Scanning probe nanolithography - Direct fabrication of mesoscopic devices

Research output: Chapter in book/report/conference proceedingConference contributionResearch

Authors

  • U. F. Keyser
  • H. W. Schumacher
  • U. Zeitler
  • R. J. Haug
  • K. Eberl

Research Organisations

External Research Organisations

  • Max Planck Institute for Solid State Research (MPI-FKF)
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Details

Original languageEnglish
Title of host publicationProceedings of the 25th International Conference on the Physics of Semiconductors Part I
Pages1743-1744
Volume1
Publication statusPublished - 2001
Event25th International Conference on the Physics of Semiconductors - Osaka, Japan
Duration: 17 Sept 200022 Sept 2000

Cite this

Scanning probe nanolithography - Direct fabrication of mesoscopic devices. / Keyser, U. F.; Schumacher, H. W.; Zeitler, U. et al.
Proceedings of the 25th International Conference on the Physics of Semiconductors Part I. Vol. 1 2001. p. 1743-1744.

Research output: Chapter in book/report/conference proceedingConference contributionResearch

Keyser, UF, Schumacher, HW, Zeitler, U, Haug, RJ & Eberl, K 2001, Scanning probe nanolithography - Direct fabrication of mesoscopic devices. in Proceedings of the 25th International Conference on the Physics of Semiconductors Part I. vol. 1, pp. 1743-1744, 25th International Conference on the Physics of Semiconductors, Osaka, Japan, 17 Sept 2000. <https://www.google.com/url?sa=t&rct=j&q=&esrc=s&source=web&cd=&ved=2ahUKEwjU4Orz6OryAhXiS_EDHQkZD04QFnoECAMQAQ&url=https%3A%2F%2Fwww.hfml.ru.nl%2Fzeitler%2Fpubli%2Fpdf%2F49_ICPS_UliK.pdf&usg=AOvVaw1g9Jh5GUcHxnrVab1Laczu>
Keyser UF, Schumacher HW, Zeitler U, Haug RJ, Eberl K. Scanning probe nanolithography - Direct fabrication of mesoscopic devices. In Proceedings of the 25th International Conference on the Physics of Semiconductors Part I. Vol. 1. 2001. p. 1743-1744
Keyser, U. F. ; Schumacher, H. W. ; Zeitler, U. et al. / Scanning probe nanolithography - Direct fabrication of mesoscopic devices. Proceedings of the 25th International Conference on the Physics of Semiconductors Part I. Vol. 1 2001. pp. 1743-1744
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title = "Scanning probe nanolithography - Direct fabrication of mesoscopic devices",
author = "Keyser, {U. F.} and Schumacher, {H. W.} and U. Zeitler and Haug, {R. J.} and K. Eberl",
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AU - Keyser, U. F.

AU - Schumacher, H. W.

AU - Zeitler, U.

AU - Haug, R. J.

AU - Eberl, K.

PY - 2001

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M3 - Conference contribution

SN - 978-3-540-41778-1

SN - 978-3-642-63993-7

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