Details
| Original language | English |
|---|---|
| Title of host publication | Advances in Optical Interference Coatings |
| Subtitle of host publication | 25 - 27 May 1999, Berlin, Germany |
| Place of Publication | Bellingham |
| Publisher | SPIE |
| Pages | 436-445 |
| Number of pages | 10 |
| ISBN (print) | 0-8194-3212-1 |
| Publication status | Published - 7 Sept 1999 |
| Externally published | Yes |
| Event | 1999 Advances in Optical Interference Coatings - Berlin, Ger Duration: 25 May 1999 → 27 May 1999 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Publisher | SPIE |
| Volume | 3738 |
| ISSN (Print) | 0277-786X |
Abstract
In high quality optical coating systems for the DUV-spectral range, MgF2 is one of the preferred deposition materials. MgF2-coatings exhibit relatively low optical losses as well as high stability and laser induced damage thresholds. In the present joint research effort of several European laboratories, the potentiality of MgF2 is evaluated in respect to the production of improved optical coatings for applications in laser technology and semiconductor lithography. For this purpose, single layers of MgF2 were deposited on superpolished fused silica and CaF2-substrates by ion beam sputtering (IBS, [2]), boat (bPVD) and e-beam (ePVD) evaporation in different laboratories. Besides photometric inspections, the samples were characterized by an optical scatter measurement facility at 193 nm and 633 nm. The structural properties were assessed using AFM, XRD, and adapted TEM-techniques involving conventional thinning methods for the layers. For the measurement of mechanical stress in the coatings, special silicon substrates were coated and analyzed. The optical constants of the MgF2-layers, which were determined by two independent data reduction algorithms from the spectral behaviour, are in good agreement with values published in the open literature: The refractive indices range between 1.40 and 1.41 at 248 nm for the PVD and IBS processes. The IBS-process achieves best homogeneity and lowest surface roughness around 1nmrms among the processes compared. In contrast to PVD coatings, which exhibit tensile mechanical stress ranging approximately from 300 to 400 MPa, high compressive stress of up to 910 MPa occurs in the IBS- coatings. The experimental findings are discussed in respect to the microstructural properties and the surface topography of the coatings.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
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Advances in Optical Interference Coatings: 25 - 27 May 1999, Berlin, Germany. Bellingham: SPIE, 1999. p. 436-445 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 3738).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - UV-optical and microstructural properties of MgF2-coatings deposited by IBS and PVD processes
AU - Ristau, Detlev
AU - Arens, Winfried
AU - Bosch, Salvador
AU - Duparre, Angela
AU - Masetti, Enrico
AU - Jacob, Damien
AU - Kiriakidis, George
AU - Peiro, Francesca
AU - Quesnel, Etienne
AU - Tikhonravov, Alexander
PY - 1999/9/7
Y1 - 1999/9/7
N2 - In high quality optical coating systems for the DUV-spectral range, MgF2 is one of the preferred deposition materials. MgF2-coatings exhibit relatively low optical losses as well as high stability and laser induced damage thresholds. In the present joint research effort of several European laboratories, the potentiality of MgF2 is evaluated in respect to the production of improved optical coatings for applications in laser technology and semiconductor lithography. For this purpose, single layers of MgF2 were deposited on superpolished fused silica and CaF2-substrates by ion beam sputtering (IBS, [2]), boat (bPVD) and e-beam (ePVD) evaporation in different laboratories. Besides photometric inspections, the samples were characterized by an optical scatter measurement facility at 193 nm and 633 nm. The structural properties were assessed using AFM, XRD, and adapted TEM-techniques involving conventional thinning methods for the layers. For the measurement of mechanical stress in the coatings, special silicon substrates were coated and analyzed. The optical constants of the MgF2-layers, which were determined by two independent data reduction algorithms from the spectral behaviour, are in good agreement with values published in the open literature: The refractive indices range between 1.40 and 1.41 at 248 nm for the PVD and IBS processes. The IBS-process achieves best homogeneity and lowest surface roughness around 1nmrms among the processes compared. In contrast to PVD coatings, which exhibit tensile mechanical stress ranging approximately from 300 to 400 MPa, high compressive stress of up to 910 MPa occurs in the IBS- coatings. The experimental findings are discussed in respect to the microstructural properties and the surface topography of the coatings.
AB - In high quality optical coating systems for the DUV-spectral range, MgF2 is one of the preferred deposition materials. MgF2-coatings exhibit relatively low optical losses as well as high stability and laser induced damage thresholds. In the present joint research effort of several European laboratories, the potentiality of MgF2 is evaluated in respect to the production of improved optical coatings for applications in laser technology and semiconductor lithography. For this purpose, single layers of MgF2 were deposited on superpolished fused silica and CaF2-substrates by ion beam sputtering (IBS, [2]), boat (bPVD) and e-beam (ePVD) evaporation in different laboratories. Besides photometric inspections, the samples were characterized by an optical scatter measurement facility at 193 nm and 633 nm. The structural properties were assessed using AFM, XRD, and adapted TEM-techniques involving conventional thinning methods for the layers. For the measurement of mechanical stress in the coatings, special silicon substrates were coated and analyzed. The optical constants of the MgF2-layers, which were determined by two independent data reduction algorithms from the spectral behaviour, are in good agreement with values published in the open literature: The refractive indices range between 1.40 and 1.41 at 248 nm for the PVD and IBS processes. The IBS-process achieves best homogeneity and lowest surface roughness around 1nmrms among the processes compared. In contrast to PVD coatings, which exhibit tensile mechanical stress ranging approximately from 300 to 400 MPa, high compressive stress of up to 910 MPa occurs in the IBS- coatings. The experimental findings are discussed in respect to the microstructural properties and the surface topography of the coatings.
UR - http://www.scopus.com/inward/record.url?scp=0032664670&partnerID=8YFLogxK
U2 - 10.1117/12.360111
DO - 10.1117/12.360111
M3 - Conference contribution
AN - SCOPUS:0032664670
SN - 0-8194-3212-1
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 436
EP - 445
BT - Advances in Optical Interference Coatings
PB - SPIE
CY - Bellingham
T2 - 1999 Advances in Optical Interference Coatings
Y2 - 25 May 1999 through 27 May 1999
ER -