The role of film interfaces in near-ultraviolet absorption and pulsed-laser damage in ion-beam-sputtered coatings based on HfO2/SiO2 thin-film pairs

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Authors

  • S. Papernov
  • A. A. Kozlov
  • J. B. Oliver
  • C. Smith
  • L. Jensen
  • Detlev Ristau
  • Stefan Gunster
  • H. Madebach

External Research Organisations

  • University of Rochester
  • Laser Zentrum Hannover e.V. (LZH)
View graph of relations

Details

Original languageEnglish
Title of host publication47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials
Subtitle of host publication2015
PublisherSPIE
ISBN (electronic)9781628418323
Publication statusPublished - 23 Nov 2015
Externally publishedYes
Event47th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2015 - Boulder, United States
Duration: 27 Sept 201530 Sept 2015

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9632
ISSN (Print)0277-786X
ISSN (electronic)1996-756X

Abstract

The role of thin-film interfaces in the near-ultraviolet absorption and pulsed-laser-induced damage was studied for ion-beam-sputtered coatings comprised of HfO2 and SiO2 thin-film pairs. To separate contributions from the bulk of the film and from interfacial areas, absorption and damage threshold were measured for a one-wave (355-nm)-thick HfO2 single-layer film and for a film containing seven narrow HfO2 layers separated by SiO2 layers. The seven-layer film was designed to have a total optical thickness of HfO2 layers equal to one wave at 355 nm and an E-field peak and average intensity similar to a single-layer HfO2 film. Absorption in both types of films was measured using laser calorimetry and photothermal heterodyne imaging. The results showed a small contribution to total absorption from thinfilm interfaces, as compared to HfO2 film material. The relevance of obtained absorption data to coating near-ultraviolet, nanosecond-pulse laser damage was verified by measuring the damage threshold and characterizing damage morphology. The results of this study revealed a higher damage resistance in the seven-layer coating as compared to the single-layer HfO2 film, in agreement with data recently reported for similarly designed electron-beam-deposited coatings. The results are explained through the similarity of interfacial film structure and structure formed during the co-deposition of HfO2 and SiO2 materials.

Keywords

    absorption, interfaces, laser damage, Thin films

ASJC Scopus subject areas

Cite this

The role of film interfaces in near-ultraviolet absorption and pulsed-laser damage in ion-beam-sputtered coatings based on HfO2/SiO2 thin-film pairs. / Papernov, S.; Kozlov, A. A.; Oliver, J. B. et al.
47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2015. SPIE, 2015. 96320B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9632).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Papernov, S, Kozlov, AA, Oliver, JB, Smith, C, Jensen, L, Ristau, D, Gunster, S & Madebach, H 2015, The role of film interfaces in near-ultraviolet absorption and pulsed-laser damage in ion-beam-sputtered coatings based on HfO2/SiO2 thin-film pairs. in 47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2015., 96320B, Proceedings of SPIE - The International Society for Optical Engineering, vol. 9632, SPIE, 47th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2015, Boulder, United States, 27 Sept 2015. https://doi.org/10.1117/12.2196654
Papernov, S., Kozlov, A. A., Oliver, J. B., Smith, C., Jensen, L., Ristau, D., Gunster, S., & Madebach, H. (2015). The role of film interfaces in near-ultraviolet absorption and pulsed-laser damage in ion-beam-sputtered coatings based on HfO2/SiO2 thin-film pairs. In 47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2015 Article 96320B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9632). SPIE. https://doi.org/10.1117/12.2196654
Papernov S, Kozlov AA, Oliver JB, Smith C, Jensen L, Ristau D et al. The role of film interfaces in near-ultraviolet absorption and pulsed-laser damage in ion-beam-sputtered coatings based on HfO2/SiO2 thin-film pairs. In 47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2015. SPIE. 2015. 96320B. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2196654
Papernov, S. ; Kozlov, A. A. ; Oliver, J. B. et al. / The role of film interfaces in near-ultraviolet absorption and pulsed-laser damage in ion-beam-sputtered coatings based on HfO2/SiO2 thin-film pairs. 47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2015. SPIE, 2015. (Proceedings of SPIE - The International Society for Optical Engineering).
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@inproceedings{a9a978b5e73c45b5b24421595719356d,
title = "The role of film interfaces in near-ultraviolet absorption and pulsed-laser damage in ion-beam-sputtered coatings based on HfO2/SiO2 thin-film pairs",
abstract = "The role of thin-film interfaces in the near-ultraviolet absorption and pulsed-laser-induced damage was studied for ion-beam-sputtered coatings comprised of HfO2 and SiO2 thin-film pairs. To separate contributions from the bulk of the film and from interfacial areas, absorption and damage threshold were measured for a one-wave (355-nm)-thick HfO2 single-layer film and for a film containing seven narrow HfO2 layers separated by SiO2 layers. The seven-layer film was designed to have a total optical thickness of HfO2 layers equal to one wave at 355 nm and an E-field peak and average intensity similar to a single-layer HfO2 film. Absorption in both types of films was measured using laser calorimetry and photothermal heterodyne imaging. The results showed a small contribution to total absorption from thinfilm interfaces, as compared to HfO2 film material. The relevance of obtained absorption data to coating near-ultraviolet, nanosecond-pulse laser damage was verified by measuring the damage threshold and characterizing damage morphology. The results of this study revealed a higher damage resistance in the seven-layer coating as compared to the single-layer HfO2 film, in agreement with data recently reported for similarly designed electron-beam-deposited coatings. The results are explained through the similarity of interfacial film structure and structure formed during the co-deposition of HfO2 and SiO2 materials.",
keywords = "absorption, interfaces, laser damage, Thin films",
author = "S. Papernov and Kozlov, {A. A.} and Oliver, {J. B.} and C. Smith and L. Jensen and Detlev Ristau and Stefan Gunster and H. Madebach",
note = "Funding information: This material is based upon work supported by the Department of Energy National Nuclear Security Administration under Award Number DE-NA0001944, the University of Rochester, and the New York State Energy Research and Development Authority. This work is also supported by the German Federal Ministry of Education & Research within Ultra-Life project under contract # 13N11558. The support of DOE does not constitute an endorsement by DOE of the views expressed in this article. This material is based upon work supported by the Department of Energy National Nuclear Security Administration under Award Number DE-NA0001944, the University of Rochester, and the New York State Energy Research and Development Authority. This work is also supported by the German Federal Ministry of Education and Research within Ultra-Life project under contract # 13N11558. The support of DOE does not constitute an endorsement by DOE of the views expressed in this article.; 47th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2015 ; Conference date: 27-09-2015 Through 30-09-2015",
year = "2015",
month = nov,
day = "23",
doi = "10.1117/12.2196654",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
booktitle = "47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials",
address = "United States",

