Details
| Original language | English |
|---|---|
| Title of host publication | Advances in Optical Thin Films II |
| Subtitle of host publication | 13 - 15 September 2005, Jena, Germany |
| Place of Publication | Bellingham |
| Publisher | SPIE |
| ISBN (print) | 0-8194-5981-X |
| Publication status | Published - 5 Oct 2005 |
| Externally published | Yes |
| Event | Advances in Optical Thin Films II - Jena, Germany Duration: 13 Sept 2005 → 15 Sept 2005 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Publisher | SPIE |
| Volume | 5963 |
| ISSN (Print) | 0277-786X |
Abstract
Rugate filters have a high potential for solving specific design problems in many applications of modem optics and lighting technology. However, the exact manufacture of these gradual layer systems is still a challenge which could not be solved completely until today. One of the prominent approaches for the production of rugate filters is based on independent quartz crystal devices measuring the rate of the different coating materials. As an alternative, optical broadband monitoring has been already qualified for controlling the deposition of complicated non quarterwave stacks. In the present study, promising results of this deposition control concept as a direct monitoring of rugate filters will be presented. In a first attempt, the continuous change of refractive indices in the graded layers was transformed to a set of discrete homogeneous sub-layers with thicknesses values of around 5 nm. These discrete layers are realized by defined mixtures of two materials. A data base for the dispersion behavior was created for the different mixing ratios and is employed for the production of such quasi-rugate filters. The optical monitor is operated in the routine mode determining the switching points of the layers. Selected examples will be presented for quasi rugate coatings produced by ion beam sputtering from a movable zone target. Different designs will be discussed considering production problems as well as achievable optical properties.
Keywords
- Broadband optical monitoring, Ion beam sputtering, Optical interference coatings, Rugate filters
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- BibTeX
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Advances in Optical Thin Films II: 13 - 15 September 2005, Jena, Germany. Bellingham: SPIE, 2005. (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 5963).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Optical monitoring of rugate filters
AU - Lappschies, Marc
AU - Görtz, Björn
AU - Ristau, Detlev
PY - 2005/10/5
Y1 - 2005/10/5
N2 - Rugate filters have a high potential for solving specific design problems in many applications of modem optics and lighting technology. However, the exact manufacture of these gradual layer systems is still a challenge which could not be solved completely until today. One of the prominent approaches for the production of rugate filters is based on independent quartz crystal devices measuring the rate of the different coating materials. As an alternative, optical broadband monitoring has been already qualified for controlling the deposition of complicated non quarterwave stacks. In the present study, promising results of this deposition control concept as a direct monitoring of rugate filters will be presented. In a first attempt, the continuous change of refractive indices in the graded layers was transformed to a set of discrete homogeneous sub-layers with thicknesses values of around 5 nm. These discrete layers are realized by defined mixtures of two materials. A data base for the dispersion behavior was created for the different mixing ratios and is employed for the production of such quasi-rugate filters. The optical monitor is operated in the routine mode determining the switching points of the layers. Selected examples will be presented for quasi rugate coatings produced by ion beam sputtering from a movable zone target. Different designs will be discussed considering production problems as well as achievable optical properties.
AB - Rugate filters have a high potential for solving specific design problems in many applications of modem optics and lighting technology. However, the exact manufacture of these gradual layer systems is still a challenge which could not be solved completely until today. One of the prominent approaches for the production of rugate filters is based on independent quartz crystal devices measuring the rate of the different coating materials. As an alternative, optical broadband monitoring has been already qualified for controlling the deposition of complicated non quarterwave stacks. In the present study, promising results of this deposition control concept as a direct monitoring of rugate filters will be presented. In a first attempt, the continuous change of refractive indices in the graded layers was transformed to a set of discrete homogeneous sub-layers with thicknesses values of around 5 nm. These discrete layers are realized by defined mixtures of two materials. A data base for the dispersion behavior was created for the different mixing ratios and is employed for the production of such quasi-rugate filters. The optical monitor is operated in the routine mode determining the switching points of the layers. Selected examples will be presented for quasi rugate coatings produced by ion beam sputtering from a movable zone target. Different designs will be discussed considering production problems as well as achievable optical properties.
KW - Broadband optical monitoring
KW - Ion beam sputtering
KW - Optical interference coatings
KW - Rugate filters
UR - http://www.scopus.com/inward/record.url?scp=33144458795&partnerID=8YFLogxK
U2 - 10.1117/12.625122
DO - 10.1117/12.625122
M3 - Conference contribution
AN - SCOPUS:33144458795
SN - 0-8194-5981-X
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advances in Optical Thin Films II
PB - SPIE
CY - Bellingham
T2 - Advances in Optical Thin Films II
Y2 - 13 September 2005 through 15 September 2005
ER -