Details
| Original language | English |
|---|---|
| Pages (from-to) | 2166-2172 |
| Number of pages | 7 |
| Journal | Physics of the solid state |
| Volume | 56 |
| Issue number | 11 |
| Publication status | Published - 6 Nov 2014 |
| Externally published | Yes |
Abstract
The modes of laser lithography fabrication of three-dimensional submicrometer structures have been studied. The method is based on the effect of threshold two-photon polymerization of a photosensitive material at the laser beam focus. To determine the lithograph workspace in the coordinates “laser power-speed of the sample displacement with respect to the laser focus,” a series of photonic crystals with the woodpile structure is prepared. Two methods for fabricating three-dimensional structures, i.e., raster scanning and vector graphics (or the vector method) are analyzed in detail. The advantages of the vector method for fabricating periodic structures are demonstrated using crystals of inverted yablonovite as an example. The prepared samples are studied by scanning electron microscopy.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
Cite this
- Standard
- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
In: Physics of the solid state, Vol. 56, No. 11, 06.11.2014, p. 2166-2172.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Two Modes of Laser Lithography Fabrication of Three-Dimensional Submicrometer Structures
AU - Shishkin, I. I.
AU - Samusev, K. B.
AU - Rybin, M. V.
AU - Limonov, M. F.
AU - Kiyan, R. V.
AU - Chichkov, B. N.
AU - Kivshar’, Yu S.
AU - Belov, P. A.
N1 - Funding information: This study was supported by the Government of the Russian Federation (project no. 074 U01) and the Russian Foundation for Basic Research (project no. 13 02 00186).
PY - 2014/11/6
Y1 - 2014/11/6
N2 - The modes of laser lithography fabrication of three-dimensional submicrometer structures have been studied. The method is based on the effect of threshold two-photon polymerization of a photosensitive material at the laser beam focus. To determine the lithograph workspace in the coordinates “laser power-speed of the sample displacement with respect to the laser focus,” a series of photonic crystals with the woodpile structure is prepared. Two methods for fabricating three-dimensional structures, i.e., raster scanning and vector graphics (or the vector method) are analyzed in detail. The advantages of the vector method for fabricating periodic structures are demonstrated using crystals of inverted yablonovite as an example. The prepared samples are studied by scanning electron microscopy.
AB - The modes of laser lithography fabrication of three-dimensional submicrometer structures have been studied. The method is based on the effect of threshold two-photon polymerization of a photosensitive material at the laser beam focus. To determine the lithograph workspace in the coordinates “laser power-speed of the sample displacement with respect to the laser focus,” a series of photonic crystals with the woodpile structure is prepared. Two methods for fabricating three-dimensional structures, i.e., raster scanning and vector graphics (or the vector method) are analyzed in detail. The advantages of the vector method for fabricating periodic structures are demonstrated using crystals of inverted yablonovite as an example. The prepared samples are studied by scanning electron microscopy.
UR - http://www.scopus.com/inward/record.url?scp=84920197363&partnerID=8YFLogxK
U2 - 10.1134/s1063783414110262
DO - 10.1134/s1063783414110262
M3 - Article
AN - SCOPUS:84920197363
VL - 56
SP - 2166
EP - 2172
JO - Physics of the solid state
JF - Physics of the solid state
SN - 1063-7834
IS - 11
ER -