Details
| Original language | English |
|---|---|
| Title of host publication | MOEMS and Miniaturized Systems XVII |
| Editors | Yong-Hwa Park, Hans Zappe, Wibool Piyawattanametha |
| Publisher | SPIE |
| Number of pages | 13 |
| ISBN (electronic) | 9781510615755 |
| Publication status | Published - 22 Feb 2018 |
| Event | MOEMS and Miniaturized Systems XVII 2018 - San Francisco, United States Duration: 30 Jan 2018 → 31 Jan 2018 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 10545 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
Highly-functional photonic sensor networks integrated in thin polymer foils offer great potential for versatile applications in the life sciences, medicine, environmental analytics or production technology. For their realization, suitable low-cost and high-throughput production techniques need to be developed. Here, we describe work towards this goal, i.e. the fabrication of multimode polymer waveguides through a combination of thermal imprint and doctor blading. For imprint master stamp fabrication, a combined Bosch and O2 plasma etching process in silicon is utilized. We also demonstrate stamp fabrication by an additive manufacturing method, i.e. by employing maskless UV lithography, to enhance the flexibility and cost-effectiveness of our approach. We, thus, realize various all-polymer waveguide arrays, beam splitters, and grating couplers which serve as basic elements to create more complex photonic circuits. We also demonstrate polymer based transmission lines comprising semiconductor as well as organic light sources and detectors. We discuss both the integration of semiconductor light sources and detectors such as verticalcavity surface-emitting lasers (VCSEL) and photo detectors as well as organic light emitting diodes (OLEDs) and organic photo detectors. In first applications, we combine these elements to create sensor arrays for measuring temperature, strain or refractive index. We show results of various sensor types utilizing different measurement principles implemented in laboratory environments so far. For example, a waveguide array containing a linear discontinuity which serves as elongation zone for displacement, strain or tilt measurement by detecting the intensity variation of the transmitted light propagating inside the structure is presented. In future, we plan to create more powerful sensor photonics networks for reliable and robust applications in real life, e.g. for point-of-care testing or production monitoring.
Keywords
- Hot embossing, integrated photonics, optical interconnects, optical micro-structures, polymer optics, polymer waveguide-arrays
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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MOEMS and Miniaturized Systems XVII. ed. / Yong-Hwa Park; Hans Zappe; Wibool Piyawattanametha. SPIE, 2018. 1054502 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10545).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Towards fabrication and application of polymer based photonics networks and sensors
AU - Rahlves, Maik
AU - Rezem, Maher
AU - Günther, Axel
AU - Kelb, Christian
AU - Khan, Muhammad
AU - Reithmeier, Eduard
AU - Roth, Bernhard
N1 - Funding information: This work was funded by the German Research Foundation (DFG) in the framework of the collaborative research center TRR 123 “PlanOS”.
PY - 2018/2/22
Y1 - 2018/2/22
N2 - Highly-functional photonic sensor networks integrated in thin polymer foils offer great potential for versatile applications in the life sciences, medicine, environmental analytics or production technology. For their realization, suitable low-cost and high-throughput production techniques need to be developed. Here, we describe work towards this goal, i.e. the fabrication of multimode polymer waveguides through a combination of thermal imprint and doctor blading. For imprint master stamp fabrication, a combined Bosch and O2 plasma etching process in silicon is utilized. We also demonstrate stamp fabrication by an additive manufacturing method, i.e. by employing maskless UV lithography, to enhance the flexibility and cost-effectiveness of our approach. We, thus, realize various all-polymer waveguide arrays, beam splitters, and grating couplers which serve as basic elements to create more complex photonic circuits. We also demonstrate polymer based transmission lines comprising semiconductor as well as organic light sources and detectors. We discuss both the integration of semiconductor light sources and detectors such as verticalcavity surface-emitting lasers (VCSEL) and photo detectors as well as organic light emitting diodes (OLEDs) and organic photo detectors. In first applications, we combine these elements to create sensor arrays for measuring temperature, strain or refractive index. We show results of various sensor types utilizing different measurement principles implemented in laboratory environments so far. For example, a waveguide array containing a linear discontinuity which serves as elongation zone for displacement, strain or tilt measurement by detecting the intensity variation of the transmitted light propagating inside the structure is presented. In future, we plan to create more powerful sensor photonics networks for reliable and robust applications in real life, e.g. for point-of-care testing or production monitoring.
AB - Highly-functional photonic sensor networks integrated in thin polymer foils offer great potential for versatile applications in the life sciences, medicine, environmental analytics or production technology. For their realization, suitable low-cost and high-throughput production techniques need to be developed. Here, we describe work towards this goal, i.e. the fabrication of multimode polymer waveguides through a combination of thermal imprint and doctor blading. For imprint master stamp fabrication, a combined Bosch and O2 plasma etching process in silicon is utilized. We also demonstrate stamp fabrication by an additive manufacturing method, i.e. by employing maskless UV lithography, to enhance the flexibility and cost-effectiveness of our approach. We, thus, realize various all-polymer waveguide arrays, beam splitters, and grating couplers which serve as basic elements to create more complex photonic circuits. We also demonstrate polymer based transmission lines comprising semiconductor as well as organic light sources and detectors. We discuss both the integration of semiconductor light sources and detectors such as verticalcavity surface-emitting lasers (VCSEL) and photo detectors as well as organic light emitting diodes (OLEDs) and organic photo detectors. In first applications, we combine these elements to create sensor arrays for measuring temperature, strain or refractive index. We show results of various sensor types utilizing different measurement principles implemented in laboratory environments so far. For example, a waveguide array containing a linear discontinuity which serves as elongation zone for displacement, strain or tilt measurement by detecting the intensity variation of the transmitted light propagating inside the structure is presented. In future, we plan to create more powerful sensor photonics networks for reliable and robust applications in real life, e.g. for point-of-care testing or production monitoring.
KW - Hot embossing
KW - integrated photonics
KW - optical interconnects
KW - optical micro-structures
KW - polymer optics
KW - polymer waveguide-arrays
UR - http://www.scopus.com/inward/record.url?scp=85049532985&partnerID=8YFLogxK
U2 - 10.1117/12.2300311
DO - 10.1117/12.2300311
M3 - Conference contribution
AN - SCOPUS:85049532985
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - MOEMS and Miniaturized Systems XVII
A2 - Park, Yong-Hwa
A2 - Zappe, Hans
A2 - Piyawattanametha, Wibool
PB - SPIE
T2 - MOEMS and Miniaturized Systems XVII 2018
Y2 - 30 January 2018 through 31 January 2018
ER -