Details
| Original language | English |
|---|---|
| Pages (from-to) | 91-98 |
| Number of pages | 8 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 688 |
| Publication status | Published - 9 Apr 1987 |
| Externally published | Yes |
| Event | 30th Annual Technical Symposium - San Diego , United States Duration: 1 Aug 1986 → 3 Aug 1986 |
Abstract
Recent advances in the development of lasers at soft x-ray wavelengths has spurred increasing interest in the production of cavity components using multilayer technology. We have established a comprehensive capability to design, fabricate, and characterize multilayer x-ray optics directed towards the goal of building the first x-ray laser cavity.1 High quality multilayer structures have been fabricated using magnetron sputtering. in addition, we have applied microfabrication technology to create freestanding beamsplitters and three-dimensional diffracting structures, as is discussed in another paper at this conference.2 The x-ray reflectivity and transmission of the multilayer components have been measured using synchrotron radiation. We have also characterized the microstructure of these devices using high-resolution transmission electron microscopy (TEM). This information provides structural parameters that are incorporated into computer codes to calculate the theoretical performance of the multilayer components. Comparison of the calculated reflectivity and transmission with the measured performance of the multilayer optics provides insight into the physics of these devices. In addition, a successful modeling capability allows us to iterate the fabrication cycle, modifying the design of the multilayer components to optimize their performance.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
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In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 688, 09.04.1987, p. 91-98.
Research output: Contribution to journal › Conference article › Research › peer review
}
TY - JOUR
T1 - Tem and x-ray analysis of multilayer mirrors and beamsplitters
AU - Stearns, D. G.
AU - Ceglio, N. M.
AU - Hawryluk, A. M.
AU - Stearns, M. B.
AU - Chang, C. H.
AU - Petford-Long, A. K.
AU - Danzmann, K.
AU - Klihne, M.
AU - Muller, P.
AU - Wende, B.
PY - 1987/4/9
Y1 - 1987/4/9
N2 - Recent advances in the development of lasers at soft x-ray wavelengths has spurred increasing interest in the production of cavity components using multilayer technology. We have established a comprehensive capability to design, fabricate, and characterize multilayer x-ray optics directed towards the goal of building the first x-ray laser cavity.1 High quality multilayer structures have been fabricated using magnetron sputtering. in addition, we have applied microfabrication technology to create freestanding beamsplitters and three-dimensional diffracting structures, as is discussed in another paper at this conference.2 The x-ray reflectivity and transmission of the multilayer components have been measured using synchrotron radiation. We have also characterized the microstructure of these devices using high-resolution transmission electron microscopy (TEM). This information provides structural parameters that are incorporated into computer codes to calculate the theoretical performance of the multilayer components. Comparison of the calculated reflectivity and transmission with the measured performance of the multilayer optics provides insight into the physics of these devices. In addition, a successful modeling capability allows us to iterate the fabrication cycle, modifying the design of the multilayer components to optimize their performance.
AB - Recent advances in the development of lasers at soft x-ray wavelengths has spurred increasing interest in the production of cavity components using multilayer technology. We have established a comprehensive capability to design, fabricate, and characterize multilayer x-ray optics directed towards the goal of building the first x-ray laser cavity.1 High quality multilayer structures have been fabricated using magnetron sputtering. in addition, we have applied microfabrication technology to create freestanding beamsplitters and three-dimensional diffracting structures, as is discussed in another paper at this conference.2 The x-ray reflectivity and transmission of the multilayer components have been measured using synchrotron radiation. We have also characterized the microstructure of these devices using high-resolution transmission electron microscopy (TEM). This information provides structural parameters that are incorporated into computer codes to calculate the theoretical performance of the multilayer components. Comparison of the calculated reflectivity and transmission with the measured performance of the multilayer optics provides insight into the physics of these devices. In addition, a successful modeling capability allows us to iterate the fabrication cycle, modifying the design of the multilayer components to optimize their performance.
UR - http://www.scopus.com/inward/record.url?scp=0023577233&partnerID=8YFLogxK
U2 - 10.1117/12.964827
DO - 10.1117/12.964827
M3 - Conference article
AN - SCOPUS:0023577233
VL - 688
SP - 91
EP - 98
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
SN - 0277-786X
T2 - 30th Annual Technical Symposium
Y2 - 1 August 1986 through 3 August 1986
ER -