Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs

Kirsten Weide-Zaage; Verena Hein

doi:10.1109/ESIME.2005.1502827

Details

Original language	English
Title of host publication	Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005
Pages	353-358
Number of pages	6
Publication status	Published - 2005
Event	6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005 - Berlin, Germany Duration: 18 Apr 2005 → 20 Apr 2005

Publication series

Name	Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005
Volume	2005

ASJC Scopus subject areas

Engineering(all)
General Engineering

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Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs. / Weide-Zaage, Kirsten; Hein, Verena.
Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005. 2005. p. 353-358 1502827 (Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005; Vol. 2005).

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

Weide-Zaage, K & Hein, V 2005, Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs. in Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005., 1502827, Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005, vol. 2005, pp. 353-358, 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005, Berlin, Germany, 18 Apr 2005. https://doi.org/10.1109/ESIME.2005.1502827

Weide-Zaage, K., & Hein, V. (2005). Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs. In Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005 (pp. 353-358). Article 1502827 (Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005; Vol. 2005). https://doi.org/10.1109/ESIME.2005.1502827

Weide-Zaage K, Hein V. Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs. In Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005. 2005. p. 353-358. 1502827. (Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005). doi: 10.1109/ESIME.2005.1502827

Weide-Zaage, Kirsten ; Hein, Verena. / Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs. Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005. 2005. pp. 353-358 (Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005).

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author = "Kirsten Weide-Zaage and Verena Hein",

note = "Copyright: Copyright 2011 Elsevier B.V., All rights reserved.; 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005 ; Conference date: 18-04-2005 Through 20-04-2005",

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Research@Leibniz University

Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs

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