Details
| Original language | English |
|---|---|
| Pages (from-to) | 257-260 |
| Number of pages | 4 |
| Journal | Microsystem Technologies |
| Volume | 10 |
| Issue number | 3 |
| Publication status | Published - Mar 2004 |
Abstract
The increasing market of micro systems requires new flexible and economic production systems. The cutting technologies are here in addition to the already established microtechnological processes, above all for the new materials in the field of microsystems technology. The grinding studies prove that in respect to the surface qualities of micro machined hard materials, a face grinding process is much better suited than a peripheral grinding process. However, the high process forces are disadvantageous. The micro drilling processes showed that the right choice of cutting parameters make it possible to improve the quality in respect to the cutting burr height and the roughness of the drill hole wall by a factor of 10. A process of optimization turns out to be very effective.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Hardware and Architecture
- Engineering(all)
- Electrical and Electronic Engineering
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In: Microsystem Technologies, Vol. 10, No. 3, 03.2004, p. 257-260.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Process development in machining of micro guideways
AU - Denkena, B.
AU - Hoffmeister, H. W.
AU - Reichstein, M.
AU - Illenseer, S.
PY - 2004/3
Y1 - 2004/3
N2 - The increasing market of micro systems requires new flexible and economic production systems. The cutting technologies are here in addition to the already established microtechnological processes, above all for the new materials in the field of microsystems technology. The grinding studies prove that in respect to the surface qualities of micro machined hard materials, a face grinding process is much better suited than a peripheral grinding process. However, the high process forces are disadvantageous. The micro drilling processes showed that the right choice of cutting parameters make it possible to improve the quality in respect to the cutting burr height and the roughness of the drill hole wall by a factor of 10. A process of optimization turns out to be very effective.
AB - The increasing market of micro systems requires new flexible and economic production systems. The cutting technologies are here in addition to the already established microtechnological processes, above all for the new materials in the field of microsystems technology. The grinding studies prove that in respect to the surface qualities of micro machined hard materials, a face grinding process is much better suited than a peripheral grinding process. However, the high process forces are disadvantageous. The micro drilling processes showed that the right choice of cutting parameters make it possible to improve the quality in respect to the cutting burr height and the roughness of the drill hole wall by a factor of 10. A process of optimization turns out to be very effective.
UR - http://www.scopus.com/inward/record.url?scp=1842559378&partnerID=8YFLogxK
U2 - 10.1007/s00542-003-0359-y
DO - 10.1007/s00542-003-0359-y
M3 - Article
AN - SCOPUS:1842559378
VL - 10
SP - 257
EP - 260
JO - Microsystem Technologies
JF - Microsystem Technologies
SN - 0946-7076
IS - 3
ER -