Towards a Highly Sensitive Piezoelectric Nano-Mass Detection: A Model-Based Concept Study

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Original languageEnglish
Article number2533
Number of pages15
JournalSensors
Volume21
Issue number7
Publication statusPublished - 4 Apr 2021

Abstract

The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established.

Keywords

    Co-resonance, Inertial balance, N/MEMS, Nano-mass detection, Nano/micro-electro-mechanical-system, Piezoelectric sensors, Resonance systems

ASJC Scopus subject areas

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Towards a Highly Sensitive Piezoelectric Nano-Mass Detection: A Model-Based Concept Study. / Twiefel, Jens; Glukhovskoy, Anatoly; de Wall, Sascha et al.
In: Sensors, Vol. 21, No. 7, 2533, 04.04.2021.

Research output: Contribution to journalArticleResearchpeer review

Twiefel J, Glukhovskoy A, de Wall S, Wurz MC, Sehlmeyer M, Hitzemann M et al. Towards a Highly Sensitive Piezoelectric Nano-Mass Detection: A Model-Based Concept Study. Sensors. 2021 Apr 4;21(7):2533. doi: 10.3390/s21072533, 10.15488/11208
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abstract = "The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established.",
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AU - Twiefel, Jens

AU - Glukhovskoy, Anatoly

AU - de Wall, Sascha

AU - Wurz, Marc Christopher

AU - Sehlmeyer, Merle

AU - Hitzemann, Moritz

AU - Zimmermann, Stefan

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