Ultra Precision High Performance Axis Control

Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearchpeer review

Authors

  • Per Schreiber
  • Johannes Hochbein
  • Benjamin Bergmann
  • Christian Schenck
  • Bernd Kuhfuss
  • Berend Denkena

External Research Organisations

  • University of Bremen
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Details

Original languageEnglish
Title of host publicationLecture Notes in Production Engineering
PublisherSpringer Nature
Pages147-170
Number of pages24
Publication statusPublished - 2022

Publication series

NameLecture Notes in Production Engineering
VolumePart F1161
ISSN (Print)2194-0525
ISSN (electronic)2194-0533

Abstract

Axis controls of ultra-precision machine tools have to fulfill demanding requirements regarding position and velocity tracking accuracy, disturbance rejection, and avoidance of vibration. Within this project, an axis concept for ultra-precision machining utilizing an electromagnetic linear guide is investigated. The axis concept offers additional, redundant degrees of freedom for error compensation and sensory information for monitoring tasks. It is shown that input shaping and feed forward control of disturbance forces allow for significant improvement in machining performance. To investigate the axis behavior of the multi-axis motion, an external measurement device with sufficient travel range and sub-micron resolution is needed. This task is solved with a novel speckle position sensor that is described in this chapter as well.

ASJC Scopus subject areas

Cite this

Ultra Precision High Performance Axis Control. / Schreiber, Per; Hochbein, Johannes; Bergmann, Benjamin et al.
Lecture Notes in Production Engineering. Springer Nature, 2022. p. 147-170 (Lecture Notes in Production Engineering; Vol. Part F1161).

Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearchpeer review

Schreiber, P, Hochbein, J, Bergmann, B, Schenck, C, Kuhfuss, B & Denkena, B 2022, Ultra Precision High Performance Axis Control. in Lecture Notes in Production Engineering. Lecture Notes in Production Engineering, vol. Part F1161, Springer Nature, pp. 147-170. https://doi.org/10.1007/978-3-030-83765-5_6
Schreiber, P., Hochbein, J., Bergmann, B., Schenck, C., Kuhfuss, B., & Denkena, B. (2022). Ultra Precision High Performance Axis Control. In Lecture Notes in Production Engineering (pp. 147-170). (Lecture Notes in Production Engineering; Vol. Part F1161). Springer Nature. https://doi.org/10.1007/978-3-030-83765-5_6
Schreiber P, Hochbein J, Bergmann B, Schenck C, Kuhfuss B, Denkena B. Ultra Precision High Performance Axis Control. In Lecture Notes in Production Engineering. Springer Nature. 2022. p. 147-170. (Lecture Notes in Production Engineering). Epub 2021 Sept 21. doi: 10.1007/978-3-030-83765-5_6
Schreiber, Per ; Hochbein, Johannes ; Bergmann, Benjamin et al. / Ultra Precision High Performance Axis Control. Lecture Notes in Production Engineering. Springer Nature, 2022. pp. 147-170 (Lecture Notes in Production Engineering).
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