Phase separating coating by filtered Ion Beam Sputtering

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Authors

  • M. Jupé
  • Sina Malobabic
  • Thomas Willemsen
  • K. Schuba
  • Detlev Ristau

External Research Organisations

  • Laser Zentrum Hannover e.V. (LZH)
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Details

Original languageEnglish
Title of host publicationOptical Interference Coatings, OIC 2016
PublisherOSA - The Optical Society
ISBN (print)9781943580132
Publication statusPublished - 2016
EventOptical Interference Coatings, OIC 2016 - Tucson, United States
Duration: 19 Jun 201624 Jun 2016

Publication series

NameOptics InfoBase Conference Papers
ISSN (electronic)2162-2701

Abstract

In high end optics particles lead often to optical losses. In this paper a filtered IBS technology is introduced to mitigate particle contamination. The device is studied in respect to material transport and particle reduction.

ASJC Scopus subject areas

Cite this

Phase separating coating by filtered Ion Beam Sputtering. / Jupé, M.; Malobabic, Sina; Willemsen, Thomas et al.
Optical Interference Coatings, OIC 2016. OSA - The Optical Society, 2016. (Optics InfoBase Conference Papers).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Jupé, M, Malobabic, S, Willemsen, T, Schuba, K & Ristau, D 2016, Phase separating coating by filtered Ion Beam Sputtering. in Optical Interference Coatings, OIC 2016. Optics InfoBase Conference Papers, OSA - The Optical Society, Optical Interference Coatings, OIC 2016, Tucson, United States, 19 Jun 2016. https://doi.org/10.1364/oic.2016.mb.9
Jupé, M., Malobabic, S., Willemsen, T., Schuba, K., & Ristau, D. (2016). Phase separating coating by filtered Ion Beam Sputtering. In Optical Interference Coatings, OIC 2016 (Optics InfoBase Conference Papers). OSA - The Optical Society. https://doi.org/10.1364/oic.2016.mb.9
Jupé M, Malobabic S, Willemsen T, Schuba K, Ristau D. Phase separating coating by filtered Ion Beam Sputtering. In Optical Interference Coatings, OIC 2016. OSA - The Optical Society. 2016. (Optics InfoBase Conference Papers). doi: 10.1364/oic.2016.mb.9
Jupé, M. ; Malobabic, Sina ; Willemsen, Thomas et al. / Phase separating coating by filtered Ion Beam Sputtering. Optical Interference Coatings, OIC 2016. OSA - The Optical Society, 2016. (Optics InfoBase Conference Papers).
Download
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