Details
| Original language | English |
|---|---|
| Title of host publication | Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII |
| Editors | Georg von Freymann, Eva Blasco, Debashis Chanda |
| Publisher | SPIE |
| Number of pages | 9 |
| ISBN (electronic) | 9781510633476 |
| Publication status | Published - 28 Feb 2020 |
| Event | Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII 2020 - San Francisco, United States Duration: 2 Feb 2020 → 5 Feb 2020 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 11292 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
Two-photon polymerization (2PP) is a promising technique for additive manufacturing of 2D and 3D polymer structures with tailored physical properties. It provides the possibility to create structured samples with nearly arbitrary geometries. However, the potential of this technique to achieve structures with high resolution below the diffraction limit and complex geometries with high surface quality is not yet fully exploited. In this work, polymer gratings with controllable parameters, specially designed 3D structures with circularly symmetrical curved surfaces and 3D photonic resonators coupled with linear optical waveguides were demonstrated. In the first case, different photosensitive materials were applied for the fabrication of the gratings and their influence on the structure formation was compared. Furthermore, the approach to realize high resolution for feature sizes below the diffraction limit by controlling the laser focus position with respect to the glass substrate was shown. Periodic structures with a minimum feature size of 100nm and periodic distance of 200nm were realized. For special 3D structures with a circularly symmetrical curved shape, the main challenge was to realize smooth surfaces. An investigation of relevant influences and the optimization of processing parameters on the structure formation and surface quality were performed. Additionally, the 2PP fabrication of 3D resonators and waveguides with a nanoscale gap distance in between was studied.
Keywords
- High-quality fabrication, Photonic structures, Two-photon polymerization
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII. ed. / Georg von Freymann; Eva Blasco; Debashis Chanda. SPIE, 2020. 112920K (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11292).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Realization of High-Quality Polymeric Photonic Structures by Two-Photon Polymerization
AU - Zheng, Lei
AU - Reinhardt, Carsten
AU - Roth, Bernhard
N1 - Funding Information: The authors acknowledge the financial support from the Deutsche Forschungsgemeinschaft (DFG) under Germany’s Excellence Strategy within the Cluster of Excellence PhoenixD (EXC 2122, Project ID 390833453) and the DFG (German Research Foundation, Project ID RE3012/4-1 and RE3012/2-1).
PY - 2020/2/28
Y1 - 2020/2/28
N2 - Two-photon polymerization (2PP) is a promising technique for additive manufacturing of 2D and 3D polymer structures with tailored physical properties. It provides the possibility to create structured samples with nearly arbitrary geometries. However, the potential of this technique to achieve structures with high resolution below the diffraction limit and complex geometries with high surface quality is not yet fully exploited. In this work, polymer gratings with controllable parameters, specially designed 3D structures with circularly symmetrical curved surfaces and 3D photonic resonators coupled with linear optical waveguides were demonstrated. In the first case, different photosensitive materials were applied for the fabrication of the gratings and their influence on the structure formation was compared. Furthermore, the approach to realize high resolution for feature sizes below the diffraction limit by controlling the laser focus position with respect to the glass substrate was shown. Periodic structures with a minimum feature size of 100nm and periodic distance of 200nm were realized. For special 3D structures with a circularly symmetrical curved shape, the main challenge was to realize smooth surfaces. An investigation of relevant influences and the optimization of processing parameters on the structure formation and surface quality were performed. Additionally, the 2PP fabrication of 3D resonators and waveguides with a nanoscale gap distance in between was studied.
AB - Two-photon polymerization (2PP) is a promising technique for additive manufacturing of 2D and 3D polymer structures with tailored physical properties. It provides the possibility to create structured samples with nearly arbitrary geometries. However, the potential of this technique to achieve structures with high resolution below the diffraction limit and complex geometries with high surface quality is not yet fully exploited. In this work, polymer gratings with controllable parameters, specially designed 3D structures with circularly symmetrical curved surfaces and 3D photonic resonators coupled with linear optical waveguides were demonstrated. In the first case, different photosensitive materials were applied for the fabrication of the gratings and their influence on the structure formation was compared. Furthermore, the approach to realize high resolution for feature sizes below the diffraction limit by controlling the laser focus position with respect to the glass substrate was shown. Periodic structures with a minimum feature size of 100nm and periodic distance of 200nm were realized. For special 3D structures with a circularly symmetrical curved shape, the main challenge was to realize smooth surfaces. An investigation of relevant influences and the optimization of processing parameters on the structure formation and surface quality were performed. Additionally, the 2PP fabrication of 3D resonators and waveguides with a nanoscale gap distance in between was studied.
KW - High-quality fabrication
KW - Photonic structures
KW - Two-photon polymerization
UR - http://www.scopus.com/inward/record.url?scp=85084193397&partnerID=8YFLogxK
U2 - 10.1117/12.2563345
DO - 10.1117/12.2563345
M3 - Conference contribution
AN - SCOPUS:85084193397
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII
A2 - von Freymann, Georg
A2 - Blasco, Eva
A2 - Chanda, Debashis
PB - SPIE
T2 - Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII 2020
Y2 - 2 February 2020 through 5 February 2020
ER -