Details
| Original language | English |
|---|---|
| Number of pages | 10 |
| Publication status | E-pub ahead of print - 2024 |
Abstract
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2024.
Research output: Working paper/Preprint › Preprint
}
TY - UNPB
T1 - Novel Concept for Micro-Assembly of Optical Devices Using a Planar Motor System
AU - Terei, Niklas
AU - Binnemann, Lars
AU - Raatz, Annika
PY - 2024
Y1 - 2024
N2 - Research and Development in recent years has led to first commercially available, magnetically levitated planar motor systems. Considering the advantages of such systems, they perfectly fit as a substitute for multi-axis fine positioning stages in high-volume productions. To address the need for solutions for high-volume packaging of optical devices, we present a novel concept for a micro-assembly station using a planar motor. To qualify a novel, vacuum-operatable planar motor system for our design, we conducted experiments regarding positioning repeatability, positioning noise, and dynamics on a pre-series system.
AB - Research and Development in recent years has led to first commercially available, magnetically levitated planar motor systems. Considering the advantages of such systems, they perfectly fit as a substitute for multi-axis fine positioning stages in high-volume productions. To address the need for solutions for high-volume packaging of optical devices, we present a novel concept for a micro-assembly station using a planar motor. To qualify a novel, vacuum-operatable planar motor system for our design, we conducted experiments regarding positioning repeatability, positioning noise, and dynamics on a pre-series system.
U2 - 10.15488/16411
DO - 10.15488/16411
M3 - Preprint
BT - Novel Concept for Micro-Assembly of Optical Devices Using a Planar Motor System
ER -