Details
| Original language | English |
|---|---|
| Article number | 3598 |
| Number of pages | 26 |
| Journal | Sensors (Switzerland) |
| Volume | 20 |
| Issue number | 12 |
| Publication status | Published - 26 Jun 2020 |
Abstract
Scanning electron microscopes (SEMs) are versatile imaging devices for the micro-and nanoscale that find application in various disciplines such as the characterization of biological, mineral or mechanical specimen. Even though the specimen’s two-dimensional (2D) properties are provided by the acquired images, detailed morphological characterizations require knowledge about the three-dimensional (3D) surface structure. To overcome this limitation, a reconstruction routine is presented that allows the quantitative depth reconstruction from SEM image sequences. Based on the SEM’s imaging properties that can be well described by an affine camera, the proposed algorithms rely on the use of affine epipolar geometry, self-calibration via factorization and triangulation from dense correspondences. To yield the highest robustness and accuracy, different sub-models of the affine camera are applied to the SEM images and the obtained results are directly compared to confocal laser scanning microscope (CLSM) measurements to identify the ideal parametrization and underlying algorithms. To solve the rectification problem for stereo-pair images of an affine camera so that dense matching algorithms can be applied, existing approaches are adapted and extended to further enhance the yielded results. The evaluations of this study allow to specify the applicability of the affine camera models to SEM images and what accuracies can be expected for reconstruction routines based on self-calibration and dense matching algorithms.
Keywords
- 3D reconstruction, Affine camera, Dense point cloud, Epipolar geometry, Rectification, Registration, Scanning electron microscope, Self calibration, Triangulation
ASJC Scopus subject areas
- Chemistry(all)
- Analytical Chemistry
- Biochemistry, Genetics and Molecular Biology(all)
- Biochemistry
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
- Physics and Astronomy(all)
- Instrumentation
- Engineering(all)
- Electrical and Electronic Engineering
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In: Sensors (Switzerland), Vol. 20, No. 12, 3598, 26.06.2020.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Quantitative 3D reconstruction from scanning electron microscope images based on affine camera models
AU - Töberg, Stefan
AU - Reithmeier, Eduard
PY - 2020/6/26
Y1 - 2020/6/26
N2 - Scanning electron microscopes (SEMs) are versatile imaging devices for the micro-and nanoscale that find application in various disciplines such as the characterization of biological, mineral or mechanical specimen. Even though the specimen’s two-dimensional (2D) properties are provided by the acquired images, detailed morphological characterizations require knowledge about the three-dimensional (3D) surface structure. To overcome this limitation, a reconstruction routine is presented that allows the quantitative depth reconstruction from SEM image sequences. Based on the SEM’s imaging properties that can be well described by an affine camera, the proposed algorithms rely on the use of affine epipolar geometry, self-calibration via factorization and triangulation from dense correspondences. To yield the highest robustness and accuracy, different sub-models of the affine camera are applied to the SEM images and the obtained results are directly compared to confocal laser scanning microscope (CLSM) measurements to identify the ideal parametrization and underlying algorithms. To solve the rectification problem for stereo-pair images of an affine camera so that dense matching algorithms can be applied, existing approaches are adapted and extended to further enhance the yielded results. The evaluations of this study allow to specify the applicability of the affine camera models to SEM images and what accuracies can be expected for reconstruction routines based on self-calibration and dense matching algorithms.
AB - Scanning electron microscopes (SEMs) are versatile imaging devices for the micro-and nanoscale that find application in various disciplines such as the characterization of biological, mineral or mechanical specimen. Even though the specimen’s two-dimensional (2D) properties are provided by the acquired images, detailed morphological characterizations require knowledge about the three-dimensional (3D) surface structure. To overcome this limitation, a reconstruction routine is presented that allows the quantitative depth reconstruction from SEM image sequences. Based on the SEM’s imaging properties that can be well described by an affine camera, the proposed algorithms rely on the use of affine epipolar geometry, self-calibration via factorization and triangulation from dense correspondences. To yield the highest robustness and accuracy, different sub-models of the affine camera are applied to the SEM images and the obtained results are directly compared to confocal laser scanning microscope (CLSM) measurements to identify the ideal parametrization and underlying algorithms. To solve the rectification problem for stereo-pair images of an affine camera so that dense matching algorithms can be applied, existing approaches are adapted and extended to further enhance the yielded results. The evaluations of this study allow to specify the applicability of the affine camera models to SEM images and what accuracies can be expected for reconstruction routines based on self-calibration and dense matching algorithms.
KW - 3D reconstruction
KW - Affine camera
KW - Dense point cloud
KW - Epipolar geometry
KW - Rectification
KW - Registration
KW - Scanning electron microscope
KW - Self calibration
KW - Triangulation
UR - http://www.scopus.com/inward/record.url?scp=85087106606&partnerID=8YFLogxK
U2 - 10.3390/s20123598
DO - 10.3390/s20123598
M3 - Article
C2 - 32604713
AN - SCOPUS:85087106606
VL - 20
JO - Sensors (Switzerland)
JF - Sensors (Switzerland)
SN - 1424-8220
IS - 12
M1 - 3598
ER -