Details
| Original language | English |
|---|---|
| Pages (from-to) | 521-527 |
| Number of pages | 7 |
| Journal | Applied Surface Science |
| Volume | 476 |
| Early online date | 16 Jan 2019 |
| Publication status | Published - 15 May 2019 |
Abstract
Both low stress and high laser induced damage threshold are required in the development of high power large laser facilities. IBS and ALD films have potential in such applications in aspects of film thickness control and high LIDT, but their severe stresses cause an obstacle towards the widely application. The origin of compressive stress of IBS coating and tensile stress of ALD coating is analyzed with a model based on intermolecular potential. An anti-reflection coating having compensated stress is designed and fabricated with ALD Al 2 O 3 and IBS SiO 2 . The LIDT of the anti-reflection coating as well as the single layers are tested at wavelength 532 nm. A transmittance of 96.5% at single surface and a stress as low as 38 MPa are achieved. The LIDT of the anti-reflection coating is limited by the additional defects introduced at the film interfaces. This design takes advantage of the power resistance of IBS/ALD coatings and their contrary stresses, providing a concept towards the application in high power laser systems.
Keywords
- ALD, High LIDT, IBS, Stress compensation
ASJC Scopus subject areas
- Chemistry(all)
- General Chemistry
- Physics and Astronomy(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- General Physics and Astronomy
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Materials Science(all)
- Surfaces, Coatings and Films
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In: Applied Surface Science, Vol. 476, 15.05.2019, p. 521-527.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Stress compensated anti-reflection coating for high power laser deposited with IBS SiO 2 and ALD Al 2 O 3
AU - Liu, Hao
AU - Jensen, Lars
AU - Ma, Ping
AU - Ristau, Detlev
N1 - Funding Information: This study is funded by the China Scholarship Committee. Acknowledgement: The experiment is assisted by Mr. Jürgen Becker in Produktionstechnisches Zentrum Hannover.
PY - 2019/5/15
Y1 - 2019/5/15
N2 - Both low stress and high laser induced damage threshold are required in the development of high power large laser facilities. IBS and ALD films have potential in such applications in aspects of film thickness control and high LIDT, but their severe stresses cause an obstacle towards the widely application. The origin of compressive stress of IBS coating and tensile stress of ALD coating is analyzed with a model based on intermolecular potential. An anti-reflection coating having compensated stress is designed and fabricated with ALD Al 2 O 3 and IBS SiO 2 . The LIDT of the anti-reflection coating as well as the single layers are tested at wavelength 532 nm. A transmittance of 96.5% at single surface and a stress as low as 38 MPa are achieved. The LIDT of the anti-reflection coating is limited by the additional defects introduced at the film interfaces. This design takes advantage of the power resistance of IBS/ALD coatings and their contrary stresses, providing a concept towards the application in high power laser systems.
AB - Both low stress and high laser induced damage threshold are required in the development of high power large laser facilities. IBS and ALD films have potential in such applications in aspects of film thickness control and high LIDT, but their severe stresses cause an obstacle towards the widely application. The origin of compressive stress of IBS coating and tensile stress of ALD coating is analyzed with a model based on intermolecular potential. An anti-reflection coating having compensated stress is designed and fabricated with ALD Al 2 O 3 and IBS SiO 2 . The LIDT of the anti-reflection coating as well as the single layers are tested at wavelength 532 nm. A transmittance of 96.5% at single surface and a stress as low as 38 MPa are achieved. The LIDT of the anti-reflection coating is limited by the additional defects introduced at the film interfaces. This design takes advantage of the power resistance of IBS/ALD coatings and their contrary stresses, providing a concept towards the application in high power laser systems.
KW - ALD
KW - High LIDT
KW - IBS
KW - Stress compensation
UR - http://www.scopus.com/inward/record.url?scp=85060296251&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2019.01.125
DO - 10.1016/j.apsusc.2019.01.125
M3 - Article
AN - SCOPUS:85060296251
VL - 476
SP - 521
EP - 527
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
ER -