Details
| Original language | English |
|---|---|
| Title of host publication | Scanning Microscopies 2014 |
| Editors | S. Frank Platek, Michael T. Postek, Tim K. Maugel, Dale E. Newbury |
| Publisher | SPIE |
| Number of pages | 13 |
| ISBN (electronic) | 9781628412994 |
| Publication status | Published - 16 Sept 2014 |
| Event | Scanning Microscopies 2014 - Monterey, United States Duration: 16 Sept 2014 → 18 Sept 2014 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 9236 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
This paper gives an overview of the possible methods for a three-dimensional surface acquisition in the micrometer scale. It is pointed out that Scanning Electron Microscopy is a capable method for measurement tasks of this kind; therefore, it presents possible ways for implementing this technique in a three-dimensional surface reconstruction. The improved photometric method promises the best performance; its further implementation is developed and explained. Therefore, some modifications of the employed Scanning Electron Microscope (SEM) are described, for instance, the integration of two supplemental detectors, a modified collector grid and a gun shielding. All modifications were evaluated using FEM-Simulations before their implementation. A signal mixing is introduced in order to still be able to use the improved photometric method with four detectors in spite of the fact that it was designed for a two-detector system. For verification purposes, a sphere normal is measured by means of the modified system. It can be seen that the maximal detectable slope angle could be increased compared to the old photometric method. In addition, we introduce an electron trap consisting of nano structured titanium. The structure is tested regarding its ability to catch electrons of different energies and compared to non-structured titanium. The trap can later be implemented on the bottom of the electron gun to catch unwanted backscattered electron (BSE) emission which could otherwise affect the three-dimensional reconstruction.
Keywords
- 3D Reconstruction, Electron Trap, FEM Simulations, Photometric Method, Scanning Electron Microscopy
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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Scanning Microscopies 2014. ed. / S. Frank Platek; Michael T. Postek; Tim K. Maugel; Dale E. Newbury. SPIE, 2014. 923609 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9236).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Three dimensional surface reconstruction using scanning electron microscopy and the design of a nanostructured electron trap
AU - Scheuer, Renke
AU - Reithmeier, Eduard
PY - 2014/9/16
Y1 - 2014/9/16
N2 - This paper gives an overview of the possible methods for a three-dimensional surface acquisition in the micrometer scale. It is pointed out that Scanning Electron Microscopy is a capable method for measurement tasks of this kind; therefore, it presents possible ways for implementing this technique in a three-dimensional surface reconstruction. The improved photometric method promises the best performance; its further implementation is developed and explained. Therefore, some modifications of the employed Scanning Electron Microscope (SEM) are described, for instance, the integration of two supplemental detectors, a modified collector grid and a gun shielding. All modifications were evaluated using FEM-Simulations before their implementation. A signal mixing is introduced in order to still be able to use the improved photometric method with four detectors in spite of the fact that it was designed for a two-detector system. For verification purposes, a sphere normal is measured by means of the modified system. It can be seen that the maximal detectable slope angle could be increased compared to the old photometric method. In addition, we introduce an electron trap consisting of nano structured titanium. The structure is tested regarding its ability to catch electrons of different energies and compared to non-structured titanium. The trap can later be implemented on the bottom of the electron gun to catch unwanted backscattered electron (BSE) emission which could otherwise affect the three-dimensional reconstruction.
AB - This paper gives an overview of the possible methods for a three-dimensional surface acquisition in the micrometer scale. It is pointed out that Scanning Electron Microscopy is a capable method for measurement tasks of this kind; therefore, it presents possible ways for implementing this technique in a three-dimensional surface reconstruction. The improved photometric method promises the best performance; its further implementation is developed and explained. Therefore, some modifications of the employed Scanning Electron Microscope (SEM) are described, for instance, the integration of two supplemental detectors, a modified collector grid and a gun shielding. All modifications were evaluated using FEM-Simulations before their implementation. A signal mixing is introduced in order to still be able to use the improved photometric method with four detectors in spite of the fact that it was designed for a two-detector system. For verification purposes, a sphere normal is measured by means of the modified system. It can be seen that the maximal detectable slope angle could be increased compared to the old photometric method. In addition, we introduce an electron trap consisting of nano structured titanium. The structure is tested regarding its ability to catch electrons of different energies and compared to non-structured titanium. The trap can later be implemented on the bottom of the electron gun to catch unwanted backscattered electron (BSE) emission which could otherwise affect the three-dimensional reconstruction.
KW - 3D Reconstruction
KW - Electron Trap
KW - FEM Simulations
KW - Photometric Method
KW - Scanning Electron Microscopy
UR - http://www.scopus.com/inward/record.url?scp=84923059753&partnerID=8YFLogxK
U2 - 10.1117/12.2074830
DO - 10.1117/12.2074830
M3 - Conference contribution
AN - SCOPUS:84923059753
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Scanning Microscopies 2014
A2 - Platek, S. Frank
A2 - Postek, Michael T.
A2 - Maugel, Tim K.
A2 - Newbury, Dale E.
PB - SPIE
T2 - Scanning Microscopies 2014
Y2 - 16 September 2014 through 18 September 2014
ER -