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Space charge layer effects in silicon studied by in situ surface transport

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  • Chemnitz University of Technology (CUT)

Details

Original languageEnglish
Article number214001
JournalJournal of Physics Condensed Matter
Volume31
Issue number21
Early online date19 Mar 2019
Publication statusPublished - 29 May 2019

Abstract

Electronic properties of low dimensional structures on surfaces can be comprehensively explored by surface transport experiments. However, the surface sensitivity of this technique to atomic structures comes along with the control of bulk related electron paths and internal interfaces. Here we analyzed the role of Schottky-barriers and space charge layers for Si-surfaces. By means of a metal submonolayer coverage deposited on vicinal Si(1 1 1), we reliably accessed subsurface transport channels via angle- and temperature-dependent in situ transport measurements. In particular, high temperature treatments performed under ultra high vacuum conditions led to the formation of surface-near bulk defects, e.g. SiC-interstitials. Obviously, these defects act as p-type dopants and easily overcompensate lightly n-doped Si substrates.

Keywords

    silicon surface, space charge layer, surface transport

ASJC Scopus subject areas

Cite this

Space charge layer effects in silicon studied by in situ surface transport. / Edler, Frederik; Miccoli, Ilio; Pfnür, Herbert et al.
In: Journal of Physics Condensed Matter, Vol. 31, No. 21, 214001, 29.05.2019.

Research output: Contribution to journalArticleResearchpeer review

Edler F, Miccoli I, Pfnür H, Tegenkamp C. Space charge layer effects in silicon studied by in situ surface transport. Journal of Physics Condensed Matter. 2019 May 29;31(21):214001. Epub 2019 Mar 19. doi: 10.1088/1361-648X/ab094e, 10.15488/10237
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AU - Miccoli, Ilio

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AU - Tegenkamp, Christoph

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