Details
| Original language | English |
|---|---|
| Title of host publication | Polymer Optics and Molded Glass Optics |
| Subtitle of host publication | Design, Fabrication, and Materials II |
| Number of pages | 6 |
| Publication status | Published - 19 Oct 2012 |
| Event | Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II - San Diego, CA, United States Duration: 15 Aug 2012 → 16 Aug 2012 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 8489 |
| ISSN (Print) | 0277-786X |
Abstract
With its chemical resistance and easy structurability, polyimide (PI) makes for a fine candidate for membranes of tuneable optical systems. Disadvantages of the material are its high absorption coefficient and its mechanical stability, which prevents high deections of the membrane. To improve the optical capabilities of the material, different variations of processing of the membrane are used. For fabrication of the PI membrane, a photosensitive PI precursor is used. The precursor is spin coated on a 4"' Si wafer. After a prebake, the wafer is exposed to UV light. To manipulate the optical properties, different types of postbake are investigated. Afterwards, the backside of the wafer is structured by Deep Reactive Ion Etching (DRIE). Thus, a temporary photoresist etching mask is manufactured by photolithography on the wafer backside. Circular structures with a diameter of 2 mm are then etched through the wafer to fabricate the membranes. The absorption coefficient of the different manufactured membranes is measured. For future use of the membrane as part of a variable optical system, a FEM-Model is built to predict the behaviour of the membrane under mechanical loads, especially considering strains and stresses induced by the different postbake types. The results of the FEM-Model are compared with experimental data obtained via digital image processing methods. Comparative data using different membrane materials are also presented to compare the performance of the PI membrane.
Keywords
- Membrane lens, Polyimide, Tunable lens
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II. 2012. 84890F (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8489).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Optical and mechanical properties of a polyimide membrane for tunable lenses
AU - Kelb, Christian
AU - Hoheisel, Dominik
AU - Reithmeier, Eduard
AU - Rissing, Lutz
PY - 2012/10/19
Y1 - 2012/10/19
N2 - With its chemical resistance and easy structurability, polyimide (PI) makes for a fine candidate for membranes of tuneable optical systems. Disadvantages of the material are its high absorption coefficient and its mechanical stability, which prevents high deections of the membrane. To improve the optical capabilities of the material, different variations of processing of the membrane are used. For fabrication of the PI membrane, a photosensitive PI precursor is used. The precursor is spin coated on a 4"' Si wafer. After a prebake, the wafer is exposed to UV light. To manipulate the optical properties, different types of postbake are investigated. Afterwards, the backside of the wafer is structured by Deep Reactive Ion Etching (DRIE). Thus, a temporary photoresist etching mask is manufactured by photolithography on the wafer backside. Circular structures with a diameter of 2 mm are then etched through the wafer to fabricate the membranes. The absorption coefficient of the different manufactured membranes is measured. For future use of the membrane as part of a variable optical system, a FEM-Model is built to predict the behaviour of the membrane under mechanical loads, especially considering strains and stresses induced by the different postbake types. The results of the FEM-Model are compared with experimental data obtained via digital image processing methods. Comparative data using different membrane materials are also presented to compare the performance of the PI membrane.
AB - With its chemical resistance and easy structurability, polyimide (PI) makes for a fine candidate for membranes of tuneable optical systems. Disadvantages of the material are its high absorption coefficient and its mechanical stability, which prevents high deections of the membrane. To improve the optical capabilities of the material, different variations of processing of the membrane are used. For fabrication of the PI membrane, a photosensitive PI precursor is used. The precursor is spin coated on a 4"' Si wafer. After a prebake, the wafer is exposed to UV light. To manipulate the optical properties, different types of postbake are investigated. Afterwards, the backside of the wafer is structured by Deep Reactive Ion Etching (DRIE). Thus, a temporary photoresist etching mask is manufactured by photolithography on the wafer backside. Circular structures with a diameter of 2 mm are then etched through the wafer to fabricate the membranes. The absorption coefficient of the different manufactured membranes is measured. For future use of the membrane as part of a variable optical system, a FEM-Model is built to predict the behaviour of the membrane under mechanical loads, especially considering strains and stresses induced by the different postbake types. The results of the FEM-Model are compared with experimental data obtained via digital image processing methods. Comparative data using different membrane materials are also presented to compare the performance of the PI membrane.
KW - Membrane lens
KW - Polyimide
KW - Tunable lens
UR - http://www.scopus.com/inward/record.url?scp=84872925394&partnerID=8YFLogxK
U2 - 10.1117/12.929773
DO - 10.1117/12.929773
M3 - Conference contribution
AN - SCOPUS:84872925394
SN - 9780819492067
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Polymer Optics and Molded Glass Optics
T2 - Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II
Y2 - 15 August 2012 through 16 August 2012
ER -