Details
| Original language | English |
|---|---|
| Pages (from-to) | 185-188 |
| Number of pages | 4 |
| Journal | Precision Engineering |
| Volume | 27 |
| Issue number | 2 |
| Early online date | 7 Jan 2003 |
| Publication status | Published - Apr 2003 |
Abstract
The work described in this paper deals with a micro grinding process development for components of a guiding system with active micro actors. Starting with the selection of a machine tool concept, investigations with different tool specifications as well as process kinematics and parameters are performed. Thereby the process is characterised by resulting shape accuracy and surface quality of the workpiece. By using an ultra precision machine tool and fine grained grinding wheels a shape accuracy within the submicron range and high surface qualities can be achieved.
Keywords
- Grinding, Micro machining, Production process
ASJC Scopus subject areas
- Engineering(all)
- General Engineering
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In: Precision Engineering, Vol. 27, No. 2, 04.2003, p. 185-188.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Precision grinding of components for aerostatic micro guidance
AU - Tönshoff, H. K.
AU - Denkena, B.
AU - Friemuth, T.
AU - Reichstein, M.
N1 - Funding Information: The investigations described in this paper were undertaken with support of the German Research Foundation (DFG) within a special research project “Design and manufacturing of active micro systems” (SFB 516).
PY - 2003/4
Y1 - 2003/4
N2 - The work described in this paper deals with a micro grinding process development for components of a guiding system with active micro actors. Starting with the selection of a machine tool concept, investigations with different tool specifications as well as process kinematics and parameters are performed. Thereby the process is characterised by resulting shape accuracy and surface quality of the workpiece. By using an ultra precision machine tool and fine grained grinding wheels a shape accuracy within the submicron range and high surface qualities can be achieved.
AB - The work described in this paper deals with a micro grinding process development for components of a guiding system with active micro actors. Starting with the selection of a machine tool concept, investigations with different tool specifications as well as process kinematics and parameters are performed. Thereby the process is characterised by resulting shape accuracy and surface quality of the workpiece. By using an ultra precision machine tool and fine grained grinding wheels a shape accuracy within the submicron range and high surface qualities can be achieved.
KW - Grinding
KW - Micro machining
KW - Production process
UR - http://www.scopus.com/inward/record.url?scp=0037377589&partnerID=8YFLogxK
U2 - 10.1016/S0141-6359(02)00191-5
DO - 10.1016/S0141-6359(02)00191-5
M3 - Article
AN - SCOPUS:0037377589
VL - 27
SP - 185
EP - 188
JO - Precision Engineering
JF - Precision Engineering
SN - 0141-6359
IS - 2
ER -