the potential for different types of measurement applications. First experimental results show a measurable and reproducible change of the operating current when moving the sample by as little as a few nm in vertical direction. This behavior was also verified with a simulation based on ANSYS Lumerical by creating distributed Bragg reflection (DBR) stacks with different layers and quantifying the influence of the movable third resonator surface on the emission wavelength. In the next steps, the new sensor system will be integrated into an inline production chain for additive optics manufacturing to supervise the manufacturing accuracy and realize a feedback loop for the correction of process imperfections.
Keywords
- coupled resonator, optical sensing, VCSEL
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- Apa
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- BibTeX
- RIS
Vertical-Cavity Surface-Emitting Lasers XXVI. ed. / Chun Lei; Kent D. Choquette; Luke A. Graham. SPIE, 2022. 120200H (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12020).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - VCSELs as highly sensitive stand-alone distance sensors
AU - Günther, A.
AU - Korat, D
AU - Kapadia, K
AU - Roth, B.
AU - Kowalsky, W.
N1 - Funding Information: This research was funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany’s Excellence Strategy within the Cluster of Excellence PhoenixD (EXC 2122, Project ID 390833453).
PY - 2022
Y1 - 2022
N2 - We report on a novel sensor concept based on a coupled resonator configuration and the employment of vertical-cavity surface-emitting laser (VCSEL) sources. The back reflection of a sample surface next to the emission window of the laser source affects the internal resonator conditions of the VCSEL resulting in a change of the emitted wavelength and operating current, respectively, if the operating voltage is kept constant. The behavior of the VCSEL in this scenario was investigated for both the near and the far field which offers the potential for different types of measurement applications. First experimental results show a measurable and reproducible change of the operating current when moving the sample by as little as a few nm in vertical direction. This behavior was also verified with a simulation based on ANSYS Lumerical by creating distributed Bragg reflection (DBR) stacks with different layers and quantifying the influence of the movable third resonator surface on the emission wavelength. In the next steps, the new sensor system will be integrated into an inline production chain for additive optics manufacturing to supervise the manufacturing accuracy and realize a feedback loop for the correction of process imperfections.
AB - We report on a novel sensor concept based on a coupled resonator configuration and the employment of vertical-cavity surface-emitting laser (VCSEL) sources. The back reflection of a sample surface next to the emission window of the laser source affects the internal resonator conditions of the VCSEL resulting in a change of the emitted wavelength and operating current, respectively, if the operating voltage is kept constant. The behavior of the VCSEL in this scenario was investigated for both the near and the far field which offers the potential for different types of measurement applications. First experimental results show a measurable and reproducible change of the operating current when moving the sample by as little as a few nm in vertical direction. This behavior was also verified with a simulation based on ANSYS Lumerical by creating distributed Bragg reflection (DBR) stacks with different layers and quantifying the influence of the movable third resonator surface on the emission wavelength. In the next steps, the new sensor system will be integrated into an inline production chain for additive optics manufacturing to supervise the manufacturing accuracy and realize a feedback loop for the correction of process imperfections.
KW - coupled resonator
KW - optical sensing
KW - VCSEL
UR - http://www.scopus.com/inward/record.url?scp=85129859438&partnerID=8YFLogxK
U2 - 10.1117/12.2611352
DO - 10.1117/12.2611352
M3 - Conference contribution
AN - SCOPUS:85129859438
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Vertical-Cavity Surface-Emitting Lasers XXVI
A2 - Lei, Chun
A2 - Choquette, Kent D.
A2 - Graham, Luke A.
PB - SPIE
T2 - Vertical-Cavity Surface-Emitting Lasers XXVI 2022
Y2 - 20 February 2022 through 24 February 2022
ER -