Details
| Original language | English |
|---|---|
| Title of host publication | Optical Interference Coatings |
| Subtitle of host publication | OIC 2010 |
| Publisher | OSA - The Optical Society |
| ISBN (print) | 9781557528919 |
| Publication status | Published - 2010 |
| Externally published | Yes |
| Event | Optical Interference Coatings, OIC 2010 - Tucson, AZ, United States Duration: 6 Jun 2010 → 11 Jun 2010 |
Publication series
| Name | Optics InfoBase Conference Papers |
|---|---|
| ISSN (electronic) | 2162-2701 |
Abstract
The contents of oxygen species are measured in the reactive atmosphere of an ion beam sputtering process. Based on oxygen sensor concepts, a reliable early detection for absorption in TiO2 layers is studied.
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Instrumentation
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
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Optical Interference Coatings: OIC 2010. OSA - The Optical Society, 2010. (Optics InfoBase Conference Papers).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Online detection of ozone in ion beam sputtering
AU - Schmitz, Carsten
AU - Ehlers, Henrik
AU - Ristau, Detlev
PY - 2010
Y1 - 2010
N2 - The contents of oxygen species are measured in the reactive atmosphere of an ion beam sputtering process. Based on oxygen sensor concepts, a reliable early detection for absorption in TiO2 layers is studied.
AB - The contents of oxygen species are measured in the reactive atmosphere of an ion beam sputtering process. Based on oxygen sensor concepts, a reliable early detection for absorption in TiO2 layers is studied.
UR - http://www.scopus.com/inward/record.url?scp=85087593769&partnerID=8YFLogxK
U2 - 10.1364/oic.2010.tud4
DO - 10.1364/oic.2010.tud4
M3 - Conference contribution
AN - SCOPUS:85087593769
SN - 9781557528919
T3 - Optics InfoBase Conference Papers
BT - Optical Interference Coatings
PB - OSA - The Optical Society
T2 - Optical Interference Coatings, OIC 2010
Y2 - 6 June 2010 through 11 June 2010
ER -