Details
| Original language | English |
|---|---|
| Title of host publication | Advances in Optical Thin Films IV |
| Publication status | Published - 3 Oct 2011 |
| Externally published | Yes |
| Event | Advances in Optical Thin Films IV - Marseille, France Duration: 5 Sept 2011 → 7 Sept 2011 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 8168 |
| ISSN (Print) | 0277-786X |
Abstract
The present study deals with the characterization of hafnia, alumina, and zirconia coatings as well as mixtures thereof with respect to applications in the UV. Emphasis is placed on optical properties, particularly on the relation between UV refractive index and absorption edge. The shift of the coatings is investigated as well as the mechanical stress. Finally, we present the results of stress measurements performed for quarterwave stacks deposited on different substrates in a broad range of deposition temperatures. In this study, no systematic dependence of the result of the stress measurement on the substrate material and geometry could be identified.
Keywords
- Alumina, Hafnia, Mechanical stress, Multilayers, Optical constants
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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Advances in Optical Thin Films IV. 2011. 1 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8168).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques
AU - Stenzel, Olaf
AU - Schürmann, Mark
AU - Wilbrandt, Steffen
AU - Kaiser, Norbert
AU - Tünnermann, Andreas
AU - Mende, Mathias
AU - Ehlers, Henrik
AU - Ristau, Detlev
AU - Bruns, Stefan
AU - Vergöhl, Michael
AU - Riggers, Werner
AU - Bischoff, Martin
AU - Held, Mario
PY - 2011/10/3
Y1 - 2011/10/3
N2 - The present study deals with the characterization of hafnia, alumina, and zirconia coatings as well as mixtures thereof with respect to applications in the UV. Emphasis is placed on optical properties, particularly on the relation between UV refractive index and absorption edge. The shift of the coatings is investigated as well as the mechanical stress. Finally, we present the results of stress measurements performed for quarterwave stacks deposited on different substrates in a broad range of deposition temperatures. In this study, no systematic dependence of the result of the stress measurement on the substrate material and geometry could be identified.
AB - The present study deals with the characterization of hafnia, alumina, and zirconia coatings as well as mixtures thereof with respect to applications in the UV. Emphasis is placed on optical properties, particularly on the relation between UV refractive index and absorption edge. The shift of the coatings is investigated as well as the mechanical stress. Finally, we present the results of stress measurements performed for quarterwave stacks deposited on different substrates in a broad range of deposition temperatures. In this study, no systematic dependence of the result of the stress measurement on the substrate material and geometry could be identified.
KW - Alumina
KW - Hafnia
KW - Mechanical stress
KW - Multilayers
KW - Optical constants
UR - http://www.scopus.com/inward/record.url?scp=80455125900&partnerID=8YFLogxK
U2 - 10.1117/12.896775
DO - 10.1117/12.896775
M3 - Conference contribution
AN - SCOPUS:80455125900
SN - 9780819487940
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advances in Optical Thin Films IV
T2 - Advances in Optical Thin Films IV
Y2 - 5 September 2011 through 7 September 2011
ER -