Numerical investigation of silicon melt flow in large diameter CZ-crystal growth under the influence of steady and dynamic magnetic fields

Research output: Contribution to journalConference articleResearchpeer review

Authors

  • J. Virbulis
  • Th Wetzel
  • A. Muiznieks
  • B. Hanna
  • E. Dornberger
  • E. Tomzig
  • A. Mühlbauer
  • W. V. Ammon

External Research Organisations

  • Siltronic AG
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Details

Original languageEnglish
Pages (from-to)92-99
Number of pages8
JournalJournal of crystal growth
Volume230
Issue number1-2
Publication statusPublished - Aug 2001

Abstract

Turbulent silicon melt flows are studied in large diameter Czochralski crucibles under the influence of alternating, steady and combined magnetic fields. The investigations are based on the experimentally verified two-dimensional axisymmetric mathematical models. The influence of steady, alternating and combined magnetic fields on the flow pattern and temperature field is investigated. Global heat transfer and melt flow calculations are coupled and the influence of melt convection on the interface shape is studied and compared with experimental data.

Keywords

    A1. Fluid flows, A1. Heat transfer, A1. Magnetic fields, A2. Czochralski method, B2. Semiconducting silicon

ASJC Scopus subject areas

Cite this

Numerical investigation of silicon melt flow in large diameter CZ-crystal growth under the influence of steady and dynamic magnetic fields. / Virbulis, J.; Wetzel, Th; Muiznieks, A. et al.
In: Journal of crystal growth, Vol. 230, No. 1-2, 08.2001, p. 92-99.

Research output: Contribution to journalConference articleResearchpeer review

Virbulis, J, Wetzel, T, Muiznieks, A, Hanna, B, Dornberger, E, Tomzig, E, Mühlbauer, A & Ammon, WV 2001, 'Numerical investigation of silicon melt flow in large diameter CZ-crystal growth under the influence of steady and dynamic magnetic fields', Journal of crystal growth, vol. 230, no. 1-2, pp. 92-99. https://doi.org/10.1016/S0022-0248(01)01321-5
Virbulis, J., Wetzel, T., Muiznieks, A., Hanna, B., Dornberger, E., Tomzig, E., Mühlbauer, A., & Ammon, W. V. (2001). Numerical investigation of silicon melt flow in large diameter CZ-crystal growth under the influence of steady and dynamic magnetic fields. Journal of crystal growth, 230(1-2), 92-99. https://doi.org/10.1016/S0022-0248(01)01321-5
Virbulis J, Wetzel T, Muiznieks A, Hanna B, Dornberger E, Tomzig E et al. Numerical investigation of silicon melt flow in large diameter CZ-crystal growth under the influence of steady and dynamic magnetic fields. Journal of crystal growth. 2001 Aug;230(1-2):92-99. doi: 10.1016/S0022-0248(01)01321-5
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abstract = "Turbulent silicon melt flows are studied in large diameter Czochralski crucibles under the influence of alternating, steady and combined magnetic fields. The investigations are based on the experimentally verified two-dimensional axisymmetric mathematical models. The influence of steady, alternating and combined magnetic fields on the flow pattern and temperature field is investigated. Global heat transfer and melt flow calculations are coupled and the influence of melt convection on the interface shape is studied and compared with experimental data.",
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note = "Funding Information: The authors would like to thank O. Gr{\"a}bner and G. M{\"u}ller for the experimental results which were obtained in cooperation with Wacker Siltronic AG and Fraunhofer-Institute, IIS-B, Department of Crystal Growth, Erlangen, Germany. The work was supported by the German Federal Ministry of Education, Science, Research and Technology under Contract Nr. 01M2973A. The authors alone are responsible for the content of this publication. Copyright: Copyright 2007 Elsevier B.V., All rights reserved.",
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Download

TY - JOUR

T1 - Numerical investigation of silicon melt flow in large diameter CZ-crystal growth under the influence of steady and dynamic magnetic fields

AU - Virbulis, J.

AU - Wetzel, Th

AU - Muiznieks, A.

AU - Hanna, B.

AU - Dornberger, E.

AU - Tomzig, E.

AU - Mühlbauer, A.

AU - Ammon, W. V.

N1 - Funding Information: The authors would like to thank O. Gräbner and G. Müller for the experimental results which were obtained in cooperation with Wacker Siltronic AG and Fraunhofer-Institute, IIS-B, Department of Crystal Growth, Erlangen, Germany. The work was supported by the German Federal Ministry of Education, Science, Research and Technology under Contract Nr. 01M2973A. The authors alone are responsible for the content of this publication. Copyright: Copyright 2007 Elsevier B.V., All rights reserved.

PY - 2001/8

Y1 - 2001/8

N2 - Turbulent silicon melt flows are studied in large diameter Czochralski crucibles under the influence of alternating, steady and combined magnetic fields. The investigations are based on the experimentally verified two-dimensional axisymmetric mathematical models. The influence of steady, alternating and combined magnetic fields on the flow pattern and temperature field is investigated. Global heat transfer and melt flow calculations are coupled and the influence of melt convection on the interface shape is studied and compared with experimental data.

AB - Turbulent silicon melt flows are studied in large diameter Czochralski crucibles under the influence of alternating, steady and combined magnetic fields. The investigations are based on the experimentally verified two-dimensional axisymmetric mathematical models. The influence of steady, alternating and combined magnetic fields on the flow pattern and temperature field is investigated. Global heat transfer and melt flow calculations are coupled and the influence of melt convection on the interface shape is studied and compared with experimental data.

KW - A1. Fluid flows

KW - A1. Heat transfer

KW - A1. Magnetic fields

KW - A2. Czochralski method

KW - B2. Semiconducting silicon

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U2 - 10.1016/S0022-0248(01)01321-5

DO - 10.1016/S0022-0248(01)01321-5

M3 - Conference article

AN - SCOPUS:0035426550

VL - 230

SP - 92

EP - 99

JO - Journal of crystal growth

JF - Journal of crystal growth

SN - 0022-0248

IS - 1-2

ER -