Details
| Original language | English |
|---|---|
| Title of host publication | Laser-Induced Damage in Optical Materials: 1998 |
| Subtitle of host publication | proceedings |
| Place of Publication | Bellingham |
| Publisher | SPIE |
| Pages | 544-554 |
| Number of pages | 11 |
| Publication status | Published - 7 Apr 1999 |
| Externally published | Yes |
| Event | 1998 30th Annual Boulder Damage Symposium on Optical Materials for High-Power Lasers - 1998 - Boulder, CO, USA Duration: 28 Sept 1998 → 1 Oct 1998 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Publisher | SPIE |
| Volume | 3578 |
| ISSN (Print) | 0277-786X |
Abstract
Light scattering of optical laser components gains in importance for the short wavelength range. A standard procedure for the measurement of `total scattering' is described in the Draft International Standard ISO/DIS 13696, which is based on integration or collection of the scattered radiation. Meanwhile the measurement concepts have qualified for the VIS- and NIR-spectral region, investigations are necessary for an application of the standard procedure in the DUV/VUV. In this work the optical properties of selected diffuse reflective materials (PTFE, BaSO4, ceramics) are studied in the DUV/VUV spectral region (120 nm-220 nm). For the determination of the angle resolved scattering and the relative spectral reflectance of the samples, a commercial vacuum spectrophotometer is employed. Some of the samples exhibit a cosine angle distribution for the scattered light at 193 nm and 157 nm and can be used as calibration targets. Total scatter values of different thin film samples were measured at 193 nm by using these qualified calibration targets.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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Laser-Induced Damage in Optical Materials: 1998: proceedings. Bellingham: SPIE, 1999. p. 544-554 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 3578).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Total scatter measurements in the DUV/VUV
AU - Kadkhoda, Puja
AU - Ristau, Detlev
AU - von Alvensleben, Ferdinand
PY - 1999/4/7
Y1 - 1999/4/7
N2 - Light scattering of optical laser components gains in importance for the short wavelength range. A standard procedure for the measurement of `total scattering' is described in the Draft International Standard ISO/DIS 13696, which is based on integration or collection of the scattered radiation. Meanwhile the measurement concepts have qualified for the VIS- and NIR-spectral region, investigations are necessary for an application of the standard procedure in the DUV/VUV. In this work the optical properties of selected diffuse reflective materials (PTFE, BaSO4, ceramics) are studied in the DUV/VUV spectral region (120 nm-220 nm). For the determination of the angle resolved scattering and the relative spectral reflectance of the samples, a commercial vacuum spectrophotometer is employed. Some of the samples exhibit a cosine angle distribution for the scattered light at 193 nm and 157 nm and can be used as calibration targets. Total scatter values of different thin film samples were measured at 193 nm by using these qualified calibration targets.
AB - Light scattering of optical laser components gains in importance for the short wavelength range. A standard procedure for the measurement of `total scattering' is described in the Draft International Standard ISO/DIS 13696, which is based on integration or collection of the scattered radiation. Meanwhile the measurement concepts have qualified for the VIS- and NIR-spectral region, investigations are necessary for an application of the standard procedure in the DUV/VUV. In this work the optical properties of selected diffuse reflective materials (PTFE, BaSO4, ceramics) are studied in the DUV/VUV spectral region (120 nm-220 nm). For the determination of the angle resolved scattering and the relative spectral reflectance of the samples, a commercial vacuum spectrophotometer is employed. Some of the samples exhibit a cosine angle distribution for the scattered light at 193 nm and 157 nm and can be used as calibration targets. Total scatter values of different thin film samples were measured at 193 nm by using these qualified calibration targets.
UR - http://www.scopus.com/inward/record.url?scp=0032668543&partnerID=8YFLogxK
U2 - 10.1117/12.344390
DO - 10.1117/12.344390
M3 - Conference contribution
AN - SCOPUS:0032668543
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 544
EP - 554
BT - Laser-Induced Damage in Optical Materials: 1998
PB - SPIE
CY - Bellingham
T2 - 1998 30th Annual Boulder Damage Symposium on Optical Materials for High-Power Lasers - 1998
Y2 - 28 September 1998 through 1 October 1998
ER -