Details
| Original language | English |
|---|---|
| Title of host publication | Vertical-Cavity Surface-Emitting Lasers XXVIII |
| Editors | Chun Lei, Kent D. Choquette |
| Publisher | SPIE |
| Number of pages | 5 |
| ISBN (electronic) | 9781510670686 |
| Publication status | Published - 13 Mar 2024 |
| Event | Vertical-Cavity Surface-Emitting Lasers XXVIII 2024 - San Francisco, United States Duration: 31 Jan 2024 → 1 Feb 2024 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 12904 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
Vertical-cavity surface-emitting lasers (VCSELs) are well established as light sources in integrated photonics or for communication purposes. We investigate the VCSELs for their utilization as highly sensitive topography sensor. The system is based on creating a coupled resonator configuration with the VCSEL as a central element. In this context, the back reflection of a sample surface affects the internal resonator conditions of the VCSEL resulting in a change of the emitted wavelength and operating current, respectively, if the operating voltage is kept constant. Hereby, the signal change is mainly affected by the sample’s reflectivity and the length of the coupled resonator which offers the potential for different types of applications. Our experimental findings show that a measurable and reproducible change of the operating current can be detected when moving the sample by a few nm in vertical direction. The first experiments required additional bulky objective lenses to focus the emitted beam on the sample surface. To avoid such optical elements in the setup we printed a customized lens on the emission window of the VCSEL using a two-photon polymerization systems to realize a stand-alone integrated sensor. We will present our recent experimental and simulation results, show first topography measurements and discuss both possible future application in precision metrology as well as how the capability of the coupled resonator to change the emission wavelength enables a sensing concept without expensive electronic devices by using a glass substrate pre-structured with selective laser etching.
Keywords
- coupled resonator, micro-lens, optical sensing, VCSEL
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- Harvard
- Apa
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- BibTeX
- RIS
Vertical-Cavity Surface-Emitting Lasers XXVIII. ed. / Chun Lei; Kent D. Choquette. SPIE, 2024. 129040E (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12904).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - VCSEL with integrated customized lens as highly sensitive stand-alone sensing element to measure distance changes in the nm-range
AU - Günther, A.
AU - Kotra, P.
AU - Kowalsky, W.
AU - Roth, B.
N1 - Publisher Copyright: © 2024 SPIE.
PY - 2024/3/13
Y1 - 2024/3/13
N2 - Vertical-cavity surface-emitting lasers (VCSELs) are well established as light sources in integrated photonics or for communication purposes. We investigate the VCSELs for their utilization as highly sensitive topography sensor. The system is based on creating a coupled resonator configuration with the VCSEL as a central element. In this context, the back reflection of a sample surface affects the internal resonator conditions of the VCSEL resulting in a change of the emitted wavelength and operating current, respectively, if the operating voltage is kept constant. Hereby, the signal change is mainly affected by the sample’s reflectivity and the length of the coupled resonator which offers the potential for different types of applications. Our experimental findings show that a measurable and reproducible change of the operating current can be detected when moving the sample by a few nm in vertical direction. The first experiments required additional bulky objective lenses to focus the emitted beam on the sample surface. To avoid such optical elements in the setup we printed a customized lens on the emission window of the VCSEL using a two-photon polymerization systems to realize a stand-alone integrated sensor. We will present our recent experimental and simulation results, show first topography measurements and discuss both possible future application in precision metrology as well as how the capability of the coupled resonator to change the emission wavelength enables a sensing concept without expensive electronic devices by using a glass substrate pre-structured with selective laser etching.
AB - Vertical-cavity surface-emitting lasers (VCSELs) are well established as light sources in integrated photonics or for communication purposes. We investigate the VCSELs for their utilization as highly sensitive topography sensor. The system is based on creating a coupled resonator configuration with the VCSEL as a central element. In this context, the back reflection of a sample surface affects the internal resonator conditions of the VCSEL resulting in a change of the emitted wavelength and operating current, respectively, if the operating voltage is kept constant. Hereby, the signal change is mainly affected by the sample’s reflectivity and the length of the coupled resonator which offers the potential for different types of applications. Our experimental findings show that a measurable and reproducible change of the operating current can be detected when moving the sample by a few nm in vertical direction. The first experiments required additional bulky objective lenses to focus the emitted beam on the sample surface. To avoid such optical elements in the setup we printed a customized lens on the emission window of the VCSEL using a two-photon polymerization systems to realize a stand-alone integrated sensor. We will present our recent experimental and simulation results, show first topography measurements and discuss both possible future application in precision metrology as well as how the capability of the coupled resonator to change the emission wavelength enables a sensing concept without expensive electronic devices by using a glass substrate pre-structured with selective laser etching.
KW - coupled resonator
KW - micro-lens
KW - optical sensing
KW - VCSEL
UR - http://www.scopus.com/inward/record.url?scp=85212226145&partnerID=8YFLogxK
U2 - 10.1117/12.3000222
DO - 10.1117/12.3000222
M3 - Conference contribution
AN - SCOPUS:85212226145
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Vertical-Cavity Surface-Emitting Lasers XXVIII
A2 - Lei, Chun
A2 - Choquette, Kent D.
PB - SPIE
T2 - Vertical-Cavity Surface-Emitting Lasers XXVIII 2024
Y2 - 31 January 2024 through 1 February 2024
ER -