Details
| Original language | English |
|---|---|
| Title of host publication | Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies |
| Subtitle of host publication | 3 - 5 August 2003, San Diego, California, USA |
| Place of Publication | Bellingham |
| Publisher | SPIE |
| Pages | 80-95 |
| Number of pages | 16 |
| ISBN (print) | 0-8194-5061-8 |
| Publication status | Published - 4 Nov 2003 |
| Externally published | Yes |
| Event | Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies - San Diego, CA, United States Duration: 3 Aug 2003 → 5 Aug 2003 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Publisher | SPIE |
| Volume | 5188 |
| ISSN (Print) | 0277-786X |
Abstract
Within the research network "New Optimization Concepts for High Quality UV-Coatings" European research groups cooperated to optimize optical coatings for applications in the UV/VUV-spectral range. Besides different production processes for UV-coating systems, an extended spectrum of characterization techniques has been investigated and adapted to the special requirements in the UV/VUV-spectral range by the partners. For a detailed study of the properties and their relation to the deposition parameters of UV-coatings, joint experiments were conducted by the consortium combining the research infrastructure of the partners. In the present contribution a review will be given on selected characterization techniques which were developed or adapted to coatings for the UV-range within the network. Results for fluoride coatings will be presented and discussed in respect to the parameters of conventional and ion beam sputtering processes applied for their production. Besides the optical parameters including absorption and scattering, also the structural properties and the surface quality of single layer MgF2 and LaF3-coatings will be summarised.
Keywords
- Absorptance, Fluoride coatings, Spectrometry, Total scattering, UV-spectral range
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies: 3 - 5 August 2003, San Diego, California, USA. Bellingham: SPIE, 2003. p. 80-95 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 5188).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Optimization of Optical Coatings for the UV/VUV-Range
AU - Ristau, Detlev
AU - Günster, Stefan
PY - 2003/11/4
Y1 - 2003/11/4
N2 - Within the research network "New Optimization Concepts for High Quality UV-Coatings" European research groups cooperated to optimize optical coatings for applications in the UV/VUV-spectral range. Besides different production processes for UV-coating systems, an extended spectrum of characterization techniques has been investigated and adapted to the special requirements in the UV/VUV-spectral range by the partners. For a detailed study of the properties and their relation to the deposition parameters of UV-coatings, joint experiments were conducted by the consortium combining the research infrastructure of the partners. In the present contribution a review will be given on selected characterization techniques which were developed or adapted to coatings for the UV-range within the network. Results for fluoride coatings will be presented and discussed in respect to the parameters of conventional and ion beam sputtering processes applied for their production. Besides the optical parameters including absorption and scattering, also the structural properties and the surface quality of single layer MgF2 and LaF3-coatings will be summarised.
AB - Within the research network "New Optimization Concepts for High Quality UV-Coatings" European research groups cooperated to optimize optical coatings for applications in the UV/VUV-spectral range. Besides different production processes for UV-coating systems, an extended spectrum of characterization techniques has been investigated and adapted to the special requirements in the UV/VUV-spectral range by the partners. For a detailed study of the properties and their relation to the deposition parameters of UV-coatings, joint experiments were conducted by the consortium combining the research infrastructure of the partners. In the present contribution a review will be given on selected characterization techniques which were developed or adapted to coatings for the UV-range within the network. Results for fluoride coatings will be presented and discussed in respect to the parameters of conventional and ion beam sputtering processes applied for their production. Besides the optical parameters including absorption and scattering, also the structural properties and the surface quality of single layer MgF2 and LaF3-coatings will be summarised.
KW - Absorptance
KW - Fluoride coatings
KW - Spectrometry
KW - Total scattering
KW - UV-spectral range
UR - http://www.scopus.com/inward/record.url?scp=2342622122&partnerID=8YFLogxK
U2 - 10.1117/12.507067
DO - 10.1117/12.507067
M3 - Conference contribution
AN - SCOPUS:2342622122
SN - 0-8194-5061-8
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 80
EP - 95
BT - Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
PB - SPIE
CY - Bellingham
T2 - Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
Y2 - 3 August 2003 through 5 August 2003
ER -