Details
| Original language | English |
|---|---|
| Pages (from-to) | 410-419 |
| Number of pages | 10 |
| Journal | Technisches Messen |
| Volume | 85 |
| Issue number | 6 |
| Publication status | Published - 1 Jun 2018 |
| Externally published | Yes |
Abstract
Dynamic cantilever sensors have many applications, for example in material's research, biology, as gas and magnetic field sensors. The sensing principle is based on the effect that a force gradient or mass change applied to the cantilever alter its oscillatory state which can be related to the parameter of interest. In order to detect very small interactions, the cantilever needs to have a low stiffness which is commonly achieved by a reduction of the beam's dimensions, especially its thickness. However, this is limited by the commonly employed laser-based detection of the cantilever's oscillatory state. In this paper, we describe a novel co-resonant cantilever sensor concept which is based on the coupling and eigenfrequency matching of a micro- and a nanocantilever. This approach allows to access a large fraction of the nanocantilever's high sensitivity while ensuring a reliable oscillation detection with standard laser-based methods at the microcantilever. Experiments in cantilever magnetometry and magnetic force microscopy demonstrate the immense potential of the sensor concept. Furthermore, applications are not limited to material's research, instead this concept creates a cantilever sensor platform with many potential applications, for example as gas, mass or pressure sensors.
Keywords
- cantilever magnetometry, Cantilever sensor, coresonant coupling, magnetic force microscopy, MEMS/NEMS system, sensitivity enhancement
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Instrumentation
- Engineering(all)
- Electrical and Electronic Engineering
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In: Technisches Messen, Vol. 85, No. 6, 01.06.2018, p. 410-419.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Theory and application of a novel co-resonant cantilever sensor
AU - Körner, Julia
AU - Reiche, Christopher F.
AU - Büchner, Bernd
AU - Mühl, Thomas
N1 - Funding information: Funding: Funding for this project was provided by DFG grants MU1794/2-3 and KO5508/1-1.
PY - 2018/6/1
Y1 - 2018/6/1
N2 - Dynamic cantilever sensors have many applications, for example in material's research, biology, as gas and magnetic field sensors. The sensing principle is based on the effect that a force gradient or mass change applied to the cantilever alter its oscillatory state which can be related to the parameter of interest. In order to detect very small interactions, the cantilever needs to have a low stiffness which is commonly achieved by a reduction of the beam's dimensions, especially its thickness. However, this is limited by the commonly employed laser-based detection of the cantilever's oscillatory state. In this paper, we describe a novel co-resonant cantilever sensor concept which is based on the coupling and eigenfrequency matching of a micro- and a nanocantilever. This approach allows to access a large fraction of the nanocantilever's high sensitivity while ensuring a reliable oscillation detection with standard laser-based methods at the microcantilever. Experiments in cantilever magnetometry and magnetic force microscopy demonstrate the immense potential of the sensor concept. Furthermore, applications are not limited to material's research, instead this concept creates a cantilever sensor platform with many potential applications, for example as gas, mass or pressure sensors.
AB - Dynamic cantilever sensors have many applications, for example in material's research, biology, as gas and magnetic field sensors. The sensing principle is based on the effect that a force gradient or mass change applied to the cantilever alter its oscillatory state which can be related to the parameter of interest. In order to detect very small interactions, the cantilever needs to have a low stiffness which is commonly achieved by a reduction of the beam's dimensions, especially its thickness. However, this is limited by the commonly employed laser-based detection of the cantilever's oscillatory state. In this paper, we describe a novel co-resonant cantilever sensor concept which is based on the coupling and eigenfrequency matching of a micro- and a nanocantilever. This approach allows to access a large fraction of the nanocantilever's high sensitivity while ensuring a reliable oscillation detection with standard laser-based methods at the microcantilever. Experiments in cantilever magnetometry and magnetic force microscopy demonstrate the immense potential of the sensor concept. Furthermore, applications are not limited to material's research, instead this concept creates a cantilever sensor platform with many potential applications, for example as gas, mass or pressure sensors.
KW - cantilever magnetometry
KW - Cantilever sensor
KW - coresonant coupling
KW - magnetic force microscopy
KW - MEMS/NEMS system
KW - sensitivity enhancement
UR - http://www.scopus.com/inward/record.url?scp=85046081123&partnerID=8YFLogxK
U2 - 10.1515/teme-2017-0139
DO - 10.1515/teme-2017-0139
M3 - Article
AN - SCOPUS:85046081123
VL - 85
SP - 410
EP - 419
JO - Technisches Messen
JF - Technisches Messen
SN - 0171-8096
IS - 6
ER -