Details
| Original language | English |
|---|---|
| Title of host publication | 2023 Opto-Electronics and Communications Conference (OECC) |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (electronic) | 9781665462136 |
| ISBN (print) | 978-1-6654-6214-3 |
| Publication status | Published - 2023 |
| Event | Opto-Electronics and Communications Conference, OECC 2023 - Shanghai, China Duration: 2 Jul 2023 → 6 Jul 2023 |
Abstract
A simple and cost-effective UV-LED-based microscope projection lithography technique for the manufacturing of optical and plasmonic devices as well as their functionalities is demonstrated.
Keywords
- optical fabrication, photolithography, plasmonic, projection lithography
ASJC Scopus subject areas
- Computer Science(all)
- Computer Networks and Communications
- Engineering(all)
- Electrical and Electronic Engineering
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
Cite this
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2023 Opto-Electronics and Communications Conference (OECC). Institute of Electrical and Electronics Engineers Inc., 2023.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Optical and Plasmonic Devices Realized by UV-LED-Based Projection Photolithography
AU - Zheng, Lei
AU - Reinhardt, Carsten
AU - Roth, Bernhard
N1 - Funding Information: ACKNOWLEDGMENT The authors acknowledge the financial support from the German Research Foundation (DFG) under Germany’s Excellence Strategy within the Cluster of Excellence PhoenixD (EXC 2122, Project ID 390833453).
PY - 2023
Y1 - 2023
N2 - A simple and cost-effective UV-LED-based microscope projection lithography technique for the manufacturing of optical and plasmonic devices as well as their functionalities is demonstrated.
AB - A simple and cost-effective UV-LED-based microscope projection lithography technique for the manufacturing of optical and plasmonic devices as well as their functionalities is demonstrated.
KW - optical fabrication
KW - photolithography
KW - plasmonic
KW - projection lithography
UR - http://www.scopus.com/inward/record.url?scp=85170223662&partnerID=8YFLogxK
U2 - 10.1109/OECC56963.2023.10209806
DO - 10.1109/OECC56963.2023.10209806
M3 - Conference contribution
AN - SCOPUS:85170223662
SN - 978-1-6654-6214-3
BT - 2023 Opto-Electronics and Communications Conference (OECC)
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - Opto-Electronics and Communications Conference, OECC 2023
Y2 - 2 July 2023 through 6 July 2023
ER -