Details
| Original language | English |
|---|---|
| Pages (from-to) | 162-168 |
| Journal | Procedia Technology |
| Volume | 26 |
| Publication status | Published - 1 Oct 2016 |
Keywords
- Flexible Substrate, Collaborative Research Center 653, stress in metallic thin films
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Stress Reduction in Sputtered Thin NiFe 81/19 Layers for Magnetic Field Sensors. / Jogschies, Lisa; Rittinger, Johannes; Klaas, Daniel et al.
In: Procedia Technology, Vol. 26, 01.10.2016, p. 162-168.
In: Procedia Technology, Vol. 26, 01.10.2016, p. 162-168.
Research output: Contribution to journal › Conference article › Research
Jogschies, L, Rittinger, J, Klaas, D & Wurz, M 2016, 'Stress Reduction in Sputtered Thin NiFe 81/19 Layers for Magnetic Field Sensors', Procedia Technology, vol. 26, pp. 162-168. https://doi.org/10.1016/j.protcy.2016.08.022
Jogschies, L., Rittinger, J., Klaas, D., & Wurz, M. (2016). Stress Reduction in Sputtered Thin NiFe 81/19 Layers for Magnetic Field Sensors. Procedia Technology, 26, 162-168. https://doi.org/10.1016/j.protcy.2016.08.022
Jogschies L, Rittinger J, Klaas D, Wurz M. Stress Reduction in Sputtered Thin NiFe 81/19 Layers for Magnetic Field Sensors. Procedia Technology. 2016 Oct 1;26:162-168. doi: 10.1016/j.protcy.2016.08.022
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title = "Stress Reduction in Sputtered Thin NiFe 81/19 Layers for Magnetic Field Sensors",
keywords = "Flexible Substrate, Collaborative Research Center 653, stress in metallic thin films",
author = "Lisa Jogschies and Johannes Rittinger and Daniel Klaas and Marc Wurz",
year = "2016",
month = oct,
day = "1",
doi = "10.1016/j.protcy.2016.08.022",
language = "English",
volume = "26",
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Download
TY - JOUR
T1 - Stress Reduction in Sputtered Thin NiFe 81/19 Layers for Magnetic Field Sensors
AU - Jogschies, Lisa
AU - Rittinger, Johannes
AU - Klaas, Daniel
AU - Wurz, Marc
PY - 2016/10/1
Y1 - 2016/10/1
KW - Flexible Substrate
KW - Collaborative Research Center 653
KW - stress in metallic thin films
U2 - 10.1016/j.protcy.2016.08.022
DO - 10.1016/j.protcy.2016.08.022
M3 - Conference article
VL - 26
SP - 162
EP - 168
JO - Procedia Technology
JF - Procedia Technology
SN - 2212-0173
ER -