Details
| Original language | English |
|---|---|
| Publication status | Published - 4 Jun 2023 |
| Event | 2023 Optical Fabrication and Testing, OF&T 2023 - Quebec City, Canada Duration: 4 Jun 2023 → 8 Jun 2023 |
Conference
| Conference | 2023 Optical Fabrication and Testing, OF&T 2023 |
|---|---|
| Country/Territory | Canada |
| City | Quebec City |
| Period | 4 Jun 2023 → 8 Jun 2023 |
Abstract
A low-cost and simple UV-LED-based projection lithography approach enabling micro- and nanostructuring in seconds and with subwavelength resolution is demonstrated in this work.
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
- Earth and Planetary Sciences(all)
- Space and Planetary Science
- Engineering(all)
- Control and Systems Engineering
- Engineering(all)
- Electrical and Electronic Engineering
- Physics and Astronomy(all)
- Instrumentation
- Computer Science(all)
- General Computer Science
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
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2023. Paper presented at 2023 Optical Fabrication and Testing, OF&T 2023, Quebec City, Canada.
Research output: Contribution to conference › Paper › Research › peer review
}
TY - CONF
T1 - Rapid micro- and nanostructuring by UV-LED-based microscope projection lithography
AU - Zheng, Lei
AU - Reinhardt, Carsten
AU - Roth, Bernhard
N1 - Publisher Copyright: © 2023 The Author (s).
PY - 2023/6/4
Y1 - 2023/6/4
N2 - A low-cost and simple UV-LED-based projection lithography approach enabling micro- and nanostructuring in seconds and with subwavelength resolution is demonstrated in this work.
AB - A low-cost and simple UV-LED-based projection lithography approach enabling micro- and nanostructuring in seconds and with subwavelength resolution is demonstrated in this work.
UR - http://www.scopus.com/inward/record.url?scp=85193041874&partnerID=8YFLogxK
M3 - Paper
AN - SCOPUS:85193041874
T2 - 2023 Optical Fabrication and Testing, OF&T 2023
Y2 - 4 June 2023 through 8 June 2023
ER -