Details
Original language | English |
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Title of host publication | Proceedings of the 25th International Conference on the Physics of Semiconductors Part I |
Pages | 1743-1744 |
Volume | 1 |
Publication status | Published - 2001 |
Event | 25th International Conference on the Physics of Semiconductors - Osaka, Japan Duration: 17 Sept 2000 → 22 Sept 2000 |
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Proceedings of the 25th International Conference on the Physics of Semiconductors Part I. Vol. 1 2001. p. 1743-1744.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
}
TY - GEN
T1 - Scanning probe nanolithography - Direct fabrication of mesoscopic devices
AU - Keyser, U. F.
AU - Schumacher, H. W.
AU - Zeitler, U.
AU - Haug, R. J.
AU - Eberl, K.
PY - 2001
Y1 - 2001
M3 - Conference contribution
SN - 978-3-540-41778-1
SN - 978-3-642-63993-7
VL - 1
SP - 1743
EP - 1744
BT - Proceedings of the 25th International Conference on the Physics of Semiconductors Part I
T2 - 25th International Conference on the Physics of Semiconductors
Y2 - 17 September 2000 through 22 September 2000
ER -