Details
| Original language | English |
|---|---|
| Title of host publication | 2017 30th International Vacuum Nanoelectronics Conference (IVNC) |
| Editors | Christoph Langer, Robert Lawrowski |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 132-133 |
| Number of pages | 2 |
| ISBN (electronic) | 9781509039753, 978-1-5090-3974-6 |
| ISBN (print) | 978-1-5090-3976-0 |
| Publication status | Published - 2017 |
| Event | 30th International Vacuum Nanoelectronics Conference - Regensburg, Germany Duration: 10 Jul 2017 → 14 Jul 2017 Conference number: 30 https://www.aconf.org/conf_92671.html |
Publication series
| Name | International Vacuum Nanoelectronics Conference |
|---|---|
| Publisher | IEEE |
| ISSN (electronic) | 2380-6311 |
Abstract
In this work, a p-Si field emitter array produced by wafer dicing is presented. Different strategies to produce a variety of shapes of the tips are shown. The resulting arrays show excellent emission characteristics compared to other field emitter, like carbon nano tubes.
Keywords
- chipping, dicing, emission, field emitter, silicon
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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2017 30th International Vacuum Nanoelectronics Conference (IVNC). ed. / Christoph Langer; Robert Lawrowski. Institute of Electrical and Electronics Engineers Inc., 2017. p. 132-133 8051577 (International Vacuum Nanoelectronics Conference).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Silicon field emitter arrays produced via wafer dicing
AU - Kusch, Alexander
AU - Wurz, Marc
AU - Bunert, Erik
AU - Zimmermann, Stefan
N1 - Conference code: 30
PY - 2017
Y1 - 2017
N2 - In this work, a p-Si field emitter array produced by wafer dicing is presented. Different strategies to produce a variety of shapes of the tips are shown. The resulting arrays show excellent emission characteristics compared to other field emitter, like carbon nano tubes.
AB - In this work, a p-Si field emitter array produced by wafer dicing is presented. Different strategies to produce a variety of shapes of the tips are shown. The resulting arrays show excellent emission characteristics compared to other field emitter, like carbon nano tubes.
KW - chipping
KW - dicing
KW - emission
KW - field emitter
KW - silicon
UR - http://www.scopus.com/inward/record.url?scp=85032800817&partnerID=8YFLogxK
U2 - 10.1109/IVNC.2017.8051577
DO - 10.1109/IVNC.2017.8051577
M3 - Conference contribution
AN - SCOPUS:85032800817
SN - 978-1-5090-3976-0
T3 - International Vacuum Nanoelectronics Conference
SP - 132
EP - 133
BT - 2017 30th International Vacuum Nanoelectronics Conference (IVNC)
A2 - Langer, Christoph
A2 - Lawrowski, Robert
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 30th International Vacuum Nanoelectronics Conference
Y2 - 10 July 2017 through 14 July 2017
ER -