Optimized induction heating in planetary reactors for semiconductor industry

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Original languageEnglish
Title of host publicationInduction, dielectric and microwaves, conduction & electromagnetic processing
Subtitle of host publicationInternational Symposium on Heating by Electromagnetic Sources ; Padua, May 18 - 21, 2010
Place of PublicationPadova
Pages713-718
Publication statusPublished - 2010
EventInternational Symposium on Heating by Electromagnetic Sources - Padua
Duration: 18 May 201021 May 2010

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Optimized induction heating in planetary reactors for semiconductor industry. / Nacke, Bernard; Nikanorov, Alexandre; Zedler, T.
Induction, dielectric and microwaves, conduction & electromagnetic processing: International Symposium on Heating by Electromagnetic Sources ; Padua, May 18 - 21, 2010. Padova, 2010. p. 713-718.

Research output: Chapter in book/report/conference proceedingConference contributionResearch

Nacke, B, Nikanorov, A & Zedler, T 2010, Optimized induction heating in planetary reactors for semiconductor industry. in Induction, dielectric and microwaves, conduction & electromagnetic processing: International Symposium on Heating by Electromagnetic Sources ; Padua, May 18 - 21, 2010. Padova, pp. 713-718, International Symposium on Heating by Electromagnetic Sources, Padua, 18 May 2010.
Nacke, B., Nikanorov, A., & Zedler, T. (2010). Optimized induction heating in planetary reactors for semiconductor industry. In Induction, dielectric and microwaves, conduction & electromagnetic processing: International Symposium on Heating by Electromagnetic Sources ; Padua, May 18 - 21, 2010 (pp. 713-718).
Nacke B, Nikanorov A, Zedler T. Optimized induction heating in planetary reactors for semiconductor industry. In Induction, dielectric and microwaves, conduction & electromagnetic processing: International Symposium on Heating by Electromagnetic Sources ; Padua, May 18 - 21, 2010. Padova. 2010. p. 713-718
Nacke, Bernard ; Nikanorov, Alexandre ; Zedler, T. / Optimized induction heating in planetary reactors for semiconductor industry. Induction, dielectric and microwaves, conduction & electromagnetic processing: International Symposium on Heating by Electromagnetic Sources ; Padua, May 18 - 21, 2010. Padova, 2010. pp. 713-718
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title = "Optimized induction heating in planetary reactors for semiconductor industry",
author = "Bernard Nacke and Alexandre Nikanorov and T. Zedler",
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isbn = "978-88-89884-13-3",
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booktitle = "Induction, dielectric and microwaves, conduction & electromagnetic processing",
note = "International Symposium on Heating by Electromagnetic Sources, HES ; Conference date: 18-05-2010 Through 21-05-2010",

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TY - GEN

T1 - Optimized induction heating in planetary reactors for semiconductor industry

AU - Nacke, Bernard

AU - Nikanorov, Alexandre

AU - Zedler, T.

PY - 2010

Y1 - 2010

M3 - Conference contribution

SN - 978-88-89884-13-3

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EP - 718

BT - Induction, dielectric and microwaves, conduction & electromagnetic processing

CY - Padova

T2 - International Symposium on Heating by Electromagnetic Sources

Y2 - 18 May 2010 through 21 May 2010

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