Details
| Original language | English |
|---|---|
| Title of host publication | Advances in Optical Thin Films IV |
| Publication status | Published - 3 Oct 2011 |
| Externally published | Yes |
| Event | Advances in Optical Thin Films IV - Marseille, France Duration: 5 Sept 2011 → 7 Sept 2011 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 8168 |
| ISSN (Print) | 0277-786X |
Abstract
Enhanced strategies in optical broadband monitoring allow for thin film deposition under rapid production conditions with very high process stability. Recent developments in the field include simulation techniques with virtual deposition systems, to enable a pre-selection of different multilayer designs, and hybrid process control strategies which combine optical monitoring with quartz crystal monitoring. In particular, automated online error re-calculation and design reoptimization are presently in the focus of research to improve the efficiency of deposition plants. In this contribution a developed re-optimization module is presented, and the resulting increase in production yield of complicated multilayer designs is demonstrated by deposition examples. Besides automated design changes directly initiated by the re-calculation software, the presented approach also considers supervising functions that stop the deposition run when critical errors are detected.
Keywords
- Automated re-optimization, BBM, Computational manufacturing, Optical broadband monitoring, Optical thin films, Re-calculation, Virtual deposition
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
- Standard
- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
Advances in Optical Thin Films IV. 2011. 1 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8168).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Online re-optimization as a powerful part of enhanced strategies in optical broadband monitoring
AU - Schlichting, S.
AU - Heinrich, K.
AU - Ehlers, Henrik
AU - Ristau, Detlev
PY - 2011/10/3
Y1 - 2011/10/3
N2 - Enhanced strategies in optical broadband monitoring allow for thin film deposition under rapid production conditions with very high process stability. Recent developments in the field include simulation techniques with virtual deposition systems, to enable a pre-selection of different multilayer designs, and hybrid process control strategies which combine optical monitoring with quartz crystal monitoring. In particular, automated online error re-calculation and design reoptimization are presently in the focus of research to improve the efficiency of deposition plants. In this contribution a developed re-optimization module is presented, and the resulting increase in production yield of complicated multilayer designs is demonstrated by deposition examples. Besides automated design changes directly initiated by the re-calculation software, the presented approach also considers supervising functions that stop the deposition run when critical errors are detected.
AB - Enhanced strategies in optical broadband monitoring allow for thin film deposition under rapid production conditions with very high process stability. Recent developments in the field include simulation techniques with virtual deposition systems, to enable a pre-selection of different multilayer designs, and hybrid process control strategies which combine optical monitoring with quartz crystal monitoring. In particular, automated online error re-calculation and design reoptimization are presently in the focus of research to improve the efficiency of deposition plants. In this contribution a developed re-optimization module is presented, and the resulting increase in production yield of complicated multilayer designs is demonstrated by deposition examples. Besides automated design changes directly initiated by the re-calculation software, the presented approach also considers supervising functions that stop the deposition run when critical errors are detected.
KW - Automated re-optimization
KW - BBM
KW - Computational manufacturing
KW - Optical broadband monitoring
KW - Optical thin films
KW - Re-calculation
KW - Virtual deposition
UR - http://www.scopus.com/inward/record.url?scp=80455131174&partnerID=8YFLogxK
U2 - 10.1117/12.898557
DO - 10.1117/12.898557
M3 - Conference contribution
AN - SCOPUS:80455131174
SN - 9780819487940
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advances in Optical Thin Films IV
T2 - Advances in Optical Thin Films IV
Y2 - 5 September 2011 through 7 September 2011
ER -