Details
| Original language | English |
|---|---|
| Pages (from-to) | 26-32 |
| Number of pages | 7 |
| Journal | Optics and lasers in engineering |
| Volume | 70 |
| Publication status | Published - 6 Mar 2015 |
| Externally published | Yes |
Abstract
Two-photon polymerization (2PP) is a powerful tool for direct laser writing of micro-optical and photonic structures due to its flexibility in 3D structuring and sub-micrometer resolution. However, it can be time consuming to fabricate arrays of micro-optical devices and complex photonic structures. In this study, we propose to use predefined patterns (PPs) for parallel 2PP processing. A PP contains a multiple focal spot pattern optimized for the fabrication of certain microstructures. PP can be created by holographic laser beam modulation with a spatial light modulator (SLM). The quantity and position of the multiple foci can be flexibly and precisely controlled by predesigned computer generated holograms (CGHs). With these specially designed PPs, parallel fabrication of arbitrary distributed microlens arrays and 3D photonic structures is demonstrated. This method significantly improves throughput and flexibility of the 2PP technique and can be used for mass production of functional devices in micro-optics and photonics.
Keywords
- Femtosecond laser, Micro-optics, Spatial light modulator, Two-photon polymerization
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
- Engineering(all)
- Mechanical Engineering
- Engineering(all)
- Electrical and Electronic Engineering
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In: Optics and lasers in engineering, Vol. 70, 06.03.2015, p. 26-32.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Parallel direct laser writing of micro-optical and photonic structures using spatial light modulator
AU - Yang, Liang
AU - El-Tamer, Ayman
AU - Hinze, Ulf
AU - Li, Jiawen
AU - Hu, Yanlei
AU - Huang, Wenhao
AU - Chu, Jiaru
AU - Chichkov, Boris N.
N1 - Funding Information: This work is supported by National Natural Science Foundation of China (Nos. 51275502 , 51205375 , and 91223203 ), Anhui Provincial Natural Science Foundation (No. 1408085ME104 ), National Basic Research Program of China (No. 2011CB302100 ), China Postdoctoral Science Foundation Funded Project (Nos. 2012M511416 and 2012M521245 ), and the Fundamental Research Funds for the Central Universities ( KB2090090001 ), BMBF Remedis B2 ( FKZ 03IS2081I ) and BIOFABRICATION for NIFE . The authors would like to thank for the help of Parva Chhantyal from Laser Zentrum Hannover. Publisher Copyright: © 2015 Elsevier Ltd. All rights reserved. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2015/3/6
Y1 - 2015/3/6
N2 - Two-photon polymerization (2PP) is a powerful tool for direct laser writing of micro-optical and photonic structures due to its flexibility in 3D structuring and sub-micrometer resolution. However, it can be time consuming to fabricate arrays of micro-optical devices and complex photonic structures. In this study, we propose to use predefined patterns (PPs) for parallel 2PP processing. A PP contains a multiple focal spot pattern optimized for the fabrication of certain microstructures. PP can be created by holographic laser beam modulation with a spatial light modulator (SLM). The quantity and position of the multiple foci can be flexibly and precisely controlled by predesigned computer generated holograms (CGHs). With these specially designed PPs, parallel fabrication of arbitrary distributed microlens arrays and 3D photonic structures is demonstrated. This method significantly improves throughput and flexibility of the 2PP technique and can be used for mass production of functional devices in micro-optics and photonics.
AB - Two-photon polymerization (2PP) is a powerful tool for direct laser writing of micro-optical and photonic structures due to its flexibility in 3D structuring and sub-micrometer resolution. However, it can be time consuming to fabricate arrays of micro-optical devices and complex photonic structures. In this study, we propose to use predefined patterns (PPs) for parallel 2PP processing. A PP contains a multiple focal spot pattern optimized for the fabrication of certain microstructures. PP can be created by holographic laser beam modulation with a spatial light modulator (SLM). The quantity and position of the multiple foci can be flexibly and precisely controlled by predesigned computer generated holograms (CGHs). With these specially designed PPs, parallel fabrication of arbitrary distributed microlens arrays and 3D photonic structures is demonstrated. This method significantly improves throughput and flexibility of the 2PP technique and can be used for mass production of functional devices in micro-optics and photonics.
KW - Femtosecond laser
KW - Micro-optics
KW - Spatial light modulator
KW - Two-photon polymerization
UR - http://www.scopus.com/inward/record.url?scp=84924537820&partnerID=8YFLogxK
U2 - 10.1016/j.optlaseng.2015.02.006
DO - 10.1016/j.optlaseng.2015.02.006
M3 - Article
AN - SCOPUS:84924537820
VL - 70
SP - 26
EP - 32
JO - Optics and lasers in engineering
JF - Optics and lasers in engineering
SN - 0143-8166
ER -