}

Download

TY - GEN

T1 - The role of film interfaces in near-ultraviolet absorption and pulsed-laser damage in ion-beam-sputtered coatings based on HfO2/SiO2 thin-film pairs

AU - Papernov, S.

AU - Kozlov, A. A.

AU - Oliver, J. B.

AU - Smith, C.

AU - Jensen, L.

AU - Ristau, Detlev

AU - Gunster, Stefan

AU - Madebach, H.

N1 - Funding information: This material is based upon work supported by the Department of Energy National Nuclear Security Administration under Award Number DE-NA0001944, the University of Rochester, and the New York State Energy Research and Development Authority. This work is also supported by the German Federal Ministry of Education & Research within Ultra-Life project under contract # 13N11558. The support of DOE does not constitute an endorsement by DOE of the views expressed in this article. This material is based upon work supported by the Department of Energy National Nuclear Security Administration under Award Number DE-NA0001944, the University of Rochester, and the New York State Energy Research and Development Authority. This work is also supported by the German Federal Ministry of Education and Research within Ultra-Life project under contract # 13N11558. The support of DOE does not constitute an endorsement by DOE of the views expressed in this article.

PY - 2015/11/23

Y1 - 2015/11/23

N2 - The role of thin-film interfaces in the near-ultraviolet absorption and pulsed-laser-induced damage was studied for ion-beam-sputtered coatings comprised of HfO2 and SiO2 thin-film pairs. To separate contributions from the bulk of the film and from interfacial areas, absorption and damage threshold were measured for a one-wave (355-nm)-thick HfO2 single-layer film and for a film containing seven narrow HfO2 layers separated by SiO2 layers. The seven-layer film was designed to have a total optical thickness of HfO2 layers equal to one wave at 355 nm and an E-field peak and average intensity similar to a single-layer HfO2 film. Absorption in both types of films was measured using laser calorimetry and photothermal heterodyne imaging. The results showed a small contribution to total absorption from thinfilm interfaces, as compared to HfO2 film material. The relevance of obtained absorption data to coating near-ultraviolet, nanosecond-pulse laser damage was verified by measuring the damage threshold and characterizing damage morphology. The results of this study revealed a higher damage resistance in the seven-layer coating as compared to the single-layer HfO2 film, in agreement with data recently reported for similarly designed electron-beam-deposited coatings. The results are explained through the similarity of interfacial film structure and structure formed during the co-deposition of HfO2 and SiO2 materials.

AB - The role of thin-film interfaces in the near-ultraviolet absorption and pulsed-laser-induced damage was studied for ion-beam-sputtered coatings comprised of HfO2 and SiO2 thin-film pairs. To separate contributions from the bulk of the film and from interfacial areas, absorption and damage threshold were measured for a one-wave (355-nm)-thick HfO2 single-layer film and for a film containing seven narrow HfO2 layers separated by SiO2 layers. The seven-layer film was designed to have a total optical thickness of HfO2 layers equal to one wave at 355 nm and an E-field peak and average intensity similar to a single-layer HfO2 film. Absorption in both types of films was measured using laser calorimetry and photothermal heterodyne imaging. The results showed a small contribution to total absorption from thinfilm interfaces, as compared to HfO2 film material. The relevance of obtained absorption data to coating near-ultraviolet, nanosecond-pulse laser damage was verified by measuring the damage threshold and characterizing damage morphology. The results of this study revealed a higher damage resistance in the seven-layer coating as compared to the single-layer HfO2 film, in agreement with data recently reported for similarly designed electron-beam-deposited coatings. The results are explained through the similarity of interfacial film structure and structure formed during the co-deposition of HfO2 and SiO2 materials.

KW - absorption

KW - interfaces

KW - laser damage

KW - Thin films

UR - http://www.scopus.com/inward/record.url?scp=84964959799&partnerID=8YFLogxK

U2 - 10.1117/12.2196654

DO - 10.1117/12.2196654

M3 - Conference contribution

AN - SCOPUS:84964959799

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - 47th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials

PB - SPIE

T2 - 47th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2015

Y2 - 27 September 2015 through 30 September 2015

ER -