Details
| Original language | English |
|---|---|
| Pages (from-to) | 1228-1232 |
| Number of pages | 5 |
| Journal | Surface and Coatings Technology |
| Volume | 116-119 |
| Publication status | Published - Sept 1999 |
| Externally published | Yes |
Abstract
Application of the triple-probe method for volume-resolved monitoring of electron density and electron temperature during industrial-scale polymerization plasma process was tested. As a model process, simultaneous deposition of barrier film on the inner wall of six bottles using an asymmetrical r.f. discharge was investigated. The reproducibility of the process was better than 94%. The plasma density differed between particular bottles up to a factor of 2, and this difference increased with pressure. The barrier properties of the film increased with the product of the ion current and square root of the electron temperature
Keywords
- Plasma diagnostics, Plasma polymerization, Triple-probe method
ASJC Scopus subject areas
- Chemistry(all)
- Physics and Astronomy(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Materials Science(all)
- Surfaces, Coatings and Films
- Materials Science(all)
- Materials Chemistry
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In: Surface and Coatings Technology, Vol. 116-119, 09.1999, p. 1228-1232.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Process control of plasma polymerization in a large industrial reactor
AU - Špatenka, P.
AU - Endres, H. J.
AU - Krumeich, J.
AU - Cook, R. W.
N1 - Funding Information: This work was partly supported by the grant of the Grant Agency of the Czech Republic No. 202/98/0116.
PY - 1999/9
Y1 - 1999/9
N2 - Application of the triple-probe method for volume-resolved monitoring of electron density and electron temperature during industrial-scale polymerization plasma process was tested. As a model process, simultaneous deposition of barrier film on the inner wall of six bottles using an asymmetrical r.f. discharge was investigated. The reproducibility of the process was better than 94%. The plasma density differed between particular bottles up to a factor of 2, and this difference increased with pressure. The barrier properties of the film increased with the product of the ion current and square root of the electron temperature
AB - Application of the triple-probe method for volume-resolved monitoring of electron density and electron temperature during industrial-scale polymerization plasma process was tested. As a model process, simultaneous deposition of barrier film on the inner wall of six bottles using an asymmetrical r.f. discharge was investigated. The reproducibility of the process was better than 94%. The plasma density differed between particular bottles up to a factor of 2, and this difference increased with pressure. The barrier properties of the film increased with the product of the ion current and square root of the electron temperature
KW - Plasma diagnostics
KW - Plasma polymerization
KW - Triple-probe method
UR - http://www.scopus.com/inward/record.url?scp=0033320276&partnerID=8YFLogxK
U2 - 10.1016/S0257-8972(99)00189-9
DO - 10.1016/S0257-8972(99)00189-9
M3 - Article
AN - SCOPUS:0033320276
VL - 116-119
SP - 1228
EP - 1232
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
ER -