Details
| Original language | English |
|---|---|
| Title of host publication | Videometrics, Range Imaging, and Applications XII; and Automated Visual Inspection |
| Publication status | Published - 24 May 2013 |
| Externally published | Yes |
| Event | Videometrics, Range Imaging, and Applications XII; and Automated Visual Inspection - Munich, Germany Duration: 14 May 2013 → 16 May 2013 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 8791 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
The inspection of the surface quality of optical components is an essential characterization method for high power laser applications. We report about two different mapping methods based on the measurement of Total Scattering (TS) and phase contrast microscopy. The mappings are used for the determination of the defect density distribution of optical flat surfaces. The mathematical procedure relating data points to a defect area and to the form of objects will be illustrated in details. The involved differential operators and the optimized sub routines adapted to a large number of defects will be underlined. For the decision about the form of the objects, a parameter set including the fill factor, edge ratio and the polar distance will be discussed in respect to their versatility range for the basic forms. The calculated distribution will be expressed in terms of affine probability compared to the basic forms. The extracted size and form distribution function of the defects will be presented for selected high reflective and anti-reflective coating samples.
Keywords
- Labeling, Pattern recognition and defect density distribution, Phase contrast microscopy, Polar distance, Total scattering
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- Apa
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- BibTeX
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Videometrics, Range Imaging, and Applications XII; and Automated Visual Inspection. 2013. 87911C (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8791).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Pattern and form recognition of statistically distributed defects on functional optical surfaces
AU - Kadkhoda, P.
AU - Chubak, P.
AU - Lassahn, M.
AU - Ristau, Detlev
PY - 2013/5/24
Y1 - 2013/5/24
N2 - The inspection of the surface quality of optical components is an essential characterization method for high power laser applications. We report about two different mapping methods based on the measurement of Total Scattering (TS) and phase contrast microscopy. The mappings are used for the determination of the defect density distribution of optical flat surfaces. The mathematical procedure relating data points to a defect area and to the form of objects will be illustrated in details. The involved differential operators and the optimized sub routines adapted to a large number of defects will be underlined. For the decision about the form of the objects, a parameter set including the fill factor, edge ratio and the polar distance will be discussed in respect to their versatility range for the basic forms. The calculated distribution will be expressed in terms of affine probability compared to the basic forms. The extracted size and form distribution function of the defects will be presented for selected high reflective and anti-reflective coating samples.
AB - The inspection of the surface quality of optical components is an essential characterization method for high power laser applications. We report about two different mapping methods based on the measurement of Total Scattering (TS) and phase contrast microscopy. The mappings are used for the determination of the defect density distribution of optical flat surfaces. The mathematical procedure relating data points to a defect area and to the form of objects will be illustrated in details. The involved differential operators and the optimized sub routines adapted to a large number of defects will be underlined. For the decision about the form of the objects, a parameter set including the fill factor, edge ratio and the polar distance will be discussed in respect to their versatility range for the basic forms. The calculated distribution will be expressed in terms of affine probability compared to the basic forms. The extracted size and form distribution function of the defects will be presented for selected high reflective and anti-reflective coating samples.
KW - Labeling
KW - Pattern recognition and defect density distribution
KW - Phase contrast microscopy
KW - Polar distance
KW - Total scattering
UR - http://www.scopus.com/inward/record.url?scp=84880412814&partnerID=8YFLogxK
U2 - 10.1117/12.2018999
DO - 10.1117/12.2018999
M3 - Conference contribution
AN - SCOPUS:84880412814
SN - 9780819496072
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Videometrics, Range Imaging, and Applications XII; and Automated Visual Inspection
T2 - Videometrics, Range Imaging, and Applications XII; and Automated Visual Inspection
Y2 - 14 May 2013 through 16 May 2013
ER -