Details
Original language | English |
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Title of host publication | Lecture Notes in Production Engineering |
Publisher | Springer Nature |
Pages | 147-170 |
Number of pages | 24 |
Publication status | Published - 2022 |
Publication series
Name | Lecture Notes in Production Engineering |
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Volume | Part F1161 |
ISSN (Print) | 2194-0525 |
ISSN (electronic) | 2194-0533 |
Abstract
Axis controls of ultra-precision machine tools have to fulfill demanding requirements regarding position and velocity tracking accuracy, disturbance rejection, and avoidance of vibration. Within this project, an axis concept for ultra-precision machining utilizing an electromagnetic linear guide is investigated. The axis concept offers additional, redundant degrees of freedom for error compensation and sensory information for monitoring tasks. It is shown that input shaping and feed forward control of disturbance forces allow for significant improvement in machining performance. To investigate the axis behavior of the multi-axis motion, an external measurement device with sufficient travel range and sub-micron resolution is needed. This task is solved with a novel speckle position sensor that is described in this chapter as well.
ASJC Scopus subject areas
- Engineering(all)
- Industrial and Manufacturing Engineering
- Economics, Econometrics and Finance(all)
- Economics, Econometrics and Finance (miscellaneous)
- Engineering(all)
- Safety, Risk, Reliability and Quality
Cite this
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Lecture Notes in Production Engineering. Springer Nature, 2022. p. 147-170 (Lecture Notes in Production Engineering; Vol. Part F1161).
Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research › peer review
}
TY - CHAP
T1 - Ultra Precision High Performance Axis Control
AU - Schreiber, Per
AU - Hochbein, Johannes
AU - Bergmann, Benjamin
AU - Schenck, Christian
AU - Kuhfuss, Bernd
AU - Denkena, Berend
PY - 2022
Y1 - 2022
N2 - Axis controls of ultra-precision machine tools have to fulfill demanding requirements regarding position and velocity tracking accuracy, disturbance rejection, and avoidance of vibration. Within this project, an axis concept for ultra-precision machining utilizing an electromagnetic linear guide is investigated. The axis concept offers additional, redundant degrees of freedom for error compensation and sensory information for monitoring tasks. It is shown that input shaping and feed forward control of disturbance forces allow for significant improvement in machining performance. To investigate the axis behavior of the multi-axis motion, an external measurement device with sufficient travel range and sub-micron resolution is needed. This task is solved with a novel speckle position sensor that is described in this chapter as well.
AB - Axis controls of ultra-precision machine tools have to fulfill demanding requirements regarding position and velocity tracking accuracy, disturbance rejection, and avoidance of vibration. Within this project, an axis concept for ultra-precision machining utilizing an electromagnetic linear guide is investigated. The axis concept offers additional, redundant degrees of freedom for error compensation and sensory information for monitoring tasks. It is shown that input shaping and feed forward control of disturbance forces allow for significant improvement in machining performance. To investigate the axis behavior of the multi-axis motion, an external measurement device with sufficient travel range and sub-micron resolution is needed. This task is solved with a novel speckle position sensor that is described in this chapter as well.
UR - http://www.scopus.com/inward/record.url?scp=85166638104&partnerID=8YFLogxK
U2 - 10.1007/978-3-030-83765-5_6
DO - 10.1007/978-3-030-83765-5_6
M3 - Contribution to book/anthology
AN - SCOPUS:85166638104
T3 - Lecture Notes in Production Engineering
SP - 147
EP - 170
BT - Lecture Notes in Production Engineering
PB - Springer Nature
ER -