Silicon surface passivation by Al2O3: Recombination parameters and inversion layer solar cells

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  • Institute for Solar Energy Research (ISFH)
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Details

Original languageEnglish
Pages (from-to)319-324
Number of pages6
JournalEnergy Procedia
Volume27
Publication statusPublished - 2012
Externally publishedYes
Event2nd International Conference on Crystalline Silicon Photovoltaics, SiliconPV 2012 - Leuven, Belgium
Duration: 3 Apr 20125 Apr 2012

Abstract

The interface between p- and n-type FZ-Si and an amorphous aluminum oxide (Al2O3) surface passivation layer deposited by plasma-assisted atomic layer deposition (ALD) was investigated by frequency-dependent conductance measurements. The hole capture cross section in the lower half of the bandgap, σp = (4±3)×10 -16 cm2, was found to be independent of energy. The electron capture cross section σn in the upper half of the bandgap decreases from σn = (7±4)×10-15 cm2 at midgap over two orders of magnitude towards the conduction band edge. Numerical simulations of the effective surface recombination velocity based on these recombination parameters show a good agreement with experimental surface recombination velocities for a wide range of excess carrier and surface charge densities. Carrier transport in the inversion layer formed at the n-Si/Al2O3 interface was investigated yielding a sheet resistance of 15 kΩ/, which was reduced to 6 kΩ/ for a surface charge density of -2×1013 cm-2 obtained by corona charging. The applicability of Al2O3 inversion layers as emitters in n-type inversion layer solar cells was demonstrated by short circuit current densities of up to 25 mA/cm2, which show a pronounced dependence on surface charge density.

Keywords

    Aluminum oxide, Capture cross section, Inversion layer solar cell, Passivation

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Cite this

Silicon surface passivation by Al2O3: Recombination parameters and inversion layer solar cells. / Werner, F.; Cosceev, A.; Schmidt, J.
In: Energy Procedia, Vol. 27, 2012, p. 319-324.

Research output: Contribution to journalConference articleResearchpeer review

Werner F, Cosceev A, Schmidt J. Silicon surface passivation by Al2O3: Recombination parameters and inversion layer solar cells. Energy Procedia. 2012;27:319-324. doi: 10.1016/j.egypro.2012.07.070
Werner, F. ; Cosceev, A. ; Schmidt, J. / Silicon surface passivation by Al2O3 : Recombination parameters and inversion layer solar cells. In: Energy Procedia. 2012 ; Vol. 27. pp. 319-324.
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TY - JOUR

T1 - Silicon surface passivation by Al2O3

T2 - 2nd International Conference on Crystalline Silicon Photovoltaics, SiliconPV 2012

AU - Werner, F.

AU - Cosceev, A.

AU - Schmidt, J.

N1 - Funding Information: Funding was provided by the State of Lower Saxony and the German Ministry for the Environment, Nature Conservation and Nuclear Safety (BMU) under contract number 0325050 (“ALD”).

PY - 2012

